<html>
<head>
<meta http-equiv="Content-Type" content="text/html; charset=us-ascii">
<style type="text/css" style="display:none;"> P {margin-top:0;margin-bottom:0;} </style>
</head>
<body dir="ltr">
<div style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
Depends on your materials. <br>
</div>
<div style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
1165 and AZ Kwik Strip are two things I used<br>
</div>
<div style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
<br>
</div>
<div style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
PRS-2000 principal components are NMP and Sulpholane. <br>
</div>
<div style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
1165 recommended above is a (relatively) pure NMP, and it will work - a bit worse, though. Sulpholane is expensive, and probably the cause of the shortage</div>
<div style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
I vaguely remember a few more NMP based cleaners - including pure NMP sold as a chemical.
<br>
</div>
<div style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
<br>
</div>
<div style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
<br>
</div>
<div style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
NMP has a habit of absorbing water and causing galvanic corrosion, especially for III-V contact lift-off if left exposed to air for a while. Not sure if adding sulpholane mitigates it. Generally not a problem for Silicon process.
<br>
</div>
<div style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
AZ Kwik Strip is (was?) a sulpholane-based, marketed as "III-V safe" stripper. <br>
</div>
<div style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
No SDS for SVC-14 - as usual, Microchem / Kayaku are very bad at that, I should say - but seems like vanilla NMP as well. Disregard "safe for everything!!" overselling datasheet
<br>
</div>
<div style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
<br>
</div>
<div style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
Gensolve is a family of many chemicals, mostly non-disclosed "non-hazardous" composition, including some mixtures that shouldn't be brought into the cleanroom (NaOH). I would stay away as you cannot be sure it wouldn't kill your wafers regardless of vendor
statements. Looks like an upsold family of machine shop cleaners. Limonene, as a wild guess.<br>
</div>
<div style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
<br>
</div>
<div style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
Mike</div>
<div style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
<br>
</div>
<div style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
<br>
</div>
<div id="appendonsend"></div>
<hr style="display:inline-block;width:98%" tabindex="-1">
<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Katharine Beach <beach@umich.edu><br>
<b>Sent:</b> Thursday, September 22, 2022 4:02 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] PRS-2000 replacment</font>
<div> </div>
</div>
<div>
<div dir="ltr">We've been using PRS-2000 for our positive resist strip for years. Due to some supply chain issues, we are considering updating our supplied chemicals. I was wondering what photo resists stripers others are using and would recommend.
<div><br>
</div>
<div>Thanks,</div>
<div>Katharine Beach</div>
<div>Lurie Nanofabrication Facility</div>
</div>
</div>
</body>
</html>