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<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US">Hi Rick,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US">This is my “2 cents” for the discussion:<o:p></o:p></span></p>
<ul style="margin-top:0cm" type="disc">
<li class="MsoListParagraph" style="margin-left:0cm;mso-list:l0 level1 lfo1"><span lang="EN-US" style="mso-fareast-language:EN-US">We have Cl2, BCl3 and HBr etching processes running for 13 years<o:p></o:p></span></li><li class="MsoListParagraph" style="margin-left:0cm;mso-list:l0 level1 lfo1"><span lang="EN-US" style="mso-fareast-language:EN-US">The first set of cylinders were exchanged after 5 years of use<o:p></o:p></span></li><li class="MsoListParagraph" style="margin-left:0cm;mso-list:l0 level1 lfo1"><span lang="EN-US" style="mso-fareast-language:EN-US">The second set of cylinders is in use for 8 years and running<o:p></o:p></span></li><li class="MsoListParagraph" style="margin-left:0cm;mso-list:l0 level1 lfo1"><span lang="EN-US" style="mso-fareast-language:EN-US">Although we only order small cylinders (3 to 5 liters), they last for years<o:p></o:p></span></li><li class="MsoListParagraph" style="margin-left:0cm;mso-list:l0 level1 lfo1"><span lang="EN-US" style="mso-fareast-language:EN-US">We use to retire our cylinders when their hydrostatic test expires<o:p></o:p></span></li><li class="MsoListParagraph" style="margin-left:0cm;mso-list:l0 level1 lfo1"><span lang="EN-US" style="mso-fareast-language:EN-US">Only for B2H6 we observe its gas expiration date
<o:p></o:p></span></li></ul>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US">Regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US">Shimon
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US">From:</span></b><span lang="EN-US"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Morrison, Richard H., Jr<br>
<b>Sent:</b> Thursday, 1 December 2022 23:47<br>
<b>To:</b> bill_flounders@berkeley.edu; deonc69@illinois.edu<br>
<b>Cc:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] BCL3 question<o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span lang="EN-US">Thanks Everyone for your ideas<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Rick<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US">From:</span></b><span lang="EN-US"> Albert William (Bill) Flounders <<a href="mailto:bill_flounders@berkeley.edu">bill_flounders@berkeley.edu</a>>
<br>
<b>Sent:</b> Thursday, December 1, 2022 4:43 PM<br>
<b>To:</b> Collins, Deon <<a href="mailto:deonc69@illinois.edu">deonc69@illinois.edu</a>><br>
<b>Cc:</b> Morrison, Richard H., Jr <<a href="mailto:rmorrison@draper.com">rmorrison@draper.com</a>>;
<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> Re: [labnetwork] BCL3 question<o:p></o:p></span></p>
</div>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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<div>
<p class="MsoNormal"><span lang="EN-US">All,<o:p></o:p></span></p>
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<div>
<p class="MsoNormal"><span lang="EN-US">Tom Britton has provided a wide range of excellent info to many of us.<o:p></o:p></span></p>
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<div>
<p class="MsoNormal"><span lang="EN-US">I'm confident some supplier does recommend those storage limits and
<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-US">large fabs have no trouble meeting them.<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-US">After review, we realized to meet these limits we would be disposing of
<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-US">almost all of our gases - so we are going to keep drinking the old milk
<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-US">regardless of what the carton says.<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-US">The one exception I will note is diborane - which is the gas with the shortest
<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-US">recommended storage time on this list. We routinely had clogged injectors on
<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-US">an lpcvd system delivering B2H6 and bottle change often solved the issue.<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-US">Polymerization of diborane is well documented and there's even a thread from
<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-US">2012 on lab net discussing the issue.<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-US">Regards<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-US">Bill Flounders<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-US">UC Berkeley<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
</div>
</div>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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<div>
<p class="MsoNormal"><span lang="EN-US">On Thu, Dec 1, 2022 at 1:02 PM Collins, Deon <<a href="mailto:deonc69@illinois.edu">deonc69@illinois.edu</a>> wrote:<o:p></o:p></span></p>
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<div>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US">I can tell you we personally had a BCL3 cylinder that was much, much, older than what is listed on their standards. It performed excellent till the day it was
changed out three years ago. That cylinder is still being used on one of our cleanroom process tools with great results. Purity has an affect as well.
<o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US"> <o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US"> <o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US"> <o:p></o:p></span></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><b><span lang="EN-US">From:</span></b><span lang="EN-US"> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Tom Britton<br>
<b>Sent:</b> Wednesday, November 30, 2022 10:56 AM<br>
<b>To:</b> Morrison, Richard H., Jr <<a href="mailto:rmorrison@draper.com" target="_blank">rmorrison@draper.com</a>>;
<a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> Re: [labnetwork] BCL3 question<o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US"> <o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US" style="font-family:"Century Gothic",sans-serif;color:#323E4F">Hi Richard,</span><span lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US" style="font-family:"Century Gothic",sans-serif;color:#323E4F"> </span><span lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US" style="font-family:"Century Gothic",sans-serif;color:#323E4F">I got this a while back from I believe Air Liquide, but I’m not 100% positive of the source. Hopefully
it helps.</span><span lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US" style="font-family:"Century Gothic",sans-serif;color:#323E4F"> </span><span lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US" style="font-family:"Century Gothic",sans-serif;color:#323E4F">Happy Holidays,</span><span lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US" style="font-family:"Century Gothic",sans-serif;color:#323E4F"> </span><span lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US" style="font-family:"Century Gothic",sans-serif;color:#323E4F">Tom
</span><span lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US" style="font-family:"Century Gothic",sans-serif;color:#323E4F"> </span><span lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US" style="font-family:"Century Gothic",sans-serif;color:#323E4F">Tom Britton</span><span lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US" style="font-family:"Century Gothic",sans-serif;color:#323E4F">Director of Sales</span><span lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><i><span lang="EN-US" style="font-size:14.0pt;font-family:"Century Gothic",sans-serif;color:#323E4F">Critical Systems, Inc.</span></i><span lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US" style="font-family:"Century Gothic",sans-serif;color:#323E4F">Direct: 208.890.1417</span><span lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US" style="font-family:"Century Gothic",sans-serif;color:#323E4F">Office: 877.572.5515</span><span lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US" style="font-family:"Century Gothic",sans-serif;color:#323E4F">Skype: tombrittoncsi</span><span lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US"><a href="https://urldefense.proofpoint.com/v2/url?u=http-3A__www.criticalsystemsinc.com_&d=DwMFAg&c=euGZstcaTDllvimEN8b7jXrwqOf-v5A_CdpgnVfiiMM&r=D1j3aH4gf_B24MHGaru0vse-Gx_NllaIE8kLU3iLsM0&m=Zc1q2ymDPllIVSzjmSZUdSs5CpFTu1sKiLVG7DOoSNE&s=tJB4xuByIZ7Ff61fhBJGZ4iH3G9CczR1NFyf0xP_86A&e=" target="_blank"><i><span style="font-size:12.0pt;font-family:"Arial Narrow",sans-serif">www.CriticalSystemsInc.com</span></i></a><o:p></o:p></span></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><b><i><span lang="EN-US" style="font-family:"Century Gothic",sans-serif;color:#002060">Note: 7 days per week Technical Support
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</span></i><span lang="EN-US"><a href="mailto:Fieldservices@criticalsystemsinc.com" target="_blank"><i><span style="font-family:"Century Gothic",sans-serif">Fieldservices@criticalsystemsinc.com</span></i></a><o:p></o:p></span></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><b><span lang="EN-US">From:</span></b><span lang="EN-US"> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Morrison, Richard H., Jr<br>
<b>Sent:</b> Wednesday, November 30, 2022 7:53 AM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] BCL3 question<o:p></o:p></span></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US"> <o:p></o:p></span></p>
<div>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US">HI everyone,<o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US"> <o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US">Does anybody have an estimate on how long BCl3 last in a cylinder. I have a cylinder of BCL3 install in 2013 and recently the etch rate has dropped, does BCl3
go bad? The gas cabinet scale is not in alarm.<o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US"> <o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US">Rick<o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US"> <o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-US"> <o:p></o:p></span></p>
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