<html><head><meta http-equiv="Content-Type" content="text/html; charset=utf-8"></head><body style="word-wrap: break-word; -webkit-nbsp-mode: space; line-break: after-white-space;" class="">HI Dave,<div class=""><br class=""></div><div class="">As a follow-up and because I have had to employ our PS-80 once again, I decided to find out who can repair it, as I am never going to ADVACO again with any of our pumps.</div><div class=""><br class=""></div><div class="">I found that Trillium and FMG will service them. FMG actually builds the pumps with permission of Hanbell (who owns the design). They allow Drytek, FMG and Leybold (LV80) to use their design. </div><div class=""><br class=""></div><div class="">So, essentially and FMG or Leybold pump is the same thing. They are made be Hanbell.</div><div class=""><br class=""><div class="">
<div>Mark Weiler<br class="">Manager, Equipment & Facilities<br class="">Bertucci Nanotechnology Laboratory<br class="">Eden Hall Nanofabrication Cleanroom<br class="">Carnegie Mellon University<br class="">P:<span class="Apple-tab-span" style="white-space: pre;"> </span>412-268-2471<br class="">F:<span class="Apple-tab-span" style="white-space: pre;"> </span>412-268-3497<br class=""><a href="http://www.nanofab.ece.cmu.edu" class="">http://www.nanofab.ece.cmu.edu</a><br class=""><br class=""></div><div><br class=""></div><br class="Apple-interchange-newline">
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<div><br class=""><blockquote type="cite" class=""><div class="">On Jul 29, 2022, at 10:40 AM, Hollingshead, Dave <<a href="mailto:hollingshead.19@osu.edu" class="">hollingshead.19@osu.edu</a>> wrote:</div><br class="Apple-interchange-newline"><div class=""><meta charset="UTF-8" class=""><div class="WordSection1" style="page: WordSection1; caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;"><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;" class="">Hi all,<o:p class=""></o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><o:p class=""> </o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;" class="">Does anyone have experience (good, bad, or otherwise) with Drytek dry screw pumps (specifically as a turbo backing pump for an ICP etcher)? Most of the dry pumps in our lab are Edwards, but since lead times have recently become a major issue we are considering alternatives.<o:p class=""></o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><o:p class=""> </o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;" class="">Thanks,<o:p class=""></o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;" class="">-Dave<o:p class=""></o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><o:p class=""> </o:p></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><b class=""><span style="font-size: 9pt; font-family: Arial, sans-serif; color: rgb(187, 0, 0); background-color: white;" class="">Dave Hollingshead </span></b><span style="font-size: 9pt; font-family: Arial, sans-serif; color: rgb(51, 51, 51);" class=""><br class=""><span style="background-color: white;" class="">Manager of Research Operations – Nanotech West Lab<br class=""><b class="">The Ohio State University</b></span><o:p class=""></o:p></span></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><span style="font-size: 9pt; font-family: Arial, sans-serif; color: rgb(51, 51, 51); background-color: white;" class="">Suite 100, 1381 Kinnear Road, Columbus, OH 43212</span><span style="font-size: 9pt; font-family: Arial, sans-serif; color: rgb(51, 51, 51);" class=""><br class=""><span style="background-color: white;" class="">614.292.1355 Office</span><br class=""></span><span style="color: rgb(51, 51, 51);" class=""><a href="mailto:hollingshead.19@osu.edu" class=""><span style="font-size: 9pt; font-family: Arial, sans-serif; color: blue; background-color: white;" class="">hollingshead.19@osu.edu</span></a></span><span style="font-size: 9pt; font-family: Arial, sans-serif; color: rgb(51, 51, 51); background-color: white;" class=""> </span><span style="color: rgb(51, 51, 51);" class=""><a href="http://osu.edu/" class=""><span style="font-size: 9pt; font-family: Arial, sans-serif; color: blue; background-color: white;" class="">osu.edu</span></a></span><span style="color: rgb(51, 51, 51);" class=""><o:p class=""></o:p></span></div><div style="margin: 0in; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><o:p class=""> </o:p></div></div><span style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; float: none; display: inline !important;" class="">_______________________________________________</span><br style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;" class=""><span style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; 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