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Don't use a spot beam, use a pattern beam.</div>
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Howard Northfield
<div>Research Associate</div>
<div>Advanced Research Complex (ARC)</div>
University of Ottawa<br>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Chandan H B <chandanachar95@gmail.com><br>
<b>Sent:</b> Monday, August 29, 2022 2:04 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] Regarding : Aluminium E-Beam Evaporation</font>
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<div style="font-size:9pt; font-family:'calibri'; color:#FF4233"><b>Attention : courriel externe | external email</b></div>
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<div dir="ltr">Dear Lab network community,
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<div>We are currently facing an issue in the deposition of Aluminium in one of our Electron beam evaporation tools, we tried intermetallic, fab mate, copper, glassy coated graphite, and graphite crucibles for the evaporation. It seems that none of them are
working out. </div>
<div>We see crucible gets broken at the initial deposition quite often.</div>
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<div>Are we missing out on any parameters unchecked?</div>
<div>Kindly recommend us a few parameters or solutions for the same.</div>
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<div>Any suggestions/Inputs are highly appreciated.</div>
<div>Thanks in advance!</div>
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<div>Regards,</div>
<div>CHANDAN H B</div>
<div>THIN FILM ENGINEER</div>
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<div>P.S: Here are a few parameters that are provided to the tool.</div>
<div>Power: 10KW</div>
<div>Voltage: 10KV constant</div>
<div>Current: Variable </div>
<div>Rise1 & Soak1: 5min & 1min /8min & 2min</div>
<div>Rise1 Power: 4% (for intermetallic crucible)</div>
<div>Rise2 & Soak2: 5min & 1min /8min & 2min<br>
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<div>Rise2 Power: 8% (for intermetallic crucible)</div>
<div>Ramp down: 5min</div>
<div>Rate of deposition: 0.1nm/sec</div>
<div>Beam Pattern: Spot Beam at the center of the crucible</div>
<div>Crucible Volume: 20cc</div>
<div>Material fill %: As recommended 67-75%</div>
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