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Hi Sergi, <br>
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We regularly offer a MEMS class and lab at the U. of Louisville. In years past the lab class has built pressure sensors but this year we are doing "pop-up" structures similar to the microelectromechanical (MEMS) gripper from the Harnett lab found here:
<a href="https://harnettlab.org/" id="LPlnkOWALinkPreview">https://harnettlab.org/</a> You can also see some video and photos of the students' progress this term on our Instagram page
<a href="https://www.instagram.com/micronanolouisville/" class="OWAAutoLink ContentPasted2" id="LPlnk993972">
https://www.instagram.com/micronanolouisville/</a> And you can find class related resources on our website: <a href="https://louisville.edu/micronano/ECE%20544" id="LPlnkOWALinkPreview_1">https://louisville.edu/micronano/ECE%20544</a> .
<br>
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The students are first walked through the rather straightforward fab sequence to gain familiarity with the cleanroom tools and then they design their own structures followed by doing a second round of fabrication. Another thing we did differently this year
is to have the cleanroom staff act as the TA's. While it is time consuming and bit of a pain (opinions my own) I think the students have had a MUCH better experience than in years past. Having inexperienced, sometimes apathetic grad students as TA's is not
optimal for the undergrads. That said we doubt we will be doing this again. <span id="π">
π</span> <br>
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<a target="_blank" id="LPUrlAnchor306654" href="https://louisville.edu/micronano/ECE%20544" style="text-decoration: none; color: var(--themePrimary);">ECE 544 β Micro/Nano Technology Center - University of Louisville</a></div>
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ECE 544 Microfabrication/MEMS Laboratory Fall 2022. Home; Expand About Us Submenu About Us. Administration and Staff; Annual Reports; About Us About Us Dropdown Toggle. Administration and Staff</div>
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louisville.edu</div>
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<a target="_blank" id="LPUrlAnchor698609" href="https://harnettlab.org/" style="text-decoration: none; color: var(--themePrimary);">Harnett Lab - At the University of Louisville J. B. Speed School of Engineering</a></div>
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We used shape-memory alloy (SMA) wire sewn into some denim and stiff plastic using tailored wire placement to form a βcreaseβ when energized which creates a flexure hinge, allowing the structure to bend. Since we are able to electronically control where this
crease is formed we can create a hinge up and down the structure, meaning we can reconfigure the location of the joint.</div>
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harnettlab.org</div>
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Hope this helps. <br>
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Regards,</div>
<div style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
Michael <br>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Sergi Lendinez <sergilendi@lsu.edu><br>
<b>Sent:</b> Friday, October 7, 2022 1:39 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] Microfabrication class</font>
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<p class="x_MsoNormal">Dear <span class="x_SpellE">labnetwork</span> community,</p>
<p class="x_MsoNormal"> </p>
<p class="x_MsoNormal">Here at <span class="x_GramE">LSU</span> we are planning to start a microfabrication class soon, and I would like to ask for your opinions about setting up this kind of class at a university. I am not sure if this topic has been discussed
here before, so I apologize for any possible duplication.</p>
<p class="x_MsoNormal"><br>
</p>
<p class="x_MsoNormal">Any information would be very helpful, like do's and don't's, devices being fabricated, number of students, students/teacher ratio, course load, etc.</p>
<p class="x_MsoNormal"><br>
</p>
<p class="x_MsoNormal">I'd like to fabricate some CMOS device, but we lack some critical equipment such as a diffusion tube furnace, cvd, or packaging tools, so I'm looking for alternate ideas: maybe a photodiode/detector, a Hall sensor or some micro-fluidic
channels. If anyone has some experience fabricating these devices in a class setup, is there anything you'd be willing to share?</p>
<p class="x_MsoNormal"><br>
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<p class="x_MsoNormal">Many thanks,</p>
<p class="x_MsoNormal">Sergi</p>
<p class="x_MsoNormal"> </p>
<p class="x_MsoNormal" style="background-color:white"><a name="x__MailAutoSig"><b><span style="font-size:10.5pt; font-family:Roboto; color:black">---</span></b></a><span style=""><b><span style="font-size:10.5pt; font-family:Roboto"></span></b></span></p>
<p class="x_MsoNormal" style="background-color:white"><span style=""><b><span style="font-size:10.5pt; font-family:Roboto; color:black">Sergi Lendinez, Ph. D.</span></b></span><span style=""><span style="font-size:10.5pt; font-family:Roboto; color:black"><br>
Assistant Director NFF | Louisiana State University</span></span><span style=""></span><span style=""><span style=""></span></span></p>
<p class="x_MsoNormal" style="background-color:white"><span style=""><span style="font-size:10.5pt; font-family:Roboto; color:black">Center for Advanced Microstructures and Devices (CAMD)</span></span><span style=""><span style="font-size:10.5pt; font-family:Roboto"></span></span></p>
<p class="x_MsoNormal"><span style=""><span style="font-size:10.5pt; font-family:Roboto">6980 Hefferson Highway</span></span><span style=""><span style="font-size:10.5pt; font-family:Roboto">, Baton Rouge, LA 70803<br>
(225) 578-9378</span></span><span style=""><span style="font-size:10.5pt; font-family:Roboto"></span></span></p>
<p class="x_MsoNormal" style="background-color:white"><span style=""></span><a href="mailto:sergilendi@lsu.edu"><span style=""><span style="font-size:10.5pt; font-family:Roboto; color:rgb(5,99,193)">sergilendi@lsu.edu</span></span><span style=""></span></a><span style=""><span style="font-size:10.5pt; font-family:Roboto; color:rgb(51,51,51)">
| </span></span><span style=""></span><a href="https://nam11.safelinks.protection.outlook.com/?url=https%3A%2F%2Flsu.edu%2Fnanofabrication&data=05%7C01%7Cmichael.martin%40louisville.EDU%7C1b6302f582564bff34c308daa89b6672%7Cdd246e4a54344e158ae391ad9797b209%7C0%7C0%7C638007682661893366%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C2000%7C%7C%7C&sdata=6Sh85DWjUBaNMMpiQgMK1dZB4slu%2FRTIhXUaE0h1clI%3D&reserved=0" originalsrc="https://lsu.edu/nanofabrication" shash="Fjfp7/vpt8LhEiWnn8/D6EUcVE9qL/JOE3w0a2SsQxbSGn275CS7SiyeIEHVOEmUgHt8LuwkABM2p1ifIQBeCx8Sny3f4aRO4qa7mTB10R5we9dUak6Q3cOK5fNhuw843elI0FAUv+IeYNiYsOwH4VtwxLS5w5fUseJYme7Gl24="><span style=""><b><span style="font-size:10.5pt; font-family:Roboto; color:rgb(112,48,160)">lsu.edu/nanofabrication</span></b></span><span style=""></span></a><span style=""><span style="font-size:10.5pt; font-family:Roboto; color:rgb(51,51,51)"></span></span></p>
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