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Hi Aju,<br>
<br>
At UD I have gas sensors in the exhaust of gas cabinets, valve
manifold boxes, and tool MFC boxes as well as ambient sensors in the
areas where the operators are present (but no ambient sensors in the
chases). Toxic and flammable gases are transported via double wall
tubing.<br>
<br>
Cheers,<br>
<br>
Iulian<br>
<br>
<br>
<pre class="moz-signature" cols="72">iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
<a class="moz-txt-link-freetext" href="http://udnf.udel.edu">http://udnf.udel.edu</a></pre>
<div class="moz-cite-prefix">On 1/13/2023 12:48 PM, Aju Jugessur
wrote:<br>
</div>
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cite="mid:CY4PR03MB3189D186F282AC914C3478C3FDC29@CY4PR03MB3189.namprd03.prod.outlook.com">
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<p class="MsoNormal">Hi all,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We have ICP etcher and PECVD that use toxic
gases such as Cl2, BCl3 and Silane. The exhausts from the
pumps are connected to a scrubber and ph neutralization/acid
waste system.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I am reaching out to get some advice on the
specific locations of the Honeywell Midas sensors that we use,
to detect any gas leak at the etchers and toxic gas monitoring
system. We have sensors at the gas cabinets and ambient
sensors at the tools.<o:p></o:p></p>
<p class="MsoNormal">However, there seems to be a disagreement
between our design team and our EHS unit. The design team
recommends having the sensors in the gas pods, where the leaks
are most likely to occur. EHS would like to have the ambient
sensors at the tools, in the breathing zone areas. As per
local code requirements, sensors in the gas pods satisfies the
safety requirements.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I would like to know what your set-up of
the sensor locations for similar instruments is that you may
have in your facility.<o:p></o:p></p>
<p class="MsoNormal">Any insights based on experience will be
super helpful.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks so much,<o:p></o:p></p>
<p class="MsoNormal">Aju<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<div>
<p class="MsoNormal"><span
style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">Aju
Jugessur Ph.D. IEEE Sr. Member<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">Director,
Colorado Shared<b>
</b>Instrumentation <o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">in
Nanofabrication and Characterization (COSINC) Facility<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">Member
of Inclusive Culture Council (ICC)<o:p></o:p></span></p>
<p class="MsoNormal"><b><span
style="font-size:10.5pt;font-family:"Arial",sans-serif;color:#1F497D">University
of Colorado Boulder | </span></b><b><span
style="font-size:10.5pt;font-family:"Arial",sans-serif;color:#B39C11">College
of Engineering & Applied Science</span></b><span
style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">4001
Discovery Drive, N360G SEEC <b>|</b> Boulder, CO 80303<b>|</b> <b>P:</b> 303.735.5019<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size:10.5pt;font-family:"Arial",sans-serif;color:#1F497D">E-mail: <a
href="mailto:aju.jugessur@colorado.edu"
moz-do-not-send="true"><span style="color:#954F72">aju.jugessur@colorado.edu</span></a></span><span
style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size:10.5pt;font-family:"Arial",sans-serif;color:#232333;background:white">Personal
Zoom link: <a
href="https://cuboulder.zoom.us/my/ajugessur"
title="https://cuboulder.zoom.us/my/ajugessur"
moz-do-not-send="true"><span style="color:#0563C1">https://cuboulder.zoom.us/my/<b>ajugessur</b></span></a></span><span
style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black"><a
href="http://www.colorado.edu/facility/cosinc"
moz-do-not-send="true"><span style="color:#0563C1">www.colorado.edu/facility/cosinc</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">(MBA
candidate, CU, Class of 2023)<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:12.0pt"><span
style="font-size:12.0pt;color:black"> <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black"><img
style="width:1.5625in;height:.5833in"
id="Picture_x0020_1"
src="cid:part1.OBBlnCfA.QDE6L0Ca@udel.edu"
alt="signature_804197951" class="" width="150"
height="56" border="0"></span><span
style="font-size:12.0pt;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"> </span><span
style="font-size:12.0pt;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><b><span
style="font-size:8.5pt;font-family:-webkit-standard;color:black">Signature-Strengths:
Focus, Activator, Futuristic, Strategic, Achiever<br>
(CliftonStrengths)</span></b><span
style="font-size:12.0pt;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<br>
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