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Hi Everyone,<br>
<br>
My current supplier lists 24-36 months for the gases I use; they are
unable to supply BCl3 at this time so there is no shelf life listed.
I do not use B2H6.<br>
<br>
I noticed that on the list Tom shared, H2 is listed at 12 months;
that seems awfully short - my supplier lists 36 months but most of
us probably regard that as being on the conservative side. Also, O2
and Ar seem to go bad in 3 years...<br>
<br>
Happy holidays,<br>
<br>
Iulian<br>
<pre class="moz-signature" cols="72">iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
<a class="moz-txt-link-freetext" href="http://udnf.udel.edu">http://udnf.udel.edu</a></pre>
<div class="moz-cite-prefix">On 12/2/2022 10:46 AM, Tom Britton
wrote:<br>
</div>
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<p class="MsoNormal"><span style="font-family:"Century
Gothic",sans-serif;color:#323E4F">I will add in that
this is from the “gas supplier”, and they may have a vested
interest in customer’s continuing to buy fresh gases. Also,
they could be leaning conservative as the quality of the gas
that is needed for 10nm HVM production and that which is
needed for research may be quite different.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Century
Gothic",sans-serif;color:#323E4F"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Century
Gothic",sans-serif;color:#323E4F">Happy holidays!<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Century
Gothic",sans-serif;color:#323E4F"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Century
Gothic",sans-serif;color:#323E4F">Tom<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Century
Gothic",sans-serif;color:#323E4F"><o:p> </o:p></span></p>
<div>
<div style="border:none;border-top:solid #E1E1E1
1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b>From:</b> labnetwork
<a class="moz-txt-link-rfc2396E" href="mailto:labnetwork-bounces@mtl.mit.edu"><labnetwork-bounces@mtl.mit.edu></a> <b>
On Behalf Of </b>Albert William (Bill) Flounders<br>
<b>Sent:</b> Thursday, December 1, 2022 2:43 PM<br>
<b>To:</b> Collins, Deon <a class="moz-txt-link-rfc2396E" href="mailto:deonc69@illinois.edu"><deonc69@illinois.edu></a><br>
<b>Cc:</b> <a class="moz-txt-link-abbreviated" href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> Re: [labnetwork] BCL3 question<o:p></o:p></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
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<div>
<div>
<div>
<p class="MsoNormal">All,<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">Tom Britton has provided a wide range
of excellent info to many of us.<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">I'm confident some supplier does
recommend those storage limits and
<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">large fabs have no trouble meeting
them.<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">After review, we realized to meet
these limits we would be disposing of
<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">almost all of our gases - so we are
going to keep drinking the old milk
<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">regardless of what the carton says.<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">The one exception I will note is
diborane - which is the gas with the shortest
<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">recommended storage time on this
list. We routinely had clogged injectors on
<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">an lpcvd system delivering B2H6 and
bottle change often solved the issue.<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">Polymerization of diborane is well
documented and there's even a thread from
<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">2012 on lab net discussing the issue.<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">Regards<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">Bill Flounders<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal">UC Berkeley<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<div>
<p class="MsoNormal">On Thu, Dec 1, 2022 at 1:02 PM
Collins, Deon <<a href="mailto:deonc69@illinois.edu"
moz-do-not-send="true" class="moz-txt-link-freetext">deonc69@illinois.edu</a>>
wrote:<o:p></o:p></p>
</div>
<blockquote style="border:none;border-left:solid #CCCCCC
1.0pt;padding:0in 0in 0in
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<div>
<div>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">I
can tell you we personally had a BCL3 cylinder
that was much, much, older than what is listed on
their standards. It performed excellent till the
day it was changed out three years ago. That
cylinder is still being used on one of our
cleanroom process tools with great results. Purity
has an affect as well.
<o:p></o:p></p>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <o:p></o:p></p>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <o:p></o:p></p>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <o:p></o:p></p>
<div>
<div style="border:none;border-top:solid
windowtext 1.0pt;padding:3.0pt 0in 0in
0in;border-color:currentcolor currentcolor">
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><b>From:</b>
labnetwork <<a
href="mailto:labnetwork-bounces@mtl.mit.edu"
target="_blank" moz-do-not-send="true"
class="moz-txt-link-freetext">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Tom Britton<br>
<b>Sent:</b> Wednesday, November 30, 2022
10:56 AM<br>
<b>To:</b> Morrison, Richard H., Jr <<a
href="mailto:rmorrison@draper.com"
target="_blank" moz-do-not-send="true"
class="moz-txt-link-freetext">rmorrison@draper.com</a>>;
<a href="mailto:labnetwork@mtl.mit.edu"
target="_blank" moz-do-not-send="true"
class="moz-txt-link-freetext">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> Re: [labnetwork] BCL3 question<o:p></o:p></p>
</div>
</div>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <o:p></o:p></p>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span
style="font-family:"Century
Gothic",sans-serif;color:#323E4F">Hi
Richard,</span><o:p></o:p></p>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span
style="font-family:"Century
Gothic",sans-serif;color:#323E4F"> </span><o:p></o:p></p>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span
style="font-family:"Century
Gothic",sans-serif;color:#323E4F">I got
this a while back from I believe Air Liquide,
but I’m not 100% positive of the source.
Hopefully it helps.</span><o:p></o:p></p>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span
style="font-family:"Century
Gothic",sans-serif;color:#323E4F"> </span><o:p></o:p></p>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span
style="font-family:"Century
Gothic",sans-serif;color:#323E4F">Happy
Holidays,</span><o:p></o:p></p>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span
style="font-family:"Century
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<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span
style="font-family:"Century
Gothic",sans-serif;color:#323E4F">Tom
</span><o:p></o:p></p>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span
style="font-family:"Century
Gothic",sans-serif;color:#323E4F"> </span><o:p></o:p></p>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span
style="font-family:"Century
Gothic",sans-serif;color:#323E4F">Tom
Britton</span><o:p></o:p></p>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span
style="font-family:"Century
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of Sales</span><o:p></o:p></p>
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style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><i><span
style="font-size:14.0pt;font-family:"Century
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Systems, Inc.</span></i><o:p></o:p></p>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span
style="font-family:"Century
Gothic",sans-serif;color:#323E4F">Direct:
208.890.1417</span><o:p></o:p></p>
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style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span
style="font-family:"Century
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877.572.5515</span><o:p></o:p></p>
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style="font-family:"Century
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tombrittoncsi</span><o:p></o:p></p>
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target="_blank" moz-do-not-send="true"><i><span
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style="font-family:"Century
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style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span
style="font-family:"Century
Gothic",sans-serif;color:#323E4F"> </span><o:p></o:p></p>
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<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><b>From:</b>
labnetwork <<a
href="mailto:labnetwork-bounces@mtl.mit.edu"
target="_blank" moz-do-not-send="true"
class="moz-txt-link-freetext">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Morrison, Richard H., Jr<br>
<b>Sent:</b> Wednesday, November 30, 2022 7:53
AM<br>
<b>To:</b> <a
href="mailto:labnetwork@mtl.mit.edu"
target="_blank" moz-do-not-send="true"
class="moz-txt-link-freetext">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] BCL3 question<o:p></o:p></p>
</div>
</div>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <o:p></o:p></p>
<div>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">HI
everyone,<o:p></o:p></p>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <o:p></o:p></p>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Does
anybody have an estimate on how long BCl3 last
in a cylinder. I have a cylinder of BCL3 install
in 2013 and recently the etch rate has dropped,
does BCl3 go bad? The gas cabinet scale is not
in alarm.<o:p></o:p></p>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <o:p></o:p></p>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Rick<o:p></o:p></p>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <o:p></o:p></p>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <o:p></o:p></p>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Richard
Morrison<o:p></o:p></p>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">PMTS<o:p></o:p></p>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Draper
Laboratory<o:p></o:p></p>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">555
Technology Square<o:p></o:p></p>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Cambridge
Ma 02139<o:p></o:p></p>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Office:
617-258-3420<o:p></o:p></p>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto">Cell:
508-930-3461<o:p></o:p></p>
<p class="MsoNormal"
style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> <o:p></o:p></p>
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