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<p class="MsoNormal">Chandan,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Don’t bother with the crucible liner. Just melt a big chunk of aluminum directly in the pocket. It will not adhere to the walls so you will be able to remove it if you need to swap materials.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">-Paul<o:p></o:p></p>
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<p class="MsoNormal"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> <b>
On Behalf Of </b>Chandan H B<br>
<b>Sent:</b> Monday, August 29, 2022 2:04 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Regarding : Aluminium E-Beam Evaporation<o:p></o:p></p>
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<p class="MsoNormal" style="mso-line-height-alt:.75pt"><span style="font-size:1.0pt;color:white">Dear Lab network community, We are currently facing an issue in the deposition of Aluminium in one of our Electron beam evaporation tools, we tried intermetallic,
fab mate, copper, glassy coated graphite, and graphite crucibles for the evaporation.
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<p class="MsoNormal">Dear Lab network community,<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">We are currently facing an issue in the deposition of Aluminium in one of our Electron beam evaporation tools, we tried intermetallic, fab mate, copper, glassy coated graphite, and graphite crucibles for the evaporation. It seems that none
of them are working out. <o:p></o:p></p>
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<p class="MsoNormal">We see crucible gets broken at the initial deposition quite often.<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Are we missing out on any parameters unchecked?<o:p></o:p></p>
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<p class="MsoNormal">Kindly recommend us a few parameters or solutions for the same.<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Any suggestions/Inputs are highly appreciated.<o:p></o:p></p>
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<p class="MsoNormal">Thanks in advance!<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Regards,<o:p></o:p></p>
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<p class="MsoNormal">CHANDAN H B<o:p></o:p></p>
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<p class="MsoNormal">THIN FILM ENGINEER<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">P.S: Here are a few parameters that are provided to the tool.<o:p></o:p></p>
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<p class="MsoNormal">Power: 10KW<o:p></o:p></p>
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<p class="MsoNormal">Voltage: 10KV constant<o:p></o:p></p>
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<p class="MsoNormal">Current: Variable <o:p></o:p></p>
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<p class="MsoNormal">Rise1 & Soak1: 5min & 1min /8min & 2min<o:p></o:p></p>
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<p class="MsoNormal">Rise1 Power: 4% (for intermetallic crucible)<o:p></o:p></p>
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<p class="MsoNormal">Rise2 & Soak2: 5min & 1min /8min & 2min<o:p></o:p></p>
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<p class="MsoNormal">Rise2 Power: 8% (for intermetallic crucible)<o:p></o:p></p>
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<p class="MsoNormal">Ramp down: 5min<o:p></o:p></p>
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<p class="MsoNormal">Rate of deposition: 0.1nm/sec<o:p></o:p></p>
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<p class="MsoNormal">Beam Pattern: Spot Beam at the center of the crucible<o:p></o:p></p>
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<p class="MsoNormal">Crucible Volume: 20cc<o:p></o:p></p>
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<p class="MsoNormal">Material fill %: As recommended 67-75%<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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