<html><head><meta http-equiv="Content-Type" content="text/html; charset=us-ascii"></head><body style="word-wrap: break-word; -webkit-nbsp-mode: space; line-break: after-white-space;" class="">Hadi,<div class=""><br class=""></div><div class="">I purchased a pyrolyzer from CVD systems for use with our CVD system. It is a very capable system and was never activated. We are considering selling it a 15% discount to our cost of $20K. Let me know if you are interested and I will send you the spec.<div class=""><br class=""></div><div class="">John<br class=""><div><br class=""><blockquote type="cite" class=""><div class="">On Jan 12, 2023, at 2:35 PM, Hadi Esmaeilsabzali <<a href="mailto:hadi_esmaeilsabzali@sfu.ca" class="">hadi_esmaeilsabzali@sfu.ca</a>> wrote:</div><br class="Apple-interchange-newline"><div class=""><meta charset="UTF-8" class=""><div id="divtagdefaultwrapper" dir="ltr" style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: 400; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;" class=""><p style="margin-top: 0px; margin-bottom: 0px; font-family: Calibri, Helvetica, sans-serif, EmojiFont, "Apple Color Emoji", "Segoe UI Emoji", NotoColorEmoji, "Segoe UI Symbol", "Android Emoji", EmojiSymbols; font-size: 11pt;" class=""></p><div style="font-family: Calibri, Helvetica, sans-serif, EmojiFont, "Apple Color Emoji", "Segoe UI Emoji", NotoColorEmoji, "Segoe UI Symbol", "Android Emoji", EmojiSymbols; font-size: 11pt;" class="">Dear Colleagues,</div><div style="font-family: Calibri, Helvetica, sans-serif, EmojiFont, "Apple Color Emoji", "Segoe UI Emoji", NotoColorEmoji, "Segoe UI Symbol", "Android Emoji", EmojiSymbols; font-size: 11pt;" class=""><br class=""></div><div class=""><span style="font-size: 11pt;" class="">For those who run PECVD at their facilities</span><span style="font-size: 11pt;" class="">, I am wondering how you process the exhaust from your systems. </span><br class=""></div><div style="font-family: Calibri, Helvetica, sans-serif, EmojiFont, "Apple Color Emoji", "Segoe UI Emoji", NotoColorEmoji, "Segoe UI Symbol", "Android Emoji", EmojiSymbols; font-size: 11pt;" class=""><br class=""></div><div style="font-family: Calibri, Helvetica, sans-serif, EmojiFont, "Apple Color Emoji", "Segoe UI Emoji", NotoColorEmoji, "Segoe UI Symbol", "Android Emoji", EmojiSymbols; font-size: 11pt;" class="">We used to treat the PECVD exhaust along with that of the SiNx tube furnace through a TPU. We have recently decommissioned our furnace and TPU as they were too costly to run and are looking at alternative exhaust options for the PECVD only. We use our PECVD tool for oxide and nitride deposition, and it's worth noting that it only uses silane (no ammonia).</div><div style="font-family: Calibri, Helvetica, sans-serif, EmojiFont, "Apple Color Emoji", "Segoe UI Emoji", NotoColorEmoji, "Segoe UI Symbol", "Android Emoji", EmojiSymbols; font-size: 11pt;" class=""><br class=""></div><div class=""><span style="font-size: 11pt;" class="">Some colleagues had mentioned that they don't use a TPU/scrubber and send the process waste to the building exhaust (untreated). Given that our PECVD processes use a relatively small silane flow (</span><span style="font-family: Calibri, Helvetica, sans-serif, EmojiFont, "Apple Color Emoji", "Segoe UI Emoji", NotoColorEmoji, "Segoe UI Symbol", "Android Emoji", EmojiSymbols; font-size: 11pt;" class="">~30 sccm for up to 30 mins per run each week - all max values) and it</span><span style="font-size: 11pt;" class=""> is significantly diluted, this sounded a practical option.</span><span style="font-family: Calibri, Helvetica, sans-serif, EmojiFont, "Apple Color Emoji", "Segoe UI Emoji", NotoColorEmoji, "Segoe UI Symbol", "Android Emoji", EmojiSymbols; font-size: 14.6667px;" class=""> </span><span style="font-family: Calibri, Helvetica, sans-serif, EmojiFont, "Apple Color Emoji", "Segoe UI Emoji", NotoColorEmoji, "Segoe UI Symbol", "Android Emoji", EmojiSymbols; font-size: 11pt;" class="">I am trying to see if others have tried or can comment on this approach</span><span style="font-size: 11pt;" class="">,<span class="Apple-converted-space"> </span></span>particularly<span style="font-size: 11pt;" class=""> for a silane-based PECVD </span><span style="font-size: 11pt;" class="">process. Aside from the</span>flammability<span style="font-size: 11pt;" class=""> concerns, we are also aware of the potential oxide buildup in the exhaust system over time. </span></div><div class=""><span style="font-size: 11pt;" class=""><br class=""></span></div><div class=""><span style="font-size: 11pt;" class=""></span><span style="font-size: 11pt;" class="">I appreciate it if you share other (</span><span class="">cost-effective</span>) suggestions you might have for us! </div><div style="font-family: Calibri, Helvetica, sans-serif, EmojiFont, "Apple Color Emoji", "Segoe UI Emoji", NotoColorEmoji, "Segoe UI Symbol", "Android Emoji", EmojiSymbols; font-size: 11pt;" class=""><span style="font-size: 11pt;" class=""><br class=""></span></div><div style="font-family: Calibri, Helvetica, sans-serif, EmojiFont, "Apple Color Emoji", "Segoe UI Emoji", NotoColorEmoji, "Segoe UI Symbol", "Android Emoji", EmojiSymbols; font-size: 11pt;" class=""><span style="font-size: 11pt;" class="">Thanks,</span></div><div style="font-family: Calibri, Helvetica, sans-serif, EmojiFont, "Apple Color Emoji", "Segoe UI Emoji", NotoColorEmoji, "Segoe UI Symbol", "Android Emoji", EmojiSymbols; font-size: 11pt;" class=""><span style="font-size: 11pt;" class="">Hadi</span><br class=""></div><div style="font-family: Calibri, Helvetica, sans-serif, EmojiFont, "Apple Color Emoji", "Segoe UI Emoji", NotoColorEmoji, "Segoe UI Symbol", "Android Emoji", EmojiSymbols; font-size: 11pt;" class=""><br class=""></div><div id="Signature" style="font-family: Calibri, Helvetica, sans-serif, EmojiFont, "Apple Color Emoji", "Segoe UI Emoji", NotoColorEmoji, "Segoe UI Symbol", "Android Emoji", EmojiSymbols; font-size: 11pt;" class=""><div id="divtagdefaultwrapper" dir="ltr" style="" class=""><div id="divtagdefaultwrapper" dir="ltr" style="" class=""><div id="divtagdefaultwrapper" dir="ltr" style="" class=""><p style="margin-top: 0px; margin-bottom: 0px; font-family: Calibri, Helvetica, sans-serif; font-size: 12pt;" class=""></p><div class=""><div style="margin-top: 0px; margin-bottom: 0px; font-family: wf_segoe-ui_normal, "Segoe UI", "Segoe WP", Tahoma, Arial, sans-serif, serif, EmojiFont; font-size: 15px; color: rgb(33, 33, 33);" class=""><b class=""><span style="font-family: Calibri, Helvetica, sans-serif; font-size: 11pt;" class="">Hadi Esmaeilsabzali, PhD</span></b></div><span style="font-family: Calibri, Helvetica, sans-serif;" class=""></span><div style="margin-top: 0px; margin-bottom: 0px; color: rgb(33, 33, 33);" class=""><span style="font-family: Calibri, Helvetica, sans-serif; font-size: 11pt;" class=""></span><span style="font-family: Arial, Helvetica, sans-serif, serif, EmojiFont; font-size: 10pt;" class=""><span style="font-size: 11pt; font-family: Calibri, Helvetica, sans-serif;" class="">Nanofabrication Group Manager, 4D LABS</span></span></div><span style="font-family: Calibri, Helvetica, sans-serif;" class=""></span><div style="margin-top: 0px; margin-bottom: 0px; color: rgb(33, 33, 33);" class=""><span style="font-size: 11pt; font-family: Calibri, Helvetica, sans-serif;" class="">Simon Fraser University</span><br class=""><span style="font-family: Calibri, Helvetica, sans-serif;" class=""></span></div><span style="font-family: Calibri, Helvetica, sans-serif;" class=""></span><div style="margin-top: 0px; margin-bottom: 0px; color: rgb(33, 33, 33);" class=""><span style="font-family: Calibri, Helvetica, sans-serif; font-size: 11pt;" class=""></span><span style="font-family: Corbel, Skia, sans-serif; font-size: 10pt;" class=""></span><span style="font-family: "Segoe UI", "Helvetica Neue", sans-serif; font-size: 9pt;" class=""></span><span style="font-family: Calibri, Helvetica, sans-serif; font-size: 11pt;" class=""></span><span style="font-family: Arial, Helvetica, sans-serif, serif, EmojiFont; font-size: 10pt;" class=""></span><span style="font-family: Arial, Helvetica, sans-serif, serif, EmojiFont; font-size: 10pt;" class=""></span><span style="font-family: Calibri, Helvetica, sans-serif; font-size: 11pt;" class="">8888 University Dr., Burnaby, B.C. 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