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<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US">Hi Chandan,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal" style="text-align:justify">Here is my two cents <span lang="EN-US">
to</span> this nice discussion.<o:p></o:p></p>
<p class="MsoNormal" style="text-align:justify"><o:p> </o:p></p>
<p class="MsoNormal" style="text-align:justify">I agree with Ryan, Brent and Ted: the simple spacer does the job. After some trials, here at Hebrew University we use intermetallic crucibles with an special format manufactured by Angstrom Engineering that mimics
the spacer effect. Here is the description:<o:p></o:p></p>
<p class="MsoNormal" style="text-align:justify"><img width="445" height="156" style="width:4.6333in;height:1.625in" id="Picture_x0020_1" src="cid:image001.png@01D8BD5A.F32F9DC0"><o:p></o:p></p>
<p class="MsoNormal" style="text-align:justify">It is quite expensive, 245$ each, but lasts for many evaporations. We also have slow heat up and cooling down ramps.<o:p></o:p></p>
<p class="MsoNormal" style="text-align:justify"><o:p> </o:p></p>
<p class="MsoNormal">Once I saw at Princeton a simple thermal evaporator using a Graphite boat, also from Angstrom. The trick they use there is to consume all the
<span lang="EN-US">Al</span> in the boat in the end of the evaporation. Seems to work nicely.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span lang="EN-US">Please find attached the summary of all answers.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Shimon <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Hebrew University of Jerusalem</span><span lang="EN-US" style="mso-fareast-language:EN-US"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US">From:</span></b><span lang="EN-US"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Chandan H B<br>
<b>Sent:</b> Monday, 29 August 2022 9:04<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Regarding : Aluminium E-Beam Evaporation<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Dear Lab network community,<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">We are currently facing an issue in the deposition of Aluminium in one of our Electron beam evaporation tools, we tried intermetallic, fab mate, copper, glassy coated graphite, and graphite crucibles for the evaporation. It seems that none
of them are working out. <o:p></o:p></p>
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<p class="MsoNormal">We see crucible gets broken at the initial deposition quite often.<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Are we missing out on any parameters unchecked?<o:p></o:p></p>
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<p class="MsoNormal">Kindly recommend us a few parameters or solutions for the same.<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Any suggestions/Inputs are highly appreciated.<o:p></o:p></p>
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<p class="MsoNormal">Thanks in advance!<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Regards,<o:p></o:p></p>
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<p class="MsoNormal">CHANDAN H B<o:p></o:p></p>
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<p class="MsoNormal">THIN FILM ENGINEER<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">P.S: Here are a few parameters that are provided to the tool.<o:p></o:p></p>
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<p class="MsoNormal">Power: 10KW<o:p></o:p></p>
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<p class="MsoNormal">Voltage: 10KV constant<o:p></o:p></p>
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<p class="MsoNormal">Current: Variable <o:p></o:p></p>
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<p class="MsoNormal">Rise1 & Soak1: 5min & 1min /8min & 2min<o:p></o:p></p>
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<p class="MsoNormal">Rise1 Power: 4% (for intermetallic crucible)<o:p></o:p></p>
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<p class="MsoNormal">Rise2 & Soak2: 5min & 1min /8min & 2min<o:p></o:p></p>
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<p class="MsoNormal">Rise2 Power: 8% (for intermetallic crucible)<o:p></o:p></p>
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<p class="MsoNormal">Ramp down: 5min<o:p></o:p></p>
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<p class="MsoNormal">Rate of deposition: 0.1nm/sec<o:p></o:p></p>
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<p class="MsoNormal">Beam Pattern: Spot Beam at the center of the crucible<o:p></o:p></p>
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<p class="MsoNormal">Crucible Volume: 20cc<o:p></o:p></p>
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<p class="MsoNormal">Material fill %: As recommended 67-75%<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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