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<p class="MsoNormal"><span style="color:#1F497D">All,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">According to SEMI S2 and S4, you should follow all Federal, State and Local requirements. Federal and state are typically the same requirements set by OSHA, NFPA and other applicable Federal entities. Local would
be your county, town, village and EHS departments. Don’t forget to consult with your insurance carrier as well.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Here at RIT, our toxic lines are all double wall with an N2 push from the tool end before entering into the tool gas box and pushes N2 back to the gas cabinet. Our gas cabinets (bottle and regulator area), tool
gas box (tool valves and distribution piping) and the operator area are all monitored. Except for the operator areas all sense lines are in the exhaust ducts of the appropriate areas.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Our Silane and Ammonia systems are a bit different because they go to a VMB (valve manifold box). The N2 push is set up there and pushes to the gas cabinet as well as to each tool. This also aids in determining
where leaks may be if a detection occurs.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">I understand this seems excessive and expensive but it is way cheaper than a law suit.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">I am not a lawyer nor up to date on all regulations or laws. This email is simply stating what I considered when deciding on what to do.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Have a great day.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">John C Nash<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">SMFL - Technician<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Rochester Institute of Technology<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Semiconductor & Microsystems Fabrication Laboratory<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">82 Lomb Memorial Dr. <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Bldg. 17-2627<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Rochester, NY 14623<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">585-626-8930 <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><a href="mailto:john.nash@rit.edu"><span style="color:blue">john.nash@rit.edu</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><a href="http://www.smfl.rit.edu/"><span style="color:blue">www.smfl.rit.edu</span></a><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> <b>
On Behalf Of </b>Aju Jugessur<br>
<b>Sent:</b> Friday, January 13, 2023 12:48 PM<br>
<b>To:</b> Fab Network <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] Cl2, BCl3 and Silane sensors for toxic gas monitoring<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Hi all,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We have ICP etcher and PECVD that use toxic gases such as Cl2, BCl3 and Silane. The exhausts from the pumps are connected to a scrubber and ph neutralization/acid waste system.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I am reaching out to get some advice on the specific locations of the Honeywell Midas sensors that we use, to detect any gas leak at the etchers and toxic gas monitoring system. We have sensors at the gas cabinets and ambient sensors at
the tools.<o:p></o:p></p>
<p class="MsoNormal">However, there seems to be a disagreement between our design team and our EHS unit. The design team recommends having the sensors in the gas pods, where the leaks are most likely to occur. EHS would like to have the ambient sensors at the
tools, in the breathing zone areas. As per local code requirements, sensors in the gas pods satisfies the safety requirements.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I would like to know what your set-up of the sensor locations for similar instruments is that you may have in your facility.<o:p></o:p></p>
<p class="MsoNormal">Any insights based on experience will be super helpful.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks so much,<o:p></o:p></p>
<p class="MsoNormal">Aju<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">Aju Jugessur Ph.D. IEEE Sr. Member<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">Director, Colorado Shared<b>
</b>Instrumentation <o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">in Nanofabrication and Characterization (COSINC) Facility<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">Member of Inclusive Culture Council (ICC)<o:p></o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:#1F497D">University of Colorado Boulder | </span></b><b><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:#B39C11">College of Engineering & Applied Science</span></b><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">4001 Discovery Drive, N360G SEEC <b>|</b> Boulder, CO 80303<b>|</b> <b>P:</b> 303.735.5019<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:#1F497D">E-mail: <a href="mailto:aju.jugessur@colorado.edu"><span style="color:#954F72">aju.jugessur@colorado.edu</span></a></span><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:#232333;background:white">Personal Zoom link: <a href="https://cuboulder.zoom.us/my/ajugessur" title="https://cuboulder.zoom.us/my/ajugessur">https://cuboulder.zoom.us/my/<b>ajugessur</b></a></span><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black"><a href="http://www.colorado.edu/facility/cosinc">www.colorado.edu/facility/cosinc</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">(MBA candidate, CU, Class of 2023)<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:12.0pt"><span style="font-size:12.0pt;color:black"> <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black"><img border="0" width="150" height="56" style="width:1.5625in;height:.5833in" id="Picture_x0020_1" src="cid:image001.png@01D92981.A55C7440" alt="signature_804197951"></span><span style="font-size:12.0pt;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"> </span><span style="font-size:12.0pt;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:8.5pt;font-family:-webkit-standard;color:black">Signature-Strengths: Focus, Activator, Futuristic, Strategic, Achiever<br>
(CliftonStrengths)</span></b><span style="font-size:12.0pt;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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