<div dir="ltr"><div>All,</div><div>Tom Britton has provided a wide range of excellent info to many of us.</div><div>I'm confident some supplier does recommend those storage limits and <br></div><div>large fabs have no trouble meeting them.</div><div>After review, we realized to meet these limits we would be disposing of <br></div><div>almost all of our gases - so we are going to keep drinking the old milk <br></div><div>regardless of what the carton says.</div><div><br></div><div>The one exception I will note is diborane - which is the gas with the shortest <br></div><div>recommended storage time on this list. We routinely had clogged injectors on <br></div><div>an lpcvd system delivering B2H6 and bottle change often solved the issue.</div><div>Polymerization of diborane is well documented and there's even a thread from <br></div><div>2012 on lab net discussing the issue.</div><div><br></div><div>Regards</div><div>Bill Flounders</div><div>UC Berkeley<br></div><div><br></div></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Thu, Dec 1, 2022 at 1:02 PM Collins, Deon <<a href="mailto:deonc69@illinois.edu">deonc69@illinois.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex"><div class="msg-6470655582378495986">
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<p class="MsoNormal">I can tell you we personally had a BCL3 cylinder that was much, much, older than what is listed on their standards. It performed excellent till the day it was changed out three years ago. That cylinder is still being used on one of our
cleanroom process tools with great results. Purity has an affect as well. <u></u><u></u></p>
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<p class="MsoNormal"><b>From:</b> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>> <b>
On Behalf Of </b>Tom Britton<br>
<b>Sent:</b> Wednesday, November 30, 2022 10:56 AM<br>
<b>To:</b> Morrison, Richard H., Jr <<a href="mailto:rmorrison@draper.com" target="_blank">rmorrison@draper.com</a>>; <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> Re: [labnetwork] BCL3 question<u></u><u></u></p>
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<p class="MsoNormal"><span style="font-family:"Century Gothic",sans-serif;color:rgb(50,62,79)">Hi Richard,<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-family:"Century Gothic",sans-serif;color:rgb(50,62,79)"><u></u> <u></u></span></p>
<p class="MsoNormal"><span style="font-family:"Century Gothic",sans-serif;color:rgb(50,62,79)">I got this a while back from I believe Air Liquide, but I’m not 100% positive of the source. Hopefully it helps.<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-family:"Century Gothic",sans-serif;color:rgb(50,62,79)"><u></u> <u></u></span></p>
<p class="MsoNormal"><span style="font-family:"Century Gothic",sans-serif;color:rgb(50,62,79)">Happy Holidays,<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-family:"Century Gothic",sans-serif;color:rgb(50,62,79)"><u></u> <u></u></span></p>
<p class="MsoNormal"><span style="font-family:"Century Gothic",sans-serif;color:rgb(50,62,79)">Tom
<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-family:"Century Gothic",sans-serif;color:rgb(50,62,79)"><u></u> <u></u></span></p>
<p class="MsoNormal"><span style="font-family:"Century Gothic",sans-serif;color:rgb(50,62,79)">Tom Britton<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-family:"Century Gothic",sans-serif;color:rgb(50,62,79)">Director of Sales<u></u><u></u></span></p>
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<p class="MsoNormal"><b>From:</b> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Morrison, Richard H., Jr<br>
<b>Sent:</b> Wednesday, November 30, 2022 7:53 AM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] BCL3 question<u></u><u></u></p>
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<p class="MsoNormal">HI everyone,<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">Does anybody have an estimate on how long BCl3 last in a cylinder. I have a cylinder of BCL3 install in 2013 and recently the etch rate has dropped, does BCl3 go bad? The gas cabinet scale is not in alarm.<u></u><u></u></p>
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<p class="MsoNormal">Rick<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">Richard Morrison<u></u><u></u></p>
<p class="MsoNormal">PMTS<u></u><u></u></p>
<p class="MsoNormal">Draper Laboratory<u></u><u></u></p>
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