<html><head><meta http-equiv="Content-Type" content="text/html; charset=utf-8"></head><body style="word-wrap: break-word; -webkit-nbsp-mode: space; line-break: after-white-space;" class="">Hi Dave,<div class=""><br class=""></div><div class="">We have a Drytek PS-80 pump that was backing our Versaline ICP Etcher and running BCl3 process gas for many years. When it needed maintenance in 2016 we replaced it with an Edwards QDP-80, and it is now waiting for the day that it can return to pumping of the Versaline. As far as performance I would rate the Edwards QDP and Drytek PS series comparable, but as far as ambient noise, I think the Drytek runs with less dB and also uses a little less N2.</div><div class=""><br class=""></div><div class="">Two pennies...</div><div class=""><div class=""><br class="webkit-block-placeholder"></div><div class="">
<div style="caret-color: rgb(0, 0, 0); color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; orphans: auto; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; widows: auto; word-spacing: 0px; -webkit-text-size-adjust: auto; -webkit-text-stroke-width: 0px; text-decoration: none;">Best Regards,<br class=""><br class="">Mark<br class=""><br class="">________________________________________________________________<br class=""><br class="">Mark Weiler<br class="">Manager, Equipment & Facilities<br class="">Bertucci Nanotechnology Laboratory<br class="">Eden Hall Nanofabrication Cleanroom<br class="">Carnegie Mellon University<br class="">P:<span class="Apple-tab-span" style="white-space: pre;"> </span>412-268-2471<br class="">F:<span class="Apple-tab-span" style="white-space: pre;"> </span>412-268-3497<br class=""><a href="http://www.nanofab.ece.cmu.edu" class="">http://www.nanofab.ece.cmu.edu</a><br class=""><br class=""><br class=""></div><span><img apple-inline="yes" id="3F31FDE9-17DE-42DC-875A-FE5D7C243C74" src="cid:2D2E01E3-CEC1-4F48-A845-224D8D7CED12@wv.cc.cmu.edu" class=""></span>
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<div><br class=""><blockquote type="cite" class=""><div class="">On Jul 29, 2022, at 10:40 AM, Hollingshead, Dave <<a href="mailto:hollingshead.19@osu.edu" class="">hollingshead.19@osu.edu</a>> wrote:</div><br class="Apple-interchange-newline"><div class=""><div class="WordSection1" style="page: WordSection1; caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;"><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;" class="">Hi all,<o:p class=""></o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><o:p class=""> </o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;" class="">Does anyone have experience (good, bad, or otherwise) with Drytek dry screw pumps (specifically as a turbo backing pump for an ICP etcher)? Most of the dry pumps in our lab are Edwards, but since lead times have recently become a major issue we are considering alternatives.<o:p class=""></o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><o:p class=""> </o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;" class="">Thanks,<o:p class=""></o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;" class="">-Dave<o:p class=""></o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><o:p class=""> </o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><b class=""><span style="font-size: 9pt; font-family: Arial, sans-serif; color: rgb(187, 0, 0); background-color: white; background-position: initial initial; background-repeat: initial initial;" class="">Dave Hollingshead </span></b><span style="font-size: 9pt; font-family: Arial, sans-serif; color: rgb(51, 51, 51);" class=""><br class=""><span style="background-color: white; background-position: initial initial; background-repeat: initial initial;" class="">Manager of Research Operations – Nanotech West Lab<br class=""><b class="">The Ohio State University</b></span><o:p class=""></o:p></span></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><span style="font-size: 9pt; font-family: Arial, sans-serif; color: rgb(51, 51, 51); background-color: white; background-position: initial initial; background-repeat: initial initial;" class="">Suite 100, 1381 Kinnear Road, Columbus, OH 43212</span><span style="font-size: 9pt; font-family: Arial, sans-serif; color: rgb(51, 51, 51);" class=""><br class=""><span style="background-color: white; background-position: initial initial; background-repeat: initial initial;" class="">614.292.1355 Office</span><br class=""></span><span style="color: rgb(51, 51, 51);" class=""><a href="mailto:hollingshead.19@osu.edu" class=""><span style="font-size: 9pt; font-family: Arial, sans-serif; color: blue; background-color: white; background-position: initial initial; background-repeat: initial initial;" class="">hollingshead.19@osu.edu</span></a></span><span style="font-size: 9pt; font-family: Arial, sans-serif; color: rgb(51, 51, 51); background-color: white; background-position: initial initial; background-repeat: initial initial;" class=""> </span><span style="color: rgb(51, 51, 51);" class=""><a href="http://osu.edu/" class=""><span style="font-size: 9pt; font-family: Arial, sans-serif; color: blue; background-color: white; background-position: initial initial; background-repeat: initial initial;" class="">osu.edu</span></a></span><span style="color: rgb(51, 51, 51);" class=""><o:p class=""></o:p></span></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><o:p class=""> </o:p></div></div><span style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; float: none; display: inline !important;" class="">_______________________________________________</span><br style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;" class=""><span style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; float: none; display: inline !important;" class="">labnetwork mailing list</span><br style="caret-color: rgb(0, 0, 0); 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