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<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">Hi Kevin, <o:p>
</o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">We have used Mass Vac for several applications to protect our dry bed abatement canisters. I don’t have experience using the Multi-Trap for ALD Vacuum pumps, but I have been very pleased
with the Mass Vac systems. <o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">I have worked with David Rolph when needing particle traps. I included his email and phone below in case you want to reach out to him.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">Email: <a href="mailto:drolph@massvac.com">
drolph@massvac.com</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">Phone: 978-835-4666<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">Best Regards,
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">Mitchell Roselius<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">Eastern Regional Sales Engineer<o:p></o:p></span></p>
<p class="MsoNormal"><i><span style="font-size:14.0pt;font-family:"Times New Roman",serif">Critical Systems, Inc.<o:p></o:p></span></i></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">Phone: 713.542.5436<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">Office: 877.572.5515<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif"><a href="http://www.criticalsystemsinc.com/">www.CriticalSystemsInc.com</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif"><img border="0" width="196" height="38" style="width:2.0416in;height:.4in" id="Picture_x0020_1" src="cid:image001.png@01D89B6D.A7BC84C0"><o:p></o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:14.0pt;font-family:"Times New Roman",serif;color:#2F5496">Note: 7 days per week technical support<o:p></o:p></span></b></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">Phone: 1-888-218-6308<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">Email: Fieldservices@criticalsystemsinc.com<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Times New Roman",serif"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> <b>
On Behalf Of </b>Kevin M McPeak<br>
<b>Sent:</b> Tuesday, July 19, 2022 11:48 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Vacuum pump inlet trap for ALD tool<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal" style="background:white"><span style="color:#212121">Dear Colleagues,<o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="color:#212121"><o:p> </o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="color:#212121">First I want to thank all of you who had helpful suggestions regarding sealing our ALD tool.<o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="color:#212121"><o:p> </o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="color:#212121">As a follow-up, I want to purchase an inlet trap to protect the Ebara A25S dry pump we will be using for the ALD</span><span style="font-size:12.0pt;color:#212121">. We plan on avoiding
chlorinated metalorganic precursors, so a stainless steel trap should be ok.</span><span style="color:#212121"><o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="color:#212121"><o:p> </o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="color:#212121">What are people using as traps to protect their ALD serving vacuum pumps? I am currently considering a Mass Vac MULTI-TRAP. Thoughts?<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal" style="background:white"><span style="color:#212121">Regards,<o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="color:#212121">Kevin<o:p></o:p></span></p>
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