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Hi Joe,<br>
<br>
We've been open for six years and the fiscal year that ended at the
end of June has been the best so far in terms of EBL usage/revenue
and overall. Things were ramping nicely for the first three years
and COVID messed up the previous two fiscal years pretty badly. As
in Mike's case, the revenue generated by the EGPG5200 at University
of Delaware only covers the cost of the service contract.<br>
<br>
Mike already offered great advice on service contracts.<br>
<br>
Try to buy things like BEAMER upfront (from the tool vendor or
software vendor, whichever makes sense) while your folks are excited
about a new writer.<br>
<br>
Depending on your user base and your operating model, you may or may
not need a dedicated EBL staff person.<br>
<br>
If I ignore the service contact and the labor costs, my e-beam
writer does not cost much to run as most of the utilities are
covered by Facilities here.<br>
<br>
<br>
Cheers,<br>
<br>
Iulian<br>
<br>
<pre class="moz-signature" cols="72">iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
<a class="moz-txt-link-freetext" href="http://udnf.udel.edu">http://udnf.udel.edu</a></pre>
<div class="moz-cite-prefix">On 7/29/2022 2:05 PM, Michael Rooks
wrote:<br>
</div>
<blockquote type="cite"
cite="mid:CAMH=VohzgEdjux4vqpDSzeN9GeLpmMg8XZgtazfaaokRPW-_tg@mail.gmail.com">
<meta http-equiv="content-type" content="text/html; charset=UTF-8">
<div dir="ltr">We have a fairly small engineering program here, so
the user fees from e-beam lithography just barely cover the
service contract on an ebpg. Larger places (Cornell, MIT, etc)
can cover most of their operating costs. But in a small research
university we always operate at a loss. That's not a problem, if
the university is willing to cover the balance.
<div><br>
</div>
<div>Service contracts: you really want the contract to include
the cost of tip changes, and also the chillers. Some companies
do not cover the chillers, leading to some frustrating service
issues. Read the fine print. (Raith covers the water chillers,
which is great.) Raith offers lower priced contracts if you
are willing to put a cap on the parts and labor. This is
usually a very good deal, unless your employer hits you with a
spending freeze. Keep in mind that you can negotiate for N
years of service when you buy the machine, so this can be
included in the capital expense.</div>
<div><br>
</div>
<div>BTW 100 kV is not much better than 50 kV. It helps with
thick resist > 1 um, but the resolution is about the same.
What you really get at 100 kV is better automation and better
software, and maybe also a faster stage. </div>
<div><br clear="all">
<div>
<div dir="ltr" data-smartmail="gmail_signature">
<div dir="ltr">--------------------------------
<div><font size="1">Michael Rooks</font></div>
<div><font size="1"><a href="http://nano.yale.edu"
target="_blank" moz-do-not-send="true">nano.yale.edu</a></font> </div>
</div>
</div>
</div>
<br>
</div>
</div>
<br>
<div class="gmail_quote">
<div dir="ltr" class="gmail_attr">On Fri, Jul 29, 2022 at 1:25
PM Joseph Losby <<a href="mailto:joseph.losby@ucalgary.ca"
target="_blank" moz-do-not-send="true"
class="moz-txt-link-freetext">joseph.losby@ucalgary.ca</a>>
wrote:<br>
</div>
<blockquote class="gmail_quote" style="margin:0px 0px 0px
0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex">
<div dir="ltr">
<div
style="font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0);background-color:rgb(255,255,255)">Hi
Everyone, </div>
<div
style="font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0);background-color:rgb(255,255,255)"><br>
</div>
<div
style="font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0);background-color:rgb(255,255,255)">We
have funding for a 50kV EBL system but are seeking
additional funding for an upgrade to a 100kV system.</div>
<div
style="font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0);background-color:rgb(255,255,255)"><br>
</div>
<div
style="font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0);background-color:rgb(255,255,255)">At
the forefront of our thoughts is the issue of tool
sustainability. The service contracts are approximately
$115k USD, and there are additional costs for labor (EBL
scientist), software licenses, utilities, and whatever
could go wrong that's not covered under tool warranty. </div>
<div
style="font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0);background-color:rgb(255,255,255)"><br>
</div>
<div
style="font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0);background-color:rgb(255,255,255)">What
are your experiences with running a 100kV system in your
facility? Do revenues cover the service contracts? How
long did it take to get utilization up to your current
levels? Do you have advice on how we can minimize
headaches for the future? What issues have you run
into? </div>
<div
style="font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0);background-color:rgb(255,255,255)"><br>
</div>
<div
style="font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0);background-color:rgb(255,255,255)">I
appreciate in advance your thoughts about these questions
or anything else regarding the tool. I was recently
introduced to this mailing list and find it to be a
valuable resource.</div>
<div
style="font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0);background-color:rgb(255,255,255)"><br>
</div>
<div
style="font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0);background-color:rgb(255,255,255)">Cheers,</div>
<div
style="font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0);background-color:rgb(255,255,255)">Joe<br>
</div>
<div
style="font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0);background-color:rgb(255,255,255)"></div>
<div>
<div
style="font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0)"><br>
</div>
<div
id="gmail-m_4073224431956028545gmail-m_1095336884949246272Signature">
<div>
<div
style="font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0)">Joseph
Losby, PhD.</div>
<div
style="font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0)">Institute
for Quantum Science and Technology</div>
<div
style="font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0)">University
of Calgary</div>
</div>
</div>
</div>
</div>
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</blockquote>
</div>
<br>
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