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--></style></head><body lang="EN-US" link="#0563C1" vlink="#954F72" style="word-wrap:break-word"><div class="WordSection1"><p class="MsoNormal">At our site we have sensors in the exhaust duct of the gas cabinets as well as ambient. Our gas cabinets are in remote gas cabinet rooms. At the tool we have sensors in the exhaust of the gas boxes (where the MFCs are located) and system enclosures, and ambient sensors around the tools.</p><p class="MsoNormal">If your gas cabinets are in the service chase next to the tool it would just be one sensor in the “general” exhaust duct (serving the gas cabinet, gas box of MFCs, and system enclosure) and one ambient/area sensor. </p><p class="MsoNormal"> </p><div><p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><b><span style="font-size:18.0pt;font-family:"Ink Free",serif">Peder Lenvik</span></b></p><p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="font-size:12.0pt;font-family:"Eras Medium ITC",sans-serif"> </span></p><p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="font-size:12.0pt;font-family:"Eras Medium ITC",sans-serif">Sr. Facilities Lead</span></p><p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="font-size:12.0pt;font-family:"Eras Medium ITC",sans-serif"> </span></p><p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="font-size:12.0pt;font-family:"Eras Medium ITC",sans-serif">Electrical and Computer Engineering</span></p><p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="font-size:12.0pt;font-family:"Eras Medium ITC",sans-serif">E.S.B. Bldg. #225, Room 1109F</span></p><p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="font-size:12.0pt;font-family:"Eras Medium ITC",sans-serif">University California Santa Barbara, Santa Barbara, Ca. 93106</span></p><p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="font-size:12.0pt;font-family:"Eras Medium ITC",sans-serif"> </span></p><p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="font-size:12.0pt;font-family:"Eras Medium ITC",sans-serif">Cell: (805)698-7461</span></p><p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="font-size:12.0pt;font-family:"Eras Medium ITC",sans-serif"> </span></p><p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="font-size:12.0pt;font-family:"Eras Medium ITC",sans-serif"><a href="mailto:plenvik@ucsb.edu" target="_blank"><span style="color:blue">plenvik@ucsb.edu</span></a></span></p><p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="font-size:12.0pt;font-family:"Eras Medium ITC",sans-serif"> </span></p><p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="font-size:12.0pt;font-family:"Eras Medium ITC",sans-serif"><a href="http://www.nanotech.ucsb.edu/" target="_blank"><span style="color:blue">http://www.nanotech.ucsb.edu</span></a></span></p><p class="MsoNormal"> </p></div><p class="MsoNormal"> </p><div><div style="border:none;border-top:solid #e1e1e1 1.0pt;padding:3.0pt 0in 0in 0in"><p class="MsoNormal"><b>From:</b> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>> <b>On Behalf Of </b>Aju Jugessur<br><b>Sent:</b> Friday, January 13, 2023 9:48 AM<br><b>To:</b> Fab Network <<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>><br><b>Subject:</b> [labnetwork] Cl2, BCl3 and Silane sensors for toxic gas monitoring</p></div></div><p class="MsoNormal"> </p><p class="MsoNormal">Hi all,</p><p class="MsoNormal"> </p><p class="MsoNormal">We have ICP etcher and PECVD that use toxic gases such as Cl2, BCl3 and Silane. The exhausts from the pumps are connected to a scrubber and ph neutralization/acid waste system.</p><p class="MsoNormal"> </p><p class="MsoNormal">I am reaching out to get some advice on the specific locations of the Honeywell Midas sensors that we use, to detect any gas leak at the etchers and toxic gas monitoring system. We have sensors at the gas cabinets and ambient sensors at the tools.</p><p class="MsoNormal">However, there seems to be a disagreement between our design team and our EHS unit. The design team recommends having the sensors in the gas pods, where the leaks are most likely to occur. EHS would like to have the ambient sensors at the tools, in the breathing zone areas. As per local code requirements, sensors in the gas pods satisfies the safety requirements.</p><p class="MsoNormal"> </p><p class="MsoNormal">I would like to know what your set-up of the sensor locations for similar instruments is that you may have in your facility.</p><p class="MsoNormal">Any insights based on experience will be super helpful.</p><p class="MsoNormal"> </p><p class="MsoNormal">Thanks so much,</p><p class="MsoNormal">Aju</p><p class="MsoNormal"> </p><p class="MsoNormal"> </p><div><div><p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">Aju Jugessur Ph.D. IEEE Sr. Member</span></p><p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">Director, Colorado Shared<b> </b>Instrumentation </span></p><p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">in Nanofabrication and Characterization (COSINC) Facility</span></p><p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">Member of Inclusive Culture Council (ICC)</span></p><p class="MsoNormal"><b><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:#1f497d">University of Colorado Boulder | </span></b><b><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:#b39c11">College of Engineering & Applied Science</span></b><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black"></span></p><p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">4001 Discovery Drive, N360G SEEC <b>|</b> Boulder, CO 80303<b>|</b> <b>P:</b> 303.735.5019</span></p><p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:#1f497d">E-mail: <a href="mailto:aju.jugessur@colorado.edu"><span style="color:#954f72">aju.jugessur@colorado.edu</span></a></span><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black"></span></p><p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:#232333;background:white">Personal Zoom link: <a href="https://cuboulder.zoom.us/my/ajugessur" title="https://cuboulder.zoom.us/my/ajugessur">https://cuboulder.zoom.us/my/<b>ajugessur</b></a></span><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black"></span></p><p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black"><a href="http://www.colorado.edu/facility/cosinc">www.colorado.edu/facility/cosinc</a></span></p><p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">(MBA candidate, CU, Class of 2023)</span></p><p class="MsoNormal" style="margin-bottom:12.0pt"><span style="font-size:12.0pt;color:black"> </span></p><p class="MsoNormal"><span style="color:black"><img border="0" width="150" height="56" style="width:1.5666in;height:.5833in" id="Picture_x0020_1" src="cid:image001.png@01D9274F.C9528B70" alt="signature_804197951"></span><span style="font-size:12.0pt;color:black"></span></p><p class="MsoNormal"><span style="color:#1f497d"> </span><span style="font-size:12.0pt;color:black"></span></p><p class="MsoNormal"><b><span style="font-size:8.5pt;font-family:-webkit-standard;color:black">Signature-Strengths: Focus, Activator, Futuristic, Strategic, Achiever<br>(CliftonStrengths)</span></b><span style="font-size:12.0pt;color:black"></span></p><p class="MsoNormal"> </p></div></div><p class="MsoNormal"> </p></div></body></html>