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Callisto dry bed scrubber for our Oxford PECVD system and are quite happy with it.</span></span></div>
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this helps!</span></span></div>
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<div><b>Sandra G. Malhotra, Ph.D. </b>| Technical Lab Manager
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<div>AggieFab Nanofabrication Facility</div>
<div><a href="https://aggiefab.tamu.edu/" title="https://aggiefab.tamu.edu/">https://aggiefab.tamu.edu/</a></div>
<div>Department of Electrical & Computer Engineering, College of Engineering | Texas A&M University</div>
<div>3253 TAMU | College Station, TX 77843</div>
<div>ph: 979.845.3199 | sandra.malhotra@tamu.edu</div>
<div>- - - - - - - - - - - - - - - - - - - - - - - - </div>
<span style="color: rgb(134, 17, 6);">TEXAS A&M UNIVERSITY | FEARLESS on Every Front</span><br>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Joseph Losby <joseph.losby@ucalgary.ca><br>
<b>Sent:</b> Thursday, January 12, 2023 3:35 PM<br>
<b>To:</b> Hadi Esmaeilsabzali <hadi_esmaeilsabzali@sfu.ca>; labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> Re: [labnetwork] Treating silane exhaust from PECVD</font>
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Hi Hadi and everyone, I am interested in what abatement solutions others use as well. We are currently looking at Jupiter Callisto dry bed scrubber systems for our PECVD and ICP-RIE processes. Cheers, Joe From: labnetwork <labnetwork-bounces@ mtl. mit. edu>
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<div><span class="x_elementToProof" style="font-family:Calibri,Arial,Helvetica,sans-serif; font-size:12pt; color:rgb(0,0,0); background-color:rgb(255,255,255)">Hi Hadi and everyone, I am interested in what abatement solutions others use as well. </span><span class="x_elementToProof" style="font-family:Calibri,Arial,Helvetica,sans-serif; font-size:12pt">We
are currently looking at Jupiter Callisto dry bed scrubber systems for our PECVD and ICP-RIE processes.</span></div>
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<div id="x_divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" color="#000000" style="font-size:11pt"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Hadi Esmaeilsabzali <hadi_esmaeilsabzali@sfu.ca><br>
<b>Sent:</b> January 12, 2023 12:35 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] Treating silane exhaust from PECVD</font>
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Dear Colleagues,</div>
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<div style=""><span style="font-size:11pt">For those who run PECVD at their facilities</span><span style="font-size:11pt">, I am wondering how you process the exhaust from your systems. </span><br>
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We used to treat the PECVD exhaust along with that of the SiNx tube furnace through a TPU. We have recently decommissioned our furnace and TPU as they were too costly to run and are looking at alternative exhaust options for the PECVD only. We use our PECVD tool
for oxide and nitride deposition, and it's worth noting that it only uses silane (no ammonia).</div>
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<div style=""><span style="font-size:11pt">Some colleagues had mentioned that they don't use a TPU/scrubber and send the process waste to the building exhaust (untreated). Given that our PECVD processes use a relatively small silane flow (</span><span style="color:rgb(0,0,0); font-family:Calibri,Helvetica,sans-serif,EmojiFont,"Apple Color Emoji","Segoe UI Emoji",NotoColorEmoji,"Segoe UI Symbol","Android Emoji",EmojiSymbols; font-size:11pt">~30
sccm for up to 30 mins per run each week - all max values) and it</span><span style="font-size:11pt"> is significantly diluted, this sounded a practical option.</span><span style="color:rgb(0,0,0); font-family:Calibri,Helvetica,sans-serif,EmojiFont,"Apple Color Emoji","Segoe UI Emoji",NotoColorEmoji,"Segoe UI Symbol","Android Emoji",EmojiSymbols; font-size:14.6667px"> </span><span style="color:rgb(0,0,0); font-family:Calibri,Helvetica,sans-serif,EmojiFont,"Apple Color Emoji","Segoe UI Emoji",NotoColorEmoji,"Segoe UI Symbol","Android Emoji",EmojiSymbols; font-size:11pt">I
am trying to see if others have tried or can comment on this approach</span><span style="font-size:11pt">,
</span>particularly<span style="font-size:11pt"> for a silane-based PECVD </span><span style="font-size:11pt">process. Aside from the
</span>flammability<span style="font-size:11pt"> concerns, we are also aware of the potential oxide buildup in the exhaust system over time. </span></div>
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</span></div>
<div style=""><span style="font-size:11pt"></span><span style="font-size:11pt">I appreciate it if you share other (</span><span>cost-effective</span>) suggestions you might have for us! </div>
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<span style="font-size:11pt">Thanks,</span></div>
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<span style="font-size:11pt">Hadi</span><br>
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<b><span style="font-family:Calibri,Helvetica,sans-serif; font-size:11pt">Hadi Esmaeilsabzali, PhD</span></b></p>
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<p style="color:rgb(33,33,33)"><span style="font-size:11pt; font-family:Calibri,Helvetica,sans-serif">Simon Fraser University</span><br>
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