<div dir="ltr"><div dir="ltr">Kevin,<div>Please correct me if I am wrong, but it looks like the machine will be in the air return area, maybe class 10,000. I don't believe that you need a tight seal there since the air pressure differential should move air away from your clean area. All you need to do is remove the possibility of a large draught around your door. I might suggest cutting out a square with a hole the size of the nipple, then cut that in half. Once you have put the door through then use those two pieces you cut out and collar it around the nipple and screw it onto the wall. you can even get some adhesive rubber tape to put on the edge of the cutout semicircles to have a tighter seal when you collar it.</div><div><br></div><div>I hope this idea helps,</div><div><br></div><div>Regards,</div><div><br></div><div>Carlos</div></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Fri, Jul 15, 2022 at 6:55 AM Kevin M McPeak <<a href="mailto:kmcpeak@lsu.edu">kmcpeak@lsu.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex">Dear Colleagues,<br>
<br>
Over the past year and a half, the LSU nanofabrication facility has constructed a plasma-enhanced ALD tool with much advice from Scott Butcher at MEAglow. See photos of the tool here: <a href="https://urldefense.com/v3/__https://photos.app.goo.gl/iBMRZnYfKJmJBQtKA__;!!BuQPrrmRaQ!n6ZgUquZKvgQ2tqHYmW6MHqdXDjnaK2fzJLoHyjThGLnphjv6Pd2qsVYSwpRqIYk9WlSmZp1RBAamtl5wYhp_CY$" rel="noreferrer" target="_blank">https://urldefense.com/v3/__https://photos.app.goo.gl/iBMRZnYfKJmJBQtKA__;!!BuQPrrmRaQ!n6ZgUquZKvgQ2tqHYmW6MHqdXDjnaK2fzJLoHyjThGLnphjv6Pd2qsVYSwpRqIYk9WlSmZp1RBAamtl5wYhp_CY$</a> <br>
<br>
Our current plan is to house the tool outside the cleanroom and have the heated/insulated door stick through a hole in the cleanroom wall (1/2" thick Al honeycomb), see photos.<br>
<br>
We are looking for ideas on the best way to seal the hole in the wall around the jacket. We are thinking of cutting the wall larger than the jacket diameter and then fabricating a large rubber grommet around the jacket. Hopefully, some of you have tools with these kinds of seals and can provide first-hand experience or even sources for the materials.<br>
<br>
The reactor body is built from a MDC 8" Tee (<a href="https://urldefense.com/v3/__https://www.mdcprecision.com/404041-tee-8-inchflange__;!!BuQPrrmRaQ!n6ZgUquZKvgQ2tqHYmW6MHqdXDjnaK2fzJLoHyjThGLnphjv6Pd2qsVYSwpRqIYk9WlSmZp1RBAamtl5julTbUE$" rel="noreferrer" target="_blank">https://urldefense.com/v3/__https://www.mdcprecision.com/404041-tee-8-inchflange__;!!BuQPrrmRaQ!n6ZgUquZKvgQ2tqHYmW6MHqdXDjnaK2fzJLoHyjThGLnphjv6Pd2qsVYSwpRqIYk9WlSmZp1RBAamtl5julTbUE$</a> ) with a 3/4" thick heated jacket wrapped around it. The maximum external temperature of the jacket is 129 F (touch safe). <br>
<br>
Thanks for your input in advance!<br>
<br>
Regards,<br>
Kevin<br>
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</blockquote></div><br clear="all"><div><br></div>-- <br><div dir="ltr" class="gmail_signature"><div dir="ltr">Carlos Gramajo<div>Cleanroom Research Scientist</div><div>Shared Equipment Authority (SEA), Rice University</div><div>Cell: 713-743-8115; Office: 713-348-8243; <a href="mailto:cg70@rice.edu" target="_blank">cg70@rice.edu</a></div></div></div></div>