<html><head><meta http-equiv="content-type" content="text/html; charset=utf-8"></head><body dir="auto">The all furnace Quartzware will be contaminated with Zn and other 3-5 related materials. The Zn makes a mess, indeed. You can cap the ZnO layer with a thin SiO2 layer; easy to remove with 10:1 HF solution and allows the Hydrogen/FG through diffusion. One issue is that the Si is a dopant too: however the dominant dopant is the ZnO at 450C.<div><div>That will avoid the messy Quartzware condition, as the SiO2 is not a barrier to Zn diffusion: and SiO2 should be deposited at low temperatures. </div><div>The main problem is where to deposit SiO2 on ZnO/ InAs without contaminating that system itself?</div><div>I am thinking of in situ Reactive sputtering of Zn in O2 followed by the SiO2 one.<br><div>Thanks, Bernard<br><div dir="ltr">Sent from my iPad</div><div dir="ltr"><br><blockquote type="cite">On Aug 30, 2022, at 8:20 PM, Michael Yakimov <yakimom@sunypoly.edu> wrote:<br><br></blockquote></div><blockquote type="cite"><div dir="ltr">
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<div dir="auto">GaAs starts losing Arsenic at around 400C, InAs is probably the same thing. It may not be a huge loss, but furnace will not be MOS clean ever.</div>
<div dir="auto">I wonder what kind of ZnO source you are talking. Pure ZnO may be a problem. Spin on glass with Zn dopant may be a better idea both for Zn escape and As containment, especially if wafwr backside is taken care of as well. </div>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Brian K. Olmsted <olms0025@umn.edu><br>
<b>Sent:</b> Tuesday, August 30, 2022 5:13:08 PM<br>
<b>To:</b> Steffen, Paul <steffen.8@osu.edu><br>
<b>Cc:</b> labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> Re: [labnetwork] Diffusion ZnO on InAs in forming gas</font>
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<div dir="ltr">Hi Paul,
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<div>Others may want to add to this with their experiences, but I have used ZnO in a retort furnace using a forming gas environment and the net result was Zn contamination so bad and persistent that the furnace was decommissioned and could not be used anymore.
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<div>Thanks,</div>
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<div>Brian</div>
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<div dir="ltr" class="x_gmail_attr">On Tue, Aug 30, 2022 at 2:36 PM Steffen, Paul <<a href="mailto:steffen.8@osu.edu">steffen.8@osu.edu</a>> wrote:<br>
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<p class="x_MsoNormal">Lab Network Community,<u></u><u></u></p>
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<p class="x_MsoNormal">We have a request to diffuse ZnO on InAs in forming gas at 450 C for 1 hour in a horizontal furnace tube. Does anyone have experience with these materials in forming gas? Would the forming gas react with either material leading to decomposition
and contamination of the furnace tube with Zn or As?<u></u><u></u></p>
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<p class="x_MsoNormal">Thanks.<u></u><u></u></p>
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<p class="x_MsoNormal">-Paul<u></u><u></u></p>
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<p class="x_MsoNormal" style="line-height:13.5pt; background:white"><span style="font-size:9pt; font-family:Arial,sans-serif; color:rgb(51,51,51)"><img width="224" height="45" id="x_gmail-m_-7112645334958810643Picture_x0020_1" alt="image001.png" style="width:2.3333in; height:0.4687in" src="cid:182f0982a814cff311"><br>
</span><b><span style="font-size:9pt; font-family:Arial,sans-serif; color:rgb(187,0,0); background:white">Paul Steffen</span></b><span style="font-size:9pt; font-family:Arial,sans-serif; color:rgb(51,51,51)"><br>
Lab Manager<br>
</span><span style="font-size:9pt; font-family:Arial,sans-serif; color:rgb(187,0,0); background:white">Institute for Materials Research</span><span style="font-size:9pt; font-family:Arial,sans-serif; color:rgb(51,51,51)"> Nanotech West Lab<br>
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</span><span style="color:black"><a href="mailto:steffen.8@osu.edu" target="_blank"><span style="font-size:9pt; font-family:Arial,sans-serif; color:blue; background:white">steffen.8@osu.edu</span></a></span><span style="font-size:9pt; font-family:Arial,sans-serif; color:rgb(51,51,51)">
</span><span style="color:black"><a href="http://nanotech.osu.edu" target="_blank"><span style="font-size:9pt; font-family:Arial,sans-serif; color:blue; background:white">nanotech.osu.edu</span></a></span><span style="font-size:9pt; font-family:Arial,sans-serif; color:rgb(51,51,51)">
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