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Agreed, carbon spacer under the crucible for Al is the way to go.<br>
<br>
Brent<br>
<br>
<div class="moz-cite-prefix">On 8/29/2022 9:45 PM, Ryan Rivers
wrote:<br>
</div>
<blockquote type="cite" cite="mid:CANLAN0v9e6FBp68Vhc+pm4XHsQ1+19Vrh01H_4ocetsT1YFrdw@mail.gmail.com">
<div><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#FA4616"><b>[External
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<div dir="ltr">The best way around the aluminum crucible
shattering problem is to use a FABMATE crucible, but also to
use a carbon spacer under your liner. A 1/8" thick carbon disk
works in a pinch, you can get fancier with some machine shop
time. We use them in all our ebeam tools the Marvell NanoLab
and I've only seen a handful of crucible liners shatter from
thermal load in the last decade.
<div><br>
</div>
<div>Primary cause of crucible liner breaks are incomplete
thermal contact on one side of the crucible. When you're
pouring too much heat in to make up for that contact, one
side goes red hot, the other never gets there. Thermal
expansion drives the rest. The spacer prevents your liner
from cooling through the sides and only cools at the bottom.
You heat with less joules in, so less shock. Lets your
entire crucible heat more evenly and more readily stabilize
through the problematic regions of melt formation.<br>
</div>
<div><br>
</div>
<div>-Ryan</div>
</div>
<br>
<div class="gmail_quote">
<div dir="ltr" class="gmail_attr">On Mon, Aug 29, 2022 at 4:47
PM Michael Yakimov <<a href="mailto:yakimom@sunypoly.edu" moz-do-not-send="true" class="moz-txt-link-freetext">yakimom@sunypoly.edu</a>>
wrote:<br>
</div>
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rgb(204,204,204);padding-left:1ex">
<div class="msg3696117041851013915">
<div dir="ltr">
<div style="font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0)">One
of things which may hinder Al deposition from carbon
crucible is Aluminum carbide formation on the surface.
It will show up as yellow stuff on the surface after
venting, eventually decomposing in the air.</div>
<div style="font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0)">It
is a part of tribal knowledge for me; I couldn't find
a good reference in 5 minutes. there is mention of
the effect here:</div>
<div style="font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt;color:rgb(0,0,0)"><a href="https://nam10.safelinks.protection.outlook.com/?url=https%3A%2F%2Flink.springer.com%2Farticle%2F10.1007%2FBF00792405&data=05%7C01%7Cbgila%40ufl.edu%7C103b23e8e6b649ce6f1408da8a8062ed%7C0d4da0f84a314d76ace60a62331e1b84%7C0%7C0%7C637974582006537929%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C3000%7C%7C%7C&sdata=RkT7NgIkEqyZJbAStGwDnIunHNtJNIQq9pI4M9nD2fw%3D&reserved=0" originalsrc="https://link.springer.com/article/10.1007/BF00792405" shash="kBfCMxtrzSP4F1FGkU9XL0CORmLDKrVgSzHLihfkVIgvVsZenl87gwlUlWuIY3kTMwi0cawom+v31cYD9D3TXTw/dwd1VnjtxUqRTlNCOkcujRYqggzpqxb481/cN+6sJ3LXra7g+evkgnXA9vI5jJiiSeJ7UNIs82w5NPdYrQM=" id="gmail-m_3696117041851013915LPlnkOWALinkPreview" target="_blank" moz-do-not-send="true">https://link.springer.com/article/10.1007/BF00792405</a><br>
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operation of vacuum aluminum evaporators
made in refractory compound alloys -
SpringerLink</a></div>
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elements of various types and sizes are
being produced from a TiB2-TiC alloy in
the Special Design and Technology
Department of the Institute of Materials
Science, Academy of Sciences of the
Ukrainian SSR, and widely used in vacuum
deposition plants for the application of
aluminum coatings to glass, plastics,
fabrics, paper, metals, and film and other
coiling materials. The ...</div>
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<div id="gmail-m_3696117041851013915divRplyFwdMsg" dir="ltr"><font style="font-size:11pt" face="Calibri,
sans-serif" color="#000000"><b>From:</b> labnetwork
<<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank" moz-do-not-send="true" class="moz-txt-link-freetext">labnetwork-bounces@mtl.mit.edu</a>>
on behalf of Zhichao Wang <<a href="mailto:zhichaow@udel.edu" target="_blank" moz-do-not-send="true" class="moz-txt-link-freetext">zhichaow@udel.edu</a>><br>
<b>Sent:</b> Monday, August 29, 2022 12:14 PM<br>
<b>To:</b> Chandan H B <<a href="mailto:chandanachar95@gmail.com" target="_blank" moz-do-not-send="true" class="moz-txt-link-freetext">chandanachar95@gmail.com</a>><br>
<b>Cc:</b> <a href="mailto:labnetwork@mtl.mit.edu" target="_blank" moz-do-not-send="true" class="moz-txt-link-freetext">labnetwork@mtl.mit.edu</a>
<<a href="mailto:labnetwork@mtl.mit.edu" target="_blank" moz-do-not-send="true" class="moz-txt-link-freetext">labnetwork@mtl.mit.edu</a>><br>
<b>Subject:</b> Re: [labnetwork] Regarding :
Aluminium E-Beam Evaporation</font>
<div> </div>
</div>
<div>
<div dir="ltr">Chandan,
<div><br>
</div>
We use a pattern beam with the pattern
sweeping/rotating constantly during the deposition,
and a fabmate crucible. The rest of the parameters
are pretty similar. The highest deposition rate
we've tried is 15 Angstrom/s.
<div><br>
</div>
<div>--</div>
<div>Chao</div>
</div>
<br>
<div>
<div dir="ltr">On Mon, Aug 29, 2022 at 8:07 AM
Chandan H B <<a href="mailto:chandanachar95@gmail.com" target="_blank" moz-do-not-send="true" class="moz-txt-link-freetext">chandanachar95@gmail.com</a>>
wrote:<br>
</div>
<blockquote style="margin:0px 0px 0px
0.8ex;border-left:1px solid
rgb(204,204,204);padding-left:1ex">
<div dir="ltr">Dear Lab network community,
<div><br>
</div>
<div>We are currently facing an issue in the
deposition of Aluminium in one of our Electron
beam evaporation tools, we tried
intermetallic, fab mate, copper, glassy coated
graphite, and graphite crucibles for the
evaporation. It seems that none of them are
working out. </div>
<div>We see crucible gets broken at the initial
deposition quite often.</div>
<div><br>
</div>
<div>Are we missing out on any parameters
unchecked?</div>
<div>Kindly recommend us a few parameters or
solutions for the same.</div>
<div><br>
</div>
<div>Any suggestions/Inputs are highly
appreciated.</div>
<div>Thanks in advance!</div>
<div><br>
</div>
<div>Regards,</div>
<div>CHANDAN H B</div>
<div>THIN FILM ENGINEER</div>
<div><br>
</div>
<div>P.S: Here are a few parameters that are
provided to the tool.</div>
<div>Power: 10KW</div>
<div>Voltage: 10KV constant</div>
<div>Current: Variable </div>
<div>Rise1 & Soak1: 5min & 1min /8min
& 2min</div>
<div>Rise1 Power: 4% (for intermetallic
crucible)</div>
<div>Rise2 & Soak2: 5min & 1min /8min
& 2min<br>
</div>
<div>Rise2 Power: 8% (for intermetallic
crucible)</div>
<div>Ramp down: 5min</div>
<div>Rate of deposition: 0.1nm/sec</div>
<div>Beam Pattern: Spot Beam at the center of
the crucible</div>
<div>Crucible Volume: 20cc</div>
<div>Material fill %: As recommended 67-75%</div>
<div><br>
</div>
<div><br>
</div>
</div>
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