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    Agreed, carbon spacer under the crucible for Al is the way to go.<br>
    <br>
    Brent<br>
    <br>
    <div class="moz-cite-prefix">On 8/29/2022 9:45 PM, Ryan Rivers
      wrote:<br>
    </div>
    <blockquote type="cite" cite="mid:CANLAN0v9e6FBp68Vhc+pm4XHsQ1+19Vrh01H_4ocetsT1YFrdw@mail.gmail.com">
      
      <div><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#FA4616"><b>[External
            Email]</b></span>
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        <div dir="ltr">The best way around the aluminum crucible
          shattering problem is to use a FABMATE crucible, but also to
          use a carbon spacer under your liner. A 1/8" thick carbon disk
          works in a pinch, you can get fancier with some machine shop
          time. We use them in all our ebeam tools the Marvell NanoLab
          and I've only seen a handful of crucible liners shatter from
          thermal load in the last decade.
          <div><br>
          </div>
          <div>Primary cause of crucible liner breaks are incomplete
            thermal contact on one side of the crucible. When you're
            pouring too much heat in to make up for that contact, one
            side goes red hot, the other never gets there. Thermal
            expansion drives the rest. The spacer prevents your liner
            from cooling through the sides and only cools at the bottom.
            You heat with less joules in, so less shock. Lets your
            entire crucible heat more evenly and more readily stabilize
            through the problematic regions of melt formation.<br>
          </div>
          <div><br>
          </div>
          <div>-Ryan</div>
        </div>
        <br>
        <div class="gmail_quote">
          <div dir="ltr" class="gmail_attr">On Mon, Aug 29, 2022 at 4:47
            PM Michael Yakimov <<a href="mailto:yakimom@sunypoly.edu" moz-do-not-send="true" class="moz-txt-link-freetext">yakimom@sunypoly.edu</a>>
            wrote:<br>
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                <div style="font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0)">One
                  of things which may hinder Al deposition from carbon
                  crucible is Aluminum carbide formation on the surface.
                  It will show up as yellow stuff on the surface after
                  venting, eventually decomposing in the air.</div>
                <div style="font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0)">It
                  is a part of tribal knowledge for me; I couldn't find
                  a good reference in 5 minutes.  there is mention of
                  the effect here:</div>
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                                operation of vacuum aluminum evaporators
                                made in refractory compound alloys -
                                SpringerLink</a></div>
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                              elements of various types and sizes are
                              being produced from a TiB2-TiC alloy in
                              the Special Design and Technology
                              Department of the Institute of Materials
                              Science, Academy of Sciences of the
                              Ukrainian SSR, and widely used in vacuum
                              deposition plants for the application of
                              aluminum coatings to glass, plastics,
                              fabrics, paper, metals, and film and other
                              coiling materials. The ...</div>
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                <div id="gmail-m_3696117041851013915divRplyFwdMsg" dir="ltr"><font style="font-size:11pt" face="Calibri,
                    sans-serif" color="#000000"><b>From:</b> labnetwork
                    <<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank" moz-do-not-send="true" class="moz-txt-link-freetext">labnetwork-bounces@mtl.mit.edu</a>>
                    on behalf of Zhichao Wang <<a href="mailto:zhichaow@udel.edu" target="_blank" moz-do-not-send="true" class="moz-txt-link-freetext">zhichaow@udel.edu</a>><br>
                    <b>Sent:</b> Monday, August 29, 2022 12:14 PM<br>
                    <b>To:</b> Chandan H B <<a href="mailto:chandanachar95@gmail.com" target="_blank" moz-do-not-send="true" class="moz-txt-link-freetext">chandanachar95@gmail.com</a>><br>
                    <b>Cc:</b> <a href="mailto:labnetwork@mtl.mit.edu" target="_blank" moz-do-not-send="true" class="moz-txt-link-freetext">labnetwork@mtl.mit.edu</a>
                    <<a href="mailto:labnetwork@mtl.mit.edu" target="_blank" moz-do-not-send="true" class="moz-txt-link-freetext">labnetwork@mtl.mit.edu</a>><br>
                    <b>Subject:</b> Re: [labnetwork] Regarding :
                    Aluminium E-Beam Evaporation</font>
                  <div> </div>
                </div>
                <div>
                  <div dir="ltr">Chandan,
                    <div><br>
                    </div>
                    We use a pattern beam with the pattern
                    sweeping/rotating constantly during the deposition,
                    and a fabmate crucible. The rest of the parameters
                    are pretty similar. The highest deposition rate
                    we've tried is 15 Angstrom/s. 
                    <div><br>
                    </div>
                    <div>--</div>
                    <div>Chao</div>
                  </div>
                  <br>
                  <div>
                    <div dir="ltr">On Mon, Aug 29, 2022 at 8:07 AM
                      Chandan H B <<a href="mailto:chandanachar95@gmail.com" target="_blank" moz-do-not-send="true" class="moz-txt-link-freetext">chandanachar95@gmail.com</a>>
                      wrote:<br>
                    </div>
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                      <div dir="ltr">Dear Lab network community,
                        <div><br>
                        </div>
                        <div>We are currently facing an issue in the
                          deposition of Aluminium in one of our Electron
                          beam evaporation tools, we tried
                          intermetallic, fab mate, copper, glassy coated
                          graphite, and graphite crucibles for the
                          evaporation. It seems that none of them are
                          working out. </div>
                        <div>We see crucible gets broken at the initial
                          deposition quite often.</div>
                        <div><br>
                        </div>
                        <div>Are we missing out on any parameters
                          unchecked?</div>
                        <div>Kindly recommend us a few parameters or
                          solutions for the same.</div>
                        <div><br>
                        </div>
                        <div>Any suggestions/Inputs are highly
                          appreciated.</div>
                        <div>Thanks in advance!</div>
                        <div><br>
                        </div>
                        <div>Regards,</div>
                        <div>CHANDAN H B</div>
                        <div>THIN FILM ENGINEER</div>
                        <div><br>
                        </div>
                        <div>P.S: Here are a few parameters that are
                          provided to the tool.</div>
                        <div>Power: 10KW</div>
                        <div>Voltage: 10KV constant</div>
                        <div>Current: Variable </div>
                        <div>Rise1 & Soak1: 5min & 1min /8min
                          & 2min</div>
                        <div>Rise1 Power: 4% (for intermetallic
                          crucible)</div>
                        <div>Rise2 & Soak2: 5min & 1min /8min
                          & 2min<br>
                        </div>
                        <div>Rise2 Power: 8% (for intermetallic
                          crucible)</div>
                        <div>Ramp down: 5min</div>
                        <div>Rate of deposition: 0.1nm/sec</div>
                        <div>Beam Pattern: Spot Beam at the center of
                          the crucible</div>
                        <div>Crucible Volume: 20cc</div>
                        <div>Material fill %: As recommended 67-75%</div>
                        <div><br>
                        </div>
                        <div><br>
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      <pre class="moz-quote-pre" wrap="">_______________________________________________
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