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<div dir="auto">GaAs starts losing Arsenic at around 400C, InAs is probably the same thing. It may not be a huge loss, but furnace will not be MOS clean ever.</div>
<div dir="auto">I wonder what kind of ZnO source you are talking. Pure ZnO may be a problem. Spin on glass with Zn dopant may be a better idea both for Zn escape and As containment, especially if wafwr backside is taken care of as well. </div>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Brian K. Olmsted <olms0025@umn.edu><br>
<b>Sent:</b> Tuesday, August 30, 2022 5:13:08 PM<br>
<b>To:</b> Steffen, Paul <steffen.8@osu.edu><br>
<b>Cc:</b> labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> Re: [labnetwork] Diffusion ZnO on InAs in forming gas</font>
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<div dir="ltr">Hi Paul,
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<div>Others may want to add to this with their experiences, but I have used ZnO in a retort furnace using a forming gas environment and the net result was Zn contamination so bad and persistent that the furnace was decommissioned and could not be used anymore.
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<div>Thanks,</div>
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<div>Brian</div>
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<div dir="ltr" class="x_gmail_attr">On Tue, Aug 30, 2022 at 2:36 PM Steffen, Paul <<a href="mailto:steffen.8@osu.edu">steffen.8@osu.edu</a>> wrote:<br>
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<p class="x_MsoNormal">Lab Network Community,<u></u><u></u></p>
<p class="x_MsoNormal"><u></u> <u></u></p>
<p class="x_MsoNormal">We have a request to diffuse ZnO on InAs in forming gas at 450 C for 1 hour in a horizontal furnace tube. Does anyone have experience with these materials in forming gas? Would the forming gas react with either material leading to decomposition
and contamination of the furnace tube with Zn or As?<u></u><u></u></p>
<p class="x_MsoNormal"><u></u> <u></u></p>
<p class="x_MsoNormal">Thanks.<u></u><u></u></p>
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<p class="x_MsoNormal">-Paul<u></u><u></u></p>
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<p class="x_MsoNormal"> <u></u><u></u></p>
<p class="x_MsoNormal" style="line-height:13.5pt; background:white"><span style="font-size:9pt; font-family:Arial,sans-serif; color:rgb(51,51,51)"><img width="224" height="45" id="x_gmail-m_-7112645334958810643Picture_x0020_1" src="cid:182f0982a814cff311" alt="The Ohio State University" style="width:2.3333in; height:0.4687in"><br>
</span><b><span style="font-size:9pt; font-family:Arial,sans-serif; color:rgb(187,0,0); background:white">Paul Steffen</span></b><span style="font-size:9pt; font-family:Arial,sans-serif; color:rgb(51,51,51)"><br>
Lab Manager<br>
</span><span style="font-size:9pt; font-family:Arial,sans-serif; color:rgb(187,0,0); background:white">Institute for Materials Research</span><span style="font-size:9pt; font-family:Arial,sans-serif; color:rgb(51,51,51)"> Nanotech West Lab<br>
100 Science Village, 1381 Kinnear Road, Columbus, OH 43212<br>
614-688-3546 Office / 614-688-3379 Fax<br>
</span><span style="color:black"><a href="mailto:steffen.8@osu.edu" target="_blank"><span style="font-size:9pt; font-family:Arial,sans-serif; color:blue; background:white">steffen.8@osu.edu</span></a></span><span style="font-size:9pt; font-family:Arial,sans-serif; color:rgb(51,51,51)">
</span><span style="color:black"><a href="http://nanotech.osu.edu" target="_blank"><span style="font-size:9pt; font-family:Arial,sans-serif; color:blue; background:white">nanotech.osu.edu</span></a></span><span style="font-size:9pt; font-family:Arial,sans-serif; color:rgb(51,51,51)">
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