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<p>Dear Sergi, <br>
</p>
<p>I started a few years ago microfabrication Classes for engineers
and experimental physicists, here at UC. our cleanroom is small,
with CMOS or III-V standard processes. Thus we have more
flexibility about materials and processes. We did microfluidics
devices pump (with ITO electrodes), graphene transistors (using
comercial monolayer), and basic MEMS with Si anisotropic etching,
and simple micro-electrodes. Most of the time, the devices are not
working very well, but It allows the students to go through mask
design, spin-coating, (use of tweezers!), photolithography,
thin-film deposition, wet etching, and electrical
characterization. I think the graphene-based devices are quite
simple to fabricate and and always include an important electrical
characterization part. Microfluidics devices are fantastic for
students if they have the possibility to characterize under
microscope the channels with micro-particles for instance...</p>
<p>Hope it helps!</p>
<p><br>
</p>
<p>Best, <br>
</p>
<p>Loïk</p>
<p><br>
</p>
<p><br>
</p>
<p><br>
</p>
<p> <br>
</p>
<div class="moz-cite-prefix">Le 07/10/2022 à 14:39, Sergi Lendinez a
écrit :<br>
</div>
<blockquote type="cite"
cite="mid:CH0P221MB0283505CFDA0C653B3FE68D0CA5F9@CH0P221MB0283.NAMP221.PROD.OUTLOOK.COM">
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<p class="MsoNormal">Dear <span class="SpellE">labnetwork</span>
community,</p>
<p class="MsoNormal"> </p>
<p class="MsoNormal">Here at <span class="GramE">LSU</span>
we are planning to start a microfabrication class soon, and
I would like to ask for your opinions about setting up this
kind of class at a university. I am not sure if this topic
has been discussed here before, so I apologize for any
possible duplication.</p>
<p class="MsoNormal"><br>
</p>
<p class="MsoNormal">Any information would be very helpful,
like do's and don't's, devices being fabricated, number of
students, students/teacher ratio, course load, etc.</p>
<p class="MsoNormal"><br>
</p>
<p class="MsoNormal">I'd like to fabricate some CMOS device,
but we lack some critical equipment such as a diffusion tube
furnace, cvd, or packaging tools, so I'm looking for
alternate ideas: maybe a photodiode/detector, a Hall sensor
or some micro-fluidic channels. If anyone has some
experience fabricating these devices in a class setup, is
there anything you'd be willing to share?</p>
<p class="MsoNormal"><br>
</p>
<p class="MsoNormal">Many thanks,</p>
<p class="MsoNormal">Sergi</p>
<p class="MsoNormal"> </p>
<p class="MsoNormal" style="background-color: white;"><a
name="_MailAutoSig" moz-do-not-send="true"><b><span
style="font-size: 10.5pt; font-family: Roboto; color:
black;">---</span></b></a><span style=""><b><span
style="font-size:10.5pt; font-family:Roboto"></span></b></span></p>
<p class="MsoNormal" style="background-color: white;"><span
style=""><b><span style="font-size: 10.5pt; font-family:
Roboto; color: black;">Sergi Lendinez, Ph. D.</span></b></span><span
style=""><span style="font-size: 10.5pt; font-family:
Roboto; color: black;"><br>
Assistant Director NFF | Louisiana State University</span></span><span
style=""></span><span style=""><span style=""></span></span></p>
<p class="MsoNormal" style="background-color: white;"><span
style=""><span style="font-size: 10.5pt; font-family:
Roboto; color: black;">Center for Advanced
Microstructures and Devices (CAMD)</span></span><span
style=""><span style="font-size:10.5pt;
font-family:Roboto"></span></span></p>
<p class="MsoNormal"><span style=""><span
style="font-size:10.5pt; font-family:Roboto">6980
Hefferson Highway</span></span><span style=""><span
style="font-size:10.5pt; font-family:Roboto">, Baton
Rouge, LA 70803<br>
(225) 578-9378</span></span><span style=""><span
style="font-size:10.5pt; font-family:Roboto"></span></span></p>
<p class="MsoNormal" style="background-color: white;"><span
style=""></span><a href="mailto:sergilendi@lsu.edu"
moz-do-not-send="true"><span style=""><span
style="font-size: 10.5pt; font-family: Roboto; color:
rgb(5, 99, 193);">sergilendi@lsu.edu</span></span><span
style=""></span></a><span style=""><span
style="font-size: 10.5pt; font-family: Roboto; color:
rgb(51, 51, 51);"> | </span></span><span style=""></span><a
href="https://lsu.edu/nanofabrication"
moz-do-not-send="true"><span style=""><b><span
style="font-size: 10.5pt; font-family: Roboto;
color: rgb(112, 48, 160);">lsu.edu/nanofabrication</span></b></span><span
style=""></span></a><span style=""><span
style="font-size: 10.5pt; font-family: Roboto; color:
rgb(51, 51, 51);"></span></span></p>
<span style=""></span>
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<br>
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<pre class="moz-quote-pre" wrap="">_______________________________________________
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</pre>
</blockquote>
<pre class="moz-signature" cols="72">--
Dr. Loïk Gence
Assistant Professor
Functional Materials & Devices Lab
Pontificia Universidad Católica de Chile
Avda. Vicuña Mackenna 4860,
CP 7820436 Santiago
Lab: +56 95504 9648
<a class="moz-txt-link-abbreviated" href="http://www.lgdeviceslab.com">www.lgdeviceslab.com</a></pre>
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