<div dir="ltr"><div class="gmail_default" style="font-family:arial,sans-serif">Aju,</div><div class="gmail_default" style="font-family:arial,sans-serif"><br></div><div class="gmail_default" style="font-family:arial,sans-serif">good evening. Here at the University of Michigan /LNF, the only breathing air sensors we have are in spaces outside of the clean room. All other detection for HPM's is in the exhausted enclosures. Our experience is that we move too much air in the clean room to make local "air" sensors effective to detect a leak, and to give us useful information. Since all of our process tools are loadlocked, we typically don't need to worry about process gas exposure when cycling a tool, and we have a couple of hand held detectors (SPMFlex) we can use to spot sample chambers when we open them. In full disclosure, we have about 165 points of gas detection on our system. Some of them are Oxygen deprivation in our bulk LN2 users labs. We use a variety of extractive tape (Honeywell Vertex) and electrochemical (Honeywell Midas) sensors to protect the fab, and building.</div><div class="gmail_default" style="font-family:arial,sans-serif"><br></div><div class="gmail_default" style="font-family:arial,sans-serif">Please let me know if you have any additional questions,</div><div><div dir="ltr" class="gmail_signature" data-smartmail="gmail_signature"><div><span class="gmail_default" style="font-family:arial,sans-serif"><br></span></div><div><span class="gmail_default" style="font-family:arial,sans-serif"></span>Dennis<span class="gmail_default" style="font-family:arial,sans-serif"> Schweiger</span></div><div><span class="gmail_default" style="font-family:arial,sans-serif">Facilities Manager</span></div><div><span class="gmail_default" style="font-family:arial,sans-serif">University of Michigan/LNF</span></div><div> </div><div>734.647.2055 Ofc<br></div></div></div><br></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Fri, Jan 13, 2023 at 4:05 PM Aju Jugessur <<a href="mailto:Aju.Jugessur@colorado.edu">Aju.Jugessur@colorado.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex"><div class="msg86133020594736437">
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<p class="MsoNormal">Hi all,<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">We have ICP etcher and PECVD that use toxic gases such as Cl2, BCl3 and Silane. The exhausts from the pumps are connected to a scrubber and ph neutralization/acid waste system.<u></u><u></u></p>
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<p class="MsoNormal">I am reaching out to get some advice on the specific locations of the Honeywell Midas sensors that we use, to detect any gas leak at the etchers and toxic gas monitoring system. We have sensors at the gas cabinets and ambient sensors at
the tools.<u></u><u></u></p>
<p class="MsoNormal">However, there seems to be a disagreement between our design team and our EHS unit. The design team recommends having the sensors in the gas pods, where the leaks are most likely to occur. EHS would like to have the ambient sensors at the
tools, in the breathing zone areas. As per local code requirements, sensors in the gas pods satisfies the safety requirements.<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">I would like to know what your set-up of the sensor locations for similar instruments is that you may have in your facility.<u></u><u></u></p>
<p class="MsoNormal">Any insights based on experience will be super helpful.<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">Thanks so much,<u></u><u></u></p>
<p class="MsoNormal">Aju<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:Arial,sans-serif;color:black">Aju Jugessur Ph.D. IEEE Sr. Member<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:Arial,sans-serif;color:black">Director, Colorado Shared<b>
</b>Instrumentation <u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:Arial,sans-serif;color:black">in Nanofabrication and Characterization (COSINC) Facility<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:Arial,sans-serif;color:black">Member of Inclusive Culture Council (ICC)<u></u><u></u></span></p>
<p class="MsoNormal"><b><span style="font-size:10.5pt;font-family:Arial,sans-serif;color:rgb(31,73,125)">University of Colorado Boulder | </span></b><b><span style="font-size:10.5pt;font-family:Arial,sans-serif;color:rgb(179,156,17)">College of Engineering & Applied Science</span></b><span style="font-size:10.5pt;font-family:Arial,sans-serif;color:black"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:Arial,sans-serif;color:black">4001 Discovery Drive, N360G SEEC <b>|</b> Boulder, CO 80303<b>|</b> <b>P:</b> 303.735.5019<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:Arial,sans-serif;color:rgb(31,73,125)">E-mail: <a href="mailto:aju.jugessur@colorado.edu" target="_blank"><span style="color:rgb(149,79,114)">aju.jugessur@colorado.edu</span></a></span><span style="font-size:10.5pt;font-family:Arial,sans-serif;color:black"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:Arial,sans-serif;color:rgb(35,35,51);background:white">Personal Zoom link: <a href="https://cuboulder.zoom.us/my/ajugessur" title="https://cuboulder.zoom.us/my/ajugessur" target="_blank"><span style="color:rgb(5,99,193)">https://cuboulder.zoom.us/my/<b>ajugessur</b></span></a></span><span style="font-size:10.5pt;font-family:Arial,sans-serif;color:black"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:Arial,sans-serif;color:black"><a href="http://www.colorado.edu/facility/cosinc" target="_blank"><span style="color:rgb(5,99,193)">www.colorado.edu/facility/cosinc</span></a><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:Arial,sans-serif;color:black">(MBA candidate, CU, Class of 2023)<u></u><u></u></span></p>
<p class="MsoNormal" style="margin-bottom:12pt"><span style="font-size:12pt;color:black"> <u></u><u></u></span></p>
<p class="MsoNormal"><span style="color:black"><img border="0" width="150" height="56" style="width: 1.5625in; height: 0.5833in;" id="m_86133020594736437Picture_x0020_1" src="cid:185ad79db564cff311" alt="signature_804197951"></span><span style="font-size:12pt;color:black"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="color:rgb(31,73,125)"> </span><span style="font-size:12pt;color:black"><u></u><u></u></span></p>
<p class="MsoNormal"><b><span style="font-size:8.5pt;font-family:-webkit-standard;color:black">Signature-Strengths: Focus, Activator, Futuristic, Strategic, Achiever<br>
(CliftonStrengths)</span></b><span style="font-size:12pt;color:black"><u></u><u></u></span></p>
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