<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40">
<head>
<meta http-equiv="Content-Type" content="text/html; charset=utf-8">
<meta name="Generator" content="Microsoft Word 15 (filtered medium)">
<!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:Helvetica;
panose-1:2 11 6 4 2 2 2 2 2 4;}
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:Verdana;
panose-1:2 11 6 4 3 5 4 4 2 4;}
@font-face
{font-family:Garamond;
panose-1:2 2 4 4 3 3 1 1 8 3;}
@font-face
{font-family:ArialMT;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0cm;
font-size:11.0pt;
font-family:"Calibri",sans-serif;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
span.EmailStyle18
{mso-style-type:personal-reply;
font-family:"Calibri",sans-serif;
color:windowtext;}
.MsoChpDefault
{mso-style-type:export-only;
font-family:"Calibri",sans-serif;
mso-fareast-language:EN-US;}
@page WordSection1
{size:612.0pt 792.0pt;
margin:72.0pt 72.0pt 72.0pt 72.0pt;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
<body lang="EN-GB" link="blue" vlink="purple" style="word-wrap:break-word">
<div class="WordSection1">
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">Hello all,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">Agree with James Mitchell.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">Best way to is remove bottle and weigh it.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">Only other way to know if bottle is getting empty is to use residual gas analyzer to analyse chemical fingerprint in ALD chamber. Not seen it in practice. Also good for process development to know
how long you need to purge precursor/plasma/water.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">We normally find out our precursor is empty by using ellipsometer to measure film thickness and finding out it is almost < 1 nm!<o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Cheers,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">James<o:p></o:p></p>
<p class="MsoNormal"><span style="font-family:"Helvetica",sans-serif;color:#1E2142"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Helvetica",sans-serif;color:#1E2142">Dr. James Paul Grant<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Helvetica",sans-serif;color:#1E2142">Research Engineer in Plasma Processing</span><o:p></o:p></p>
<p class="MsoNormal"><i><span style="font-size:10.0pt;font-family:"Helvetica",sans-serif;color:#1E2142"><o:p> </o:p></span></i></p>
<p class="MsoNormal"><b><i><span style="font-family:"Helvetica",sans-serif;color:#005C8A">Plasma Etch Group</span></i></b><b><span style="color:#005C8A"><o:p></o:p></span></b></p>
<p class="MsoNormal"><span style="font-family:"Helvetica",sans-serif;color:#1E2142"> </span><u><span style="font-family:"Helvetica",sans-serif;color:#0563C1"><a href="mailto:james.grant@glasgow.ac.uk">james.grant@glasgow.ac.uk</a></span></u><span style="color:#003865">
</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#003865"><o:p> </o:p></span></p>
<p class="MsoNormal"> <img border="0" width="361" height="51" style="width:3.7638in;height:.5347in" id="Picture_x0020_4" src="cid:image001.png@01D8DE3A.D2215960"><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:ArialMT;color:red">
</span><span style="font-size:8.0pt;font-family:ArialMT;color:#005C8A"><a href="http://www.jwnc.gla.ac.uk/"><span style="color:#005C8A;text-decoration:none">www.JWNC.gla.ac.uk</span></a></span><span style="font-size:8.0pt;font-family:ArialMT;color:#EC2129"><br>
<img border="0" width="11" height="10" style="width:.1111in;height:.1041in" id="Picture_x0020_2" src="cid:image002.png@01D8DE3A.D2215960">
</span><span style="font-size:8.0pt;font-family:ArialMT;color:#005C8A"><a href="LinkedIn.com/company/JWNC"><span style="color:#005C8A;text-decoration:none">LinkedIn.com/company/JWNC</span></a></span><span style="font-size:8.0pt;font-family:ArialMT;color:#EC2129"><br>
<img border="0" width="10" height="10" style="width:.1041in;height:.1041in" id="Picture_x0020_3" src="cid:image003.png@01D8DE3A.D2215960">
</span><span style="font-size:8.0pt;font-family:ArialMT;color:#005C8A"><a href="https://twitter.com/uofg_jwnc"><span style="color:#005C8A;text-decoration:none">@UofG_JWNC</span></a></span><span style="font-size:8.0pt"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<div style="border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0cm 0cm 0cm">
<p class="MsoNormal"><b><span lang="EN-US">From:</span></b><span lang="EN-US"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>James Mitchell<br>
<b>Sent:</b> 12 October 2022 12:23<br>
<b>To:</b> Bradash, Mihailo Rayko <mbradash@purdue.edu><br>
<b>Cc:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Cambridge Nanotech Fiji ALD precursor pressures<o:p></o:p></span></p>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<p class="MsoNormal">The best way to know if the precursor is empty is to weigh it.<o:p></o:p></p>
<div>
<p class="MsoNormal">Should have a tare weight on it. Another way is to look for a spike in pressure during the pulse step.<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">This only works if you are not flowing too much gas.<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">Jim<o:p></o:p></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<div>
<p class="MsoNormal">On Tue, Oct 11, 2022 at 7:36 PM Bradash, Mihailo Rayko <<a href="mailto:mbradash@purdue.edu">mbradash@purdue.edu</a>> wrote:<o:p></o:p></p>
</div>
<blockquote style="border:none;border-left:solid #CCCCCC 1.0pt;padding:0cm 0cm 0cm 6.0pt;margin-left:4.8pt;margin-right:0cm">
<div>
<div>
<div>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US">Hello,<o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US"> <o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US">I was wondering if anyone here has had any experience with monitoring the precursor gas pressures in a Cambridge Nanotech Fiji ALD? I am using 4021Hafnium> Tetrakis(dimethylamino)hafnium,
98+%, contained in 50 ml Swagelok® cylinder and want to know if anyone happen to have a base pressure supplied by the cylinder, and what pressures have you seen before failing/empty? I recently came into this tool and position middle of this year and do not
have enough data to for a trend analysis. <o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US"> <o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US" style="font-size:12.0pt;font-family:"Garamond",serif">Mihailo Bradash</span><span lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US" style="font-size:12.0pt;font-family:"Garamond",serif">Research Engineer</span><span lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US" style="font-size:12.0pt;font-family:"Garamond",serif">Purdue University</span><span lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US" style="font-size:12.0pt;font-family:"Garamond",serif">Birck Nanotechnology Center</span><span lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US" style="font-size:12.0pt;font-family:"Garamond",serif">1205 W. State Street</span><span lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US" style="font-size:12.0pt;font-family:"Garamond",serif">West Lafayette, Indiana 47907</span><span lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US" style="font-size:12.0pt;font-family:"Garamond",serif">Office: (765)494-6522</span><span lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US" style="font-size:12.0pt;font-family:"Garamond",serif">Cell: (219)670-4974</span><span lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US" style="font-size:12.0pt;font-family:"Garamond",serif"><a href="mailto:mbradash@purdue.edu" target="_blank"><span style="color:#0563C1">mbradash@purdue.edu</span></a></span><span lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US"> <o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal">_______________________________________________<br>
labnetwork mailing list<br>
<a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<a href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork" target="_blank">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><o:p></o:p></p>
</div>
</blockquote>
</div>
<p class="MsoNormal"><br clear="all">
<o:p></o:p></p>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<p class="MsoNormal">-- <o:p></o:p></p>
<div>
<div>
<div>
<div>
<div>
<div>
<div>
<div>
<p class="MsoNormal"><b><span style="font-size:9.5pt;font-family:"Verdana",sans-serif;color:black">Thank you, Jim</span></b><o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal"><b><i><span style="font-size:9.5pt;font-family:"Verdana",sans-serif;color:#990000">James Mitchell</span></i></b><o:p></o:p></p>
<div>
<p class="MsoNormal"><b><i><span style="font-size:9.0pt;font-family:"Verdana",sans-serif;color:#990000;background:#F8F8F8">Specialty Trades Technician</span></i></b><span style="font-size:9.5pt"><o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><i><span style="font-size:9.5pt;font-family:"Verdana",sans-serif;color:#990000">Dept. of Electrical and Computer Engineering</span></i><span style="font-size:9.5pt"><o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><b><i><span style="font-size:9.5pt;font-family:"Verdana",sans-serif;color:#990000;letter-spacing:.15pt">North Carolina State University</span></i></b><i><span style="font-size:9.5pt;font-family:"Verdana",sans-serif;color:#990000;letter-spacing:.15pt">
Nanofabrication Facility (NNF)</span></i><span style="font-size:9.5pt"><o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><i><span style="font-size:9.5pt;font-family:"Verdana",sans-serif;color:#990000;letter-spacing:.15pt">MRC RM243A Box 7911</span></i><span style="font-size:9.5pt"><o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><i><span style="font-size:9.5pt;font-family:"Verdana",sans-serif;color:#990000;letter-spacing:.15pt">2410 Campus Shore Dr., Raleigh, NC 27606</span></i><span style="font-size:9.5pt"><o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-size:9.5pt"><a href="mailto:jtmitch5@ncsu.edu" target="_blank"><i><span style="font-family:"Verdana",sans-serif;color:#990000">jtmitch5@ncsu.edu</span></i></a><o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><i><span style="font-size:9.5pt;font-family:"Verdana",sans-serif;color:#990000">Desk: 919-515-5394</span></i><span style="font-size:9.5pt"><o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><i><span style="font-size:9.5pt;font-family:"Verdana",sans-serif;color:#990000">Cell: 919-717-7325</span></i><span style="font-size:9.5pt"><o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span style="font-size:9.5pt"><o:p> </o:p></span></p>
</div>
<div>
<p class="MsoNormal"><i><span style="font-size:9.5pt;font-family:"Verdana",sans-serif;color:#990000;border:solid windowtext 1.0pt;padding:0cm"><img border="0" width="200" height="112" style="width:2.0833in;height:1.1666in" id="Picture_x0020_1" src="cid:~WRD0004.jpg" alt="Image removed by sender."></span></i><span style="font-size:9.5pt"><o:p></o:p></span></p>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</body>
</html>