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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Times New Roman",serif;mso-fareast-language:EN-US">Hi Hadi and Joe,
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Times New Roman",serif;mso-fareast-language:EN-US">I am the Eastern Sales Engineer for Critical Systems Inc, and we partner with Jupiter Scientific.
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Times New Roman",serif;mso-fareast-language:EN-US">For PECVD processes with lower flow rates, we recommend a dry bed scrubber since it has the highest abatement efficiency of any technology (Thermal,
Wet, etc.) and typically the lowest cost of maintenance and utilities. We have worked with several universities, like Iulian at University of Delaware, and have extensive experiences with CVD and RIE applications.
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Times New Roman",serif;mso-fareast-language:EN-US">For a brief overview, I have attached the cutsheet for our Callisto Scrubber which is the most common system used by universities. I would be
happy to go over our options and discuss if any make sense for your facility. I am always available by phone or email if you have any questions.
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Times New Roman",serif;mso-fareast-language:EN-US">Mitchell Roselius<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Times New Roman",serif;mso-fareast-language:EN-US">Eastern Regional Sales Engineer<o:p></o:p></span></p>
<p class="MsoNormal"><i><span style="font-size:14.0pt;font-family:"Times New Roman",serif;mso-fareast-language:EN-US">Critical Systems, Inc.<o:p></o:p></span></i></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Times New Roman",serif;mso-fareast-language:EN-US">Phone: 713.542.5436<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Times New Roman",serif;mso-fareast-language:EN-US">Office: 877.572.5515<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Times New Roman",serif;mso-fareast-language:EN-US"><a href="http://www.criticalsystemsinc.com/"><span style="color:#0563C1">www.CriticalSystemsInc.com</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Times New Roman",serif;mso-fareast-language:EN-US"><img border="0" width="196" height="38" style="width:2.0416in;height:.4in" id="Picture_x0020_1" src="cid:image001.png@01D9272F.4C0B5EA0"><o:p></o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:14.0pt;font-family:"Times New Roman",serif;color:#2F5496;mso-fareast-language:EN-US">Note: 7 days per week technical support<o:p></o:p></span></b></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Times New Roman",serif;mso-fareast-language:EN-US">Phone: 1-888-218-6308<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Times New Roman",serif;mso-fareast-language:EN-US">Email: Fieldservices@criticalsystemsinc.com<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Joseph Losby<br>
<b>Sent:</b> Thursday, January 12, 2023 4:35 PM<br>
<b>To:</b> Hadi Esmaeilsabzali <hadi_esmaeilsabzali@sfu.ca>; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Treating silane exhaust from PECVD<o:p></o:p></span></p>
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<p class="MsoNormal"><span class="elementtoproof"><span style="font-family:"Calibri",sans-serif;color:black;background:white">Hi Hadi and everyone, I am interested in what abatement solutions others use as well. </span></span><span class="elementtoproof"><span style="font-family:"Calibri",sans-serif">We
are currently looking at Jupiter Callisto dry bed scrubber systems for our PECVD and ICP-RIE processes.</span></span><o:p></o:p></p>
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<p class="MsoNormal"><span class="elementtoproof"><span style="font-family:"Calibri",sans-serif;color:black;background:white">Cheers,</span></span><o:p></o:p></p>
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<p class="MsoNormal"><span class="elementtoproof"><span style="font-family:"Calibri",sans-serif;color:black;background:white">Joe</span></span><o:p></o:p></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black"> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>>
on behalf of Hadi Esmaeilsabzali <<a href="mailto:hadi_esmaeilsabzali@sfu.ca">hadi_esmaeilsabzali@sfu.ca</a>><br>
<b>Sent:</b> January 12, 2023 12:35 PM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a> <<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>><br>
<b>Subject:</b> [labnetwork] Treating silane exhaust from PECVD</span> <o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">Dear Colleagues,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt">For those who run PECVD at their facilities, I am wondering how you process the exhaust from your systems. </span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">We used to treat the PECVD exhaust along with that of the SiNx tube furnace through a TPU. We have recently decommissioned our furnace and TPU as they were too
costly to run and are looking at alternative exhaust options for the PECVD only. We use our PECVD tool for oxide and nitride deposition, and it's worth noting that it only uses silane (no ammonia).<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt">Some colleagues had mentioned that they don't use a TPU/scrubber and send the process waste to the building exhaust (untreated). Given that our PECVD processes use a relatively small silane flow (</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">~30
sccm for up to 30 mins per run each week - all max values) and it</span><span style="font-size:11.0pt"> is significantly diluted, this sounded a practical option.</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black"> I am trying
to see if others have tried or can comment on this approach</span><span style="font-size:11.0pt">,
</span>particularly<span style="font-size:11.0pt"> for a silane-based PECVD process. Aside from the
</span>flammability<span style="font-size:11.0pt"> concerns, we are also aware of the potential oxide buildup in the exhaust system over time. </span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt">I appreciate it if you share other (</span>cost-effective) suggestions you might have for us! <o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">Thanks,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">Hadi<o:p></o:p></span></p>
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<p><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#212121">Hadi Esmaeilsabzali, PhD</span></b><span style="font-size:11.5pt;font-family:wf_segoe-ui_normal;color:#212121"><o:p></o:p></span></p>
<p><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#212121">Nanofabrication Group Manager, 4D LABS<o:p></o:p></span></p>
<p><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#212121">Simon Fraser University<o:p></o:p></span></p>
<p><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#212121">8888 University Dr., Burnaby, B.C. V5A 1S6<br>
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