<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40">
<head>
<meta http-equiv="Content-Type" content="text/html; charset=us-ascii">
<meta name="Generator" content="Microsoft Word 15 (filtered medium)">
<style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:Roboto;
panose-1:2 0 0 0 0 0 0 0 0 0;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri",sans-serif;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:#0563C1;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:#954F72;
text-decoration:underline;}
p.msonormal0, li.msonormal0, div.msonormal0
{mso-style-name:msonormal;
mso-margin-top-alt:auto;
margin-right:0in;
mso-margin-bottom-alt:auto;
margin-left:0in;
font-size:12.0pt;
font-family:"Times New Roman",serif;}
p.msochpdefault, li.msochpdefault, div.msochpdefault
{mso-style-name:msochpdefault;
mso-margin-top-alt:auto;
margin-right:0in;
mso-margin-bottom-alt:auto;
margin-left:0in;
font-size:12.0pt;
font-family:"Calibri",sans-serif;}
span.emailstyle17
{mso-style-name:emailstyle17;
font-family:"Calibri",sans-serif;
color:windowtext;}
span.spelle
{mso-style-name:spelle;}
span.grame
{mso-style-name:grame;}
span.EmailStyle22
{mso-style-type:personal-reply;
font-family:"Calibri",sans-serif;
color:#1F497D;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
<body lang="EN-US" link="#0563C1" vlink="#954F72">
<div class="WordSection1">
<p class="MsoNormal"><span style="color:#1F497D">Hello Sergi,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">My colleagues and I have been teaching a micro-fabrication class here at Rochester Institute of Technology, Microelectronic Engineering since 1982.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">We have sophomores, seniors and beginning graduate students all take the class. The class and lab is taught by faculty (with faculty and TA’s together in the lab)<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Here are my thoughts on such a class and a very early reference to our first level course. I also recommend that you attend UGIM 2024 at MIT to hear first- hand what other universities are doing.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Reference (we have many other papers at UGIM about our curriculum):<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal">R. Pearson, R. Turkman, L. Fuller, and S. Ramanan, <u>PMOS Metal Gate Process, Ideal for Undergraduate Integrated Circuit Fabrication Projects</u>, Proceedings of the Seventh Biennial University Government Industry Microelectronics Symposium,
Rochester, NY, June 1987.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">You need to teach with a meaningful electrical device as the primary focus, namely a transistor since it is the fundamental element of virtually every semiconductor circuit being made these days. It does not
matter if it is NMOS, PMOS or CMOS just that it is a MOSFET. <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Enhancement mode PMOSFETs can reliably and easily be made on n-type substrates. NMOSFETS tend to end up as depletion mode devices unless you do a specific threshold voltage adjustment (which might be educational
but require outside processing). We here at RIT might be able to help you with that with our ion implanter for a small fee.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">The metal-gate (aluminum) PMOS process is a simple 4 mask process and can be done in 7-8 weeks leaving time on the front end of the course for design (layout) and the backend for electrical testing.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">If you have your own mask masking capability or direct write (Heidelberg laser writer?) each student can manufacture their own design as part of a multi-student chip. We give each student a 12-pad (100 by 100
micron pads in two rows of 6) probe configuration (800 by 800 micron total area) to design in. The probe pads match our probe cards and greatly speeds up the electrical testing. We have lots of course and lab notes as well as Silvaco simulation input files
that we can share.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">You must be able to do doping of some sort to create the source and drain regions. We started by using spin on dopant sources for our drain/source areas and resistors. It is simple and safe. Uniformity can be
an issue but it teaches good manufacturing lessons. You can also expand into doing other processes such as double diffused (non-isolated) or triple diffused (isolated) bipolar transistors and diodes. These processes require more mask levels and longer processing
time.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">We have actually condensed the 4-level PMOS process into a one-week short course. Maybe you should come to Rochester Institute of Technology sometime and run though it with us.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">I would be glad to talk to you further about helping you get your course off the ground.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Sincerely,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Rob Pearson, Ph.D.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">RIT – Microelectronic Engineering<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><a href="mailto:robert.pearson@rit.edu">robert.pearson@rit.edu</a>
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Office: (585) 475-2924 </span><span style="color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<div>
<div style="border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> <b>
On Behalf Of </b>Sergi Lendinez<br>
<b>Sent:</b> Friday, October 7, 2022 1:39 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Microfabrication class<o:p></o:p></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<div>
<p class="MsoNormal">Dear <span class="spelle">labnetwork</span> community,<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">Here at <span class="grame">LSU</span> we are planning to start a microfabrication class soon, and I would like to ask for your opinions about setting up this kind of class at a university. I am not sure if this topic has been discussed
here before, so I apologize for any possible duplication.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Any information would be very helpful, like do's and don't's, devices being fabricated, number of students, students/teacher ratio, course load, etc.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I'd like to fabricate some CMOS device, but we lack some critical equipment such as a diffusion tube furnace, cvd, or packaging tools, so I'm looking for alternate ideas: maybe a photodiode/detector, a Hall sensor or some micro-fluidic
channels. If anyone has some experience fabricating these devices in a class setup, is there anything you'd be willing to share?<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Many thanks,<o:p></o:p></p>
<p class="MsoNormal">Sergi<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal" style="background:white"><b><span style="font-size:10.5pt;font-family:Roboto;color:black">---</span></b><o:p></o:p></p>
<p class="MsoNormal" style="background:white"><b><span style="font-size:10.5pt;font-family:Roboto;color:black">Sergi Lendinez, Ph. D.</span></b><span style="font-size:10.5pt;font-family:Roboto;color:black"><br>
Assistant Director NFF | Louisiana State University</span><o:p></o:p></p>
<p class="MsoNormal" style="background:white"><span style="font-size:10.5pt;font-family:Roboto;color:black">Center for Advanced Microstructures and Devices (CAMD)</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:Roboto">6980 Hefferson Highway, Baton Rouge, LA 70803<br>
(225) 578-9378</span><o:p></o:p></p>
<p class="MsoNormal" style="background:white"><a href="mailto:sergilendi@lsu.edu"><span style="font-size:10.5pt;font-family:Roboto">sergilendi@lsu.edu</span></a><span style="font-size:10.5pt;font-family:Roboto;color:#333333"> | </span><a href="https://lsu.edu/nanofabrication"><b><span style="font-size:10.5pt;font-family:Roboto;color:#7030A0">lsu.edu/nanofabrication</span></b></a><o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
</div>
</div>
</div>
</body>
</html>