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E-beam deposition and best practices should be a round table
discussion at the next UGIM.<br>
<br>
<div class="moz-cite-prefix">On 8/31/2022 10:01 AM, Shimon Eliav
wrote:<br>
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<blockquote type="cite" cite="mid:AS8PR10MB492039FF98A474B9888BBC97D6789@AS8PR10MB4920.EURPRD10.PROD.OUTLOOK.COM">
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<div><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#FA4616"><b>[External
Email]</b></span>
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<p class="MsoNormal"><span style="mso-fareast-language:EN-US" lang="EN-US">Hi Chandan,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US" lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal" style="text-align:justify">Here is my two
cents <span lang="EN-US">
to</span> this nice discussion.<o:p></o:p></p>
<p class="MsoNormal" style="text-align:justify"><o:p> </o:p></p>
<p class="MsoNormal" style="text-align:justify">I agree with
Ryan, Brent and Ted: the simple spacer does the job. After
some trials, here at Hebrew University we use intermetallic
crucibles with an special format manufactured by Angstrom
Engineering that mimics the spacer effect. Here is the
description:<o:p></o:p></p>
<p class="MsoNormal" style="text-align:justify"><img style="width:4.6333in;height:1.625in" id="Picture_x0020_1" src="cid:part1.nnw9oPrl.yQ9xaLDA@ufl.edu" class="" width="445" height="156"><o:p></o:p></p>
<p class="MsoNormal" style="text-align:justify">It is quite
expensive, 245$ each, but lasts for many evaporations. We
also have slow heat up and cooling down ramps.<o:p></o:p></p>
<p class="MsoNormal" style="text-align:justify"><o:p> </o:p></p>
<p class="MsoNormal">Once I saw at Princeton a simple thermal
evaporator using a Graphite boat, also from Angstrom. The
trick they use there is to consume all the
<span lang="EN-US">Al</span> in the boat in the end of the
evaporation. Seems to work nicely.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span lang="EN-US">Please find attached
the summary of all answers.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Shimon <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Hebrew University of
Jerusalem</span><span style="mso-fareast-language:EN-US" lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US" lang="EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US">From:</span></b><span lang="EN-US"> labnetwork
<a class="moz-txt-link-rfc2396E" href="mailto:labnetwork-bounces@mtl.mit.edu"><labnetwork-bounces@mtl.mit.edu></a>
<b>On Behalf Of </b>Chandan H B<br>
<b>Sent:</b> Monday, 29 August 2022 9:04<br>
<b>To:</b> <a class="moz-txt-link-abbreviated" href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Regarding : Aluminium
E-Beam Evaporation<o:p></o:p></span></p>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<p class="MsoNormal">Dear Lab network community,<o:p></o:p></p>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">We are currently facing an issue in
the deposition of Aluminium in one of our Electron beam
evaporation tools, we tried intermetallic, fab mate,
copper, glassy coated graphite, and graphite crucibles
for the evaporation. It seems that none of them are
working out. <o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">We see crucible gets broken at the
initial deposition quite often.<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">Are we missing out on any parameters
unchecked?<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">Kindly recommend us a few parameters
or solutions for the same.<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">Any suggestions/Inputs are highly
appreciated.<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">Thanks in advance!<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">Regards,<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">CHANDAN H B<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">THIN FILM ENGINEER<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">P.S: Here are a few parameters that
are provided to the tool.<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">Power: 10KW<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">Voltage: 10KV constant<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">Current: Variable <o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">Rise1 & Soak1: 5min & 1min
/8min & 2min<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">Rise1 Power: 4% (for intermetallic
crucible)<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">Rise2 & Soak2: 5min & 1min
/8min & 2min<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">Rise2 Power: 8% (for intermetallic
crucible)<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">Ramp down: 5min<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">Rate of deposition: 0.1nm/sec<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">Beam Pattern: Spot Beam at the center
of the crucible<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">Crucible Volume: 20cc<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">Material fill %: As recommended
67-75%<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
</div>
</div>
</div>
<br>
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