<div dir="ltr"><div class="gmail_default" style="font-size:small">Hi Sergi,</div><div class="gmail_default" style="font-size:small"><br></div><div class="gmail_default" style="font-size:small">What I did before is to teach undergraduates how to fabricate Ni-Cr thermocouples on 4" wafers. The idea was similar to Philipp's. The goal was to make a simple device but would need most of the commonly used microfab procedures. The Ni-Cr thermocouple fabrication needed mask design, wafer cleaning, oxidation, spin-coating, photolithography with alignments (provided more complexity), film deposition, and wet etching, etc. End of the day students get a wafer diced and many devices. Then we tested a few of them to see if it works and what the temperature response curve was.</div><div class="gmail_default" style="font-size:small"><br></div><div class="gmail_default" style="font-size:small"><p class="MsoNormal" style="margin:0cm;font-size:11pt;font-family:Calibri,sans-serif"><a name="_MailAutoSig">Thanks,</a></p>
<p class="MsoNormal" style="margin:0cm;font-size:11pt;font-family:Calibri,sans-serif"> </p>
<p class="MsoNormal" style="margin:0cm;font-size:11pt;font-family:Calibri,sans-serif"><i>Fubo Rao, Ph.D.,</i></p>
<p class="MsoNormal" style="margin:0cm;font-size:11pt;font-family:Calibri,sans-serif"><i>Nanofabrication
Cleanroom Manager,</i></p>
<p class="MsoNormal" style="margin:0cm;font-size:11pt;font-family:Calibri,sans-serif"><i>Center
for Nanoscale Materials,</i></p>
<p class="MsoNormal" style="margin:0cm;font-size:11pt;font-family:Calibri,sans-serif"><i>Argonne
National Laboratory</i></p>
<p class="MsoNormal" style="margin:0cm;font-size:11pt;font-family:Calibri,sans-serif"><i>9700
S. Cass Ave, Lemont, IL 60439</i></p>
<p class="MsoNormal" style="margin:0cm;font-size:11pt;font-family:Calibri,sans-serif"><i>Phone:
630-252-5708</i></p>
<p class="MsoNormal" style="margin:0cm;font-size:11pt;font-family:Calibri,sans-serif"><i>Email:
</i><a href="frao@anl.gov"><i><span style="color:windowtext">frao@anl.gov</span></i></a><i></i></p></div></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Tue, Oct 11, 2022 at 6:40 AM Philipp Altpeter <<a href="mailto:philipp.altpeter@physik.uni-muenchen.de">philipp.altpeter@physik.uni-muenchen.de</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex">
<div>
<p>Dear Sergi,</p>
<p>One of the simplest devices that could be fabricated within a
microfabrication class would be a metal, thin film temperature
sensor: etching a meander in a thin metal film such as Aluminum
(involving thin film deposition, photolithography and wet etching
or lift-off), bonding the device in a chip carrier and measure it
on a hot plate. Very simple, very straight forward, you start with
a (piece of) Wafer and end up with a somewhat functional device.</p>
<p>Best,</p>
<p>Philipp</p>
<p><br>
</p>
<div>Am 07.10.2022 um 19:39 schrieb Sergi
Lendinez:<br>
</div>
<blockquote type="cite">
<div dir="ltr">
<div>
</div>
<div>
<p class="MsoNormal">Dear <span>labnetwork</span>
community,</p>
<p class="MsoNormal"> </p>
<p class="MsoNormal">Here at <span>LSU</span>
we are planning to start a microfabrication class soon, and
I would like to ask for your opinions about setting up this
kind of class at a university. I am not sure if this topic
has been discussed here before, so I apologize for any
possible duplication.</p>
<p class="MsoNormal"><br>
</p>
<p class="MsoNormal">Any information would be very helpful,
like do's and don't's, devices being fabricated, number of
students, students/teacher ratio, course load, etc.</p>
<p class="MsoNormal"><br>
</p>
<p class="MsoNormal">I'd like to fabricate some CMOS device,
but we lack some critical equipment such as a diffusion tube
furnace, cvd, or packaging tools, so I'm looking for
alternate ideas: maybe a photodiode/detector, a Hall sensor
or some micro-fluidic channels. If anyone has some
experience fabricating these devices in a class setup, is
there anything you'd be willing to share?</p>
<p class="MsoNormal"><br>
</p>
<p class="MsoNormal">Many thanks,</p>
<p class="MsoNormal">Sergi</p>
<p class="MsoNormal"> </p>
<p class="MsoNormal" style="background-color:white"><a name="m_6909339627608579080__MailAutoSig"><b><span style="font-size:10.5pt;font-family:Roboto;color:black">---</span></b></a><span><b><span style="font-size:10.5pt;font-family:Roboto"></span></b></span></p>
<p class="MsoNormal" style="background-color:white"><span><b><span style="font-size:10.5pt;font-family:Roboto;color:black">Sergi Lendinez, Ph. D.</span></b></span><span><span style="font-size:10.5pt;font-family:Roboto;color:black"><br>
Assistant Director NFF | Louisiana State University</span></span><span></span><span><span></span></span></p>
<p class="MsoNormal" style="background-color:white"><span><span style="font-size:10.5pt;font-family:Roboto;color:black">Center for Advanced
Microstructures and Devices (CAMD)</span></span><span><span style="font-size:10.5pt;font-family:Roboto"></span></span></p>
<p class="MsoNormal"><span><span style="font-size:10.5pt;font-family:Roboto">6980
Hefferson Highway</span></span><span><span style="font-size:10.5pt;font-family:Roboto">, Baton
Rouge, LA 70803<br>
(225) 578-9378</span></span><span><span style="font-size:10.5pt;font-family:Roboto"></span></span></p>
<p class="MsoNormal" style="background-color:white"><span></span><a href="mailto:sergilendi@lsu.edu" target="_blank"><span><span style="font-size:10.5pt;font-family:Roboto;color:rgb(5,99,193)">sergilendi@lsu.edu</span></span><span></span></a><span><span style="font-size:10.5pt;font-family:Roboto;color:rgb(51,51,51)"> | </span></span><span></span><a href="https://lsu.edu/nanofabrication" target="_blank"><span><b><span style="font-size:10.5pt;font-family:Roboto;color:rgb(112,48,160)">lsu.edu/nanofabrication</span></b></span><span></span></a><span><span style="font-size:10.5pt;font-family:Roboto;color:rgb(51,51,51)"></span></span></p>
<span></span>
<p class="MsoNormal"> </p>
</div>
</div>
<br>
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</blockquote>
<pre cols="72">--
Philipp Altpeter
Fakultät für Physik der LMU und
Center for NanoScience (CeNS)
LS Prof. Efetov
Geschwister-Scholl-Platz 1
D-80539 München
T. +49 (0)89 2180-3733</pre>
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