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<p class="MsoNormal">I agree with Mitchell. Dave Rolph has solved some problems for my customers with MultiTraps and those customers are still using them today. He will tell you if the multitap will work for the ALD application based upon his experience,
but I have never consulted him on this application.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">However, in my experience, most fab customers have chosen to heat the forelines on ALD as opposed to adding traps prior to the pump to prevent things like TMA from depositing. If your chlorinated material has a similar profile (remains
in gas phase at pump operating temp), I think it would be worth investigating a foreline heat solution. If you are doing ALD with DCS and Ammonia, there is a known solution adopted from LPCVD Nitride for a water cooled trap
<u>after</u> the pump. The total solution is heated foreline, hot running pump, heated exhaust line, then water cooled trap (collecting Ammonium Chloride). The A25S is hot running, so you’ve got that part solved already.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">The conundrum here is do you cool the gas stream using the trap and risk condensation in the pump or just try to keep in the vapor phase until it can be trapped or abated. I think it may come down to the act materials you intend to be
depositing. It would be good to speak to a technical person from Edwards and Ebara to also get their perspective as they work very closely with ALD system OEMs.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Regards,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<p class="MsoNormal" style="margin-bottom:12.0pt"><b><span style="font-size:12.0pt;color:black">Rob Breisch</span></b><b><span style="font-size:12.0pt;color:navy"><br>
</span></b><span style="font-size:12.0pt;color:black">Vice President, Sales and Marketing</span><b><span style="font-size:4.0pt;color:#003300"><o:p></o:p></span></b></p>
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<p class="MsoNormal"><b><span style="font-size:12.0pt;color:#003300"> Trillium US, Inc.<o:p></o:p></span></b></p>
<p class="MsoNormal"><span style="font-size:12.0pt;color:black"> My Mobile: 801-726-5035<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt;color:black"> Trillium Toll Free: 800-453-1340<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt;color:black"> Email: <a href="https://eur01.safelinks.protection.outlook.com/?url=http%3A%2F%2Frob.breisch%40trilliumus.com%2F&data=04%7C01%7Cdoug.smith%40nxp.com%7C6a18a23fd52849ab6e2c08d9a2d36a20%7C686ea1d3bc2b4c6fa92cd99c5c301635%7C0%7C0%7C637719851320585298%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C1000&sdata=28DKNqx19eklsozNWtmNaSym844LuMy0zetFDNZygeM%3D&reserved=0">
<span style="color:blue">rob.breisch@trilliumus.com</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt;color:black"> WebSite: <a href="https://eur01.safelinks.protection.outlook.com/?url=http%3A%2F%2Fwww.trilliumus.com%2F&data=04%7C01%7Cdoug.smith%40nxp.com%7C6a18a23fd52849ab6e2c08d9a2d36a20%7C686ea1d3bc2b4c6fa92cd99c5c301635%7C0%7C0%7C637719851320595292%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C1000&sdata=X54HcYftCFP6zKZ7vzk45e1k%2FRpAfSNZLp4GfLxSYVU%3D&reserved=0">
<span style="color:blue">www.trilliumus.com</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt;color:black"> <a href="https://eur01.safelinks.protection.outlook.com/?url=http%3A%2F%2Fwww.linkedin.com%2Fcompany%2F3263466%3Ftrk%3Dtyah%26trkInfo%3Dtas%253Atrillium%2520us%252Cidx%253A1-2-2&data=04%7C01%7Cdoug.smith%40nxp.com%7C6a18a23fd52849ab6e2c08d9a2d36a20%7C686ea1d3bc2b4c6fa92cd99c5c301635%7C0%7C0%7C637719851320605287%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C1000&sdata=AB6ZNk5uz%2Ffa%2Fux%2FFDCbaityo4aQYKar6%2F9rv%2FSc3hQ%3D&reserved=0">
<span style="color:blue">Follow Trillium on LinkedIn</span></a> <o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt;color:black"> </span><span style="font-size:12.0pt;color:navy"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt;color:black">This transmission is intended for the named addressee(s) only and may contain confidential and privileged information. Reading, copying or disseminating this transmission by anyone other than
the named addressee(s) is strictly prohibited. If you have received this message in error, please notify us immediately by reply e-mail or phone at (503) 682-3837.<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> <b>
On Behalf Of </b>Mitchell Roselius<br>
<b>Sent:</b> Tuesday, July 19, 2022 10:51 AM<br>
<b>To:</b> Kevin M McPeak <kmcpeak@lsu.edu>; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Vacuum pump inlet trap for ALD tool<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">Hi Kevin, <o:p>
</o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">We have used Mass Vac for several applications to protect our dry bed abatement canisters. I don’t have experience using the Multi-Trap for ALD Vacuum pumps, but I have been very pleased
with the Mass Vac systems. <o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">I have worked with David Rolph when needing particle traps. I included his email and phone below in case you want to reach out to him.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">Email: <a href="mailto:drolph@massvac.com">
drolph@massvac.com</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">Phone: 978-835-4666<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">Best Regards,
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif"><o:p> </o:p></span></p>
<div>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">Mitchell Roselius<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">Eastern Regional Sales Engineer<o:p></o:p></span></p>
<p class="MsoNormal"><i><span style="font-size:14.0pt;font-family:"Times New Roman",serif">Critical Systems, Inc.<o:p></o:p></span></i></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">Phone: 713.542.5436<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">Office: 877.572.5515<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif"><a href="http://www.criticalsystemsinc.com/">www.CriticalSystemsInc.com</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif"><img border="0" width="196" height="38" style="width:2.0416in;height:.3958in" id="Picture_x0020_1" src="cid:image003.png@01D89B69.035D30E0"></span><span style="font-family:"Times New Roman",serif"><o:p></o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:14.0pt;font-family:"Times New Roman",serif;color:#2F5496">Note: 7 days per week technical support<o:p></o:p></span></b></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">Phone: 1-888-218-6308<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">Email: <a href="mailto:Fieldservices@criticalsystemsinc.com">
Fieldservices@criticalsystemsinc.com</a><o:p></o:p></span></p>
</div>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif"><o:p> </o:p></span></p>
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<div style="border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b>From:</b> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Kevin M McPeak<br>
<b>Sent:</b> Tuesday, July 19, 2022 11:48 AM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Vacuum pump inlet trap for ALD tool<o:p></o:p></p>
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</div>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<p class="MsoNormal" style="background:white"><span style="color:#212121">Dear Colleagues,<o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="color:#212121"><o:p> </o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="color:#212121">First I want to thank all of you who had helpful suggestions regarding sealing our ALD tool.<o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="color:#212121"><o:p> </o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="color:#212121">As a follow-up, I want to purchase an inlet trap to protect the Ebara A25S dry pump we will be using for the ALD</span><span style="font-size:12.0pt;color:#212121">. We plan on avoiding
chlorinated metalorganic precursors, so a stainless steel trap should be ok.</span><span style="color:#212121"><o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="color:#212121"><o:p> </o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="color:#212121">What are people using as traps to protect their ALD serving vacuum pumps? I am currently considering a Mass Vac MULTI-TRAP. Thoughts?<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal" style="background:white"><span style="color:#212121">Regards,<o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span style="color:#212121">Kevin<o:p></o:p></span></p>
</div>
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