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<p class="MsoNormal">We had the same issue on our board, but I was able to replace the transistor and get our PECVD up and running.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="color:black">Cheers!<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:black">Julia Aebersold, Ph.D.</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">Manager, Micro/Nano Technology Center</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">University of Louisville</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black">Shumaker Research Building, Room 233</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif;color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"> </span><span style="font-size:12.0pt;font-family:"Times New Roman",serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black"><a href="http://louisville.edu/micronano/"><span style="color:black">http://louisville.edu/micronano/</span></a></span><span style="color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> <b>
On Behalf Of </b>Football<br>
<b>Sent:</b> Thursday, June 23, 2022 11:13 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Oxford Wafer Jam/Break<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<b><span style="font-size:10.0pt;color:black">CAUTION:</span></b><span style="font-size:10.0pt;color:black"> This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address
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<p class="MsoNormal"><i>Hi Long,</i><o:p></o:p></p>
<p class="MsoNormal"><i>We had a very similar issue on an Oxford PECVD tool some time back. And it was a ZTX 450 transistor on a board under the loadlock chamber that was burnt out. And as others have mentioned, it can be identified by the discolored place
on the board. The service engineer from Oxford replaced the board though.</i><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:12.0pt"><img border="0" width="562" height="280" style="width:5.85in;height:2.9166in" id="Picture_x0020_1" src="cid:image001.png@01D887BA.F7463570"></span><span style="font-size:12.0pt"><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><i>Fubo Rao, Ph.D.,</i><o:p></o:p></p>
<p class="MsoNormal"><i><span style="color:#4472C4">Nanofabrication Cleanroom Manager,</span></i><o:p></o:p></p>
<p class="MsoNormal"><i><span style="color:#4472C4">Center for Nanoscale Materials,</span></i><o:p></o:p></p>
<p class="MsoNormal"><i><span style="color:#4472C4">Argonne National Laboratory</span></i><o:p></o:p></p>
<p class="MsoNormal"><i><span style="color:#4472C4">9700 S. Cass Ave, Lemont, IL 60439</span></i><o:p></o:p></p>
<p class="MsoNormal"><i><span style="color:#4472C4">Phone: 630-252-5708</span></i><o:p></o:p></p>
<p class="MsoNormal"><i><span style="color:#4472C4">Email: <a href="https://nam11.safelinks.protection.outlook.com/?url=http%3A%2F%2Ffrao%40anl.gov%2F&data=05%7C01%7Cjulia.aebersold%40louisville.EDU%7Cf866969679974a32d66908da555a0cf4%7Cdd246e4a54344e158ae391ad9797b209%7C0%7C0%7C637916144256104262%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C3000%7C%7C%7C&sdata=9C0Pkd3ltGSxQqbPOBfwalXl5XofWUtrAi1BGkmaBWM%3D&reserved=0">
<span style="color:#4472C4">frao@anl.gov</span></a></span></i><o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">On Thu, Jun 23, 2022 at 8:50 AM Michael Perry <<a href="mailto:M.G.Perry@soton.ac.uk">M.G.Perry@soton.ac.uk</a>> wrote:<o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;color:black">Hi Long, <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;color:black">Justin is likely to be right, as steve says, he knows his stuff. If its been failing for some time though it can also start to burn out one of the other transistors. Any that are discolored replace.
Its sometimes easier to just snip the legs off and solder a new one to the legs to minimise risk of damage to pcb. Or if you want to future proof it, stick some sockets in there. Really common problem on oipt LL's. keep a batch on 450's and 550's as spares.
They can fail as well.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;color:black">mike<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="color:black">From:</span></b><span style="color:black"> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>> on behalf of Paolini, Steven <<a href="mailto:spaolini@cns.fas.harvard.edu" target="_blank">spaolini@cns.fas.harvard.edu</a>><br>
<b>Sent:</b> 22 June 2022 17:06<br>
<b>To:</b> Moreau, Justin <<a href="mailto:Justin_Moreau@uml.edu" target="_blank">Justin_Moreau@uml.edu</a>>; Chang, Long <<a href="mailto:lvchang@Central.UH.EDU" target="_blank">lvchang@Central.UH.EDU</a>>;
<a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a> <<a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a>><br>
<b>Subject:</b> Re: [labnetwork] Oxford Wafer Jam/Break</span> <o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal" style="line-height:16.5pt;background:#F7F9FA"><strong><span style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:#8D3970">CAUTION:</span></strong><span style="font-size:10.5pt;color:#8D3970"> This e-mail originated outside the
University of Southampton. <o:p></o:p></span></p>
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<p>Long,<o:p></o:p></p>
<p> I misinterpreted your message yesterday. It would be wise to take Justin’s advice, he is the top dog when it comes to Oxford equipment.<o:p></o:p></p>
<p>Steve<o:p></o:p></p>
<p> <o:p></o:p></p>
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<p><span style="font-size:14.0pt">Steve Paolini</span><o:p></o:p></p>
<p><span style="font-size:14.0pt">Principal Equipment Engineer</span><o:p></o:p></p>
<p><span style="font-size:14.0pt">Harvard University Center for Nanoscale Systems</span><o:p></o:p></p>
<p><span style="font-size:14.0pt">11 Oxford St.</span><o:p></o:p></p>
<p><span style="font-size:14.0pt">Cambridge, MA 02138</span><o:p></o:p></p>
<p><span style="font-size:14.0pt">617- 496- 9816</span><o:p></o:p></p>
<p><span style="font-size:14.0pt"><a href="mailto:spaolini@cns.fas.harvard.edu" target="_blank">spaolini@cns.fas.harvard.edu</a></span><o:p></o:p></p>
<p><span style="font-size:14.0pt"><a href="https://nam11.safelinks.protection.outlook.com/?url=http%3A%2F%2Fwww.cns.fas.harvard.edu%2F&data=05%7C01%7Cjulia.aebersold%40louisville.EDU%7Cf866969679974a32d66908da555a0cf4%7Cdd246e4a54344e158ae391ad9797b209%7C0%7C0%7C637916144256104262%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C3000%7C%7C%7C&sdata=Rx2fLmsIEQ%2ByWLthUZ%2FX8oVE%2BzyPPs9zZQSiPF2JEKQ%3D&reserved=0" target="_blank">www.cns.fas.harvard.edu</a></span><o:p></o:p></p>
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<p><b>From:</b> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Moreau, Justin<br>
<b>Sent:</b> Wednesday, June 22, 2022 7:59 AM<br>
<b>To:</b> Chang, Long <<a href="mailto:lvchang@Central.UH.EDU" target="_blank">lvchang@Central.UH.EDU</a>>;
<a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> Re: [labnetwork] Oxford Wafer Jam/Break<o:p></o:p></p>
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<p> <o:p></o:p></p>
<p>Hi Long<o:p></o:p></p>
<p> <o:p></o:p></p>
<p>By jamming does the handler just stall?<o:p></o:p></p>
<p>I don’t think adding more time or removing PR from your wafer edge will help.<o:p></o:p></p>
<p>I suspect one of the handling sensors isn’t made, you have a mechanical bind (ff feedthrough, gearbox, linear bearing) or you have a failing drive transistor.<o:p></o:p></p>
<p> <o:p></o:p></p>
<p>Looking at your image- Slit valve is open, clamp is up, lift is up, arm is extended<o:p></o:p></p>
<p> <o:p></o:p></p>
<p>Is your “arm out”sensor made? If no you should adjust the arm out sensor. <o:p>
</o:p></p>
<p> <o:p></o:p></p>
<p>If the arm out sensor is made. Check for a mechanical bind- Remove the mounting plate that holds the motor and gearbox assy. You can then try and rotate the ferrofluid feedthrough shaft by hand.
<o:p></o:p></p>
<p>If you can rotate, you don’t have a bind.<o:p></o:p></p>
<p> <o:p></o:p></p>
<p>This looks like a Blue PLC control system so it would likely be the Q4 transistor on the LL control card that’s the problem. Its mounted just below the LL chamber. It can overheat and intermittently work. Q4 controls the drive back into the LL.<o:p></o:p></p>
<p>It will also discolor so it should be easy to spot. You can replace it with a ZTX450 NPN.<o:p></o:p></p>
<p> <o:p></o:p></p>
<p> <o:p></o:p></p>
<p> <o:p></o:p></p>
<p>Hope this helps<o:p></o:p></p>
<p> <o:p></o:p></p>
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<p><b><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif;color:black">Justin Moreau</span></b><o:p></o:p></p>
<p><i><span style="font-size:10.5pt;font-family:"Times New Roman",serif;color:black">Sr. Lab Manager, Nanofabrication Core</span></i><o:p></o:p></p>
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<p style="line-height:18.0pt"><b><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black">E:</span></b><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black"> <a href="mailto:Justin_Moreau@uml.edu" target="_blank"><span style="color:black;text-decoration:none">Justin_Moreau@uml.edu</span></a>
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<p style="line-height:18.0pt"><b><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black">T:</span></b><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black"> 978-934-3615 </span><o:p></o:p></p>
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<p><b>From:</b> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Chang, Long<br>
<b>Sent:</b> Tuesday, June 21, 2022 2:51 PM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Oxford Wafer Jam/Break<o:p></o:p></p>
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<p> <o:p></o:p></p>
<p><b><span style="color:red">This e-mail originated from outside the UMass Lowell network.</span></b>
<o:p></o:p></p>
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<p>Hi Guys, <o:p></o:p></p>
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<p> <o:p></o:p></p>
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<p>After etching through 380um of Silicon, the loading arm would get jammed during unloading, see photo. The problem was fixed by adding a 15min step to do nothing step to allow the clamp to cool down before unloading. Now the problem is back and the plan is
to increase the cool down time until it stops jamming. Is there a better way to avoid this problem? Should the PR on the wafer edge be removed?<o:p></o:p></p>
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<p> <o:p></o:p></p>
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<p>Thanks,<o:p></o:p></p>
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<p><span style="color:black">Long</span><o:p></o:p></p>
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