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Hi Hadi,<br>
<br>
I've been using dry, resin-based scrubbers provided by Jupiter
Scientific. They are relatively small, affordable, and easy to
operate/maintain.<br>
<br>
Cheers,<br>
<br>
Iulian<br>
<pre class="moz-signature" cols="72">iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
<a class="moz-txt-link-freetext" href="http://udnf.udel.edu">http://udnf.udel.edu</a></pre>
<div class="moz-cite-prefix">On 1/12/2023 2:35 PM, Hadi
Esmaeilsabzali wrote:<br>
</div>
<blockquote type="cite"
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Dear Colleagues,</div>
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<div style=""><span style="font-size: 11pt;">For those who run
PECVD at their facilities</span><span style="font-size:
11pt;">, I am wondering how you process the exhaust from
your systems. </span><br>
</div>
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<br>
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<div style="color: rgb(0, 0, 0); font-family: Calibri,
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We used to treat the PECVD exhaust along with that of the SiNx
tube furnace through a TPU. We have recently decommissioned
our furnace and TPU as they were too costly to run and are
looking at alternative exhaust options for the PECVD only. We
use our PECVD tool for oxide and nitride deposition, and it's
worth noting that it only uses silane (no ammonia).</div>
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</div>
<div style=""><span style="font-size: 11pt;">Some colleagues had
mentioned that they don't use a TPU/scrubber and send the
process waste to the building exhaust (untreated). Given
that our PECVD processes use a relatively small silane flow
(</span><span style="color: rgb(0, 0, 0); font-family:
Calibri, Helvetica, sans-serif, EmojiFont, "Apple Color
Emoji", "Segoe UI Emoji", NotoColorEmoji,
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EmojiSymbols; font-size: 11pt;">~30 sccm for up to 30 mins
per run each week - all max values) and it</span><span
style="font-size: 11pt;"> is significantly diluted, this
sounded a practical option.</span><span style="color: rgb(0,
0, 0); font-family: Calibri, Helvetica, sans-serif,
EmojiFont, "Apple Color Emoji", "Segoe UI
Emoji", NotoColorEmoji, "Segoe UI Symbol",
"Android Emoji", EmojiSymbols; font-size:
14.6667px;"> </span><span style="color: rgb(0, 0, 0);
font-family: Calibri, Helvetica, sans-serif, EmojiFont,
"Apple Color Emoji", "Segoe UI Emoji",
NotoColorEmoji, "Segoe UI Symbol", "Android
Emoji", EmojiSymbols; font-size: 11pt;">I am trying to
see if others have tried or can comment on this approach</span><span
style="font-size: 11pt;">,
</span>particularly<span style="font-size: 11pt;"> for a
silane-based PECVD </span><span style="font-size: 11pt;">process.
Aside from the
</span>flammability<span style="font-size: 11pt;"> concerns,
we are also aware of the potential oxide buildup in the
exhaust system over time. </span></div>
<div style=""><span style="font-size: 11pt;"><br>
</span></div>
<div style=""><span style="font-size: 11pt;"></span><span
style="font-size: 11pt;">I appreciate it if you share other
(</span><span>cost-effective</span>) suggestions you might
have for us! </div>
<div style="color: rgb(0, 0, 0); font-family: Calibri,
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<span style="font-size:11pt"><br>
</span></div>
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<span style="font-size:11pt">Thanks,</span></div>
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<span style="font-size:11pt">Hadi</span><br>
</div>
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<b><span
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font-size:11pt">Hadi Esmaeilsabzali, PhD</span></b></p>
<span style="font-family:Calibri,Helvetica,sans-serif"></span>
<p style="color:rgb(33,33,33)"><span
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Group Manager, 4D LABS</span></span></p>
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<p style="color:rgb(33,33,33)"><span
style="font-size:11pt;
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