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<p class="MsoNormal">Hi Aju<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We have sensors in the following locations:<o:p></o:p></p>
<ol style="margin-top:0cm" start="1" type="1">
<li class="MsoListParagraph" style="margin-left:0cm;mso-list:l0 level1 lfo1">Gas cabinets<o:p></o:p></li><li class="MsoListParagraph" style="margin-left:0cm;mso-list:l0 level1 lfo1">In the machine's gas boxes.<o:p></o:p></li><li class="MsoListParagraph" style="margin-left:0cm;mso-list:l0 level1 lfo1">By the connection of the pump exhaust to the exhaust pipeline.
<o:p></o:p></li></ol>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="color:#1F497D">Best regards<o:p></o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:14.0pt;color:#1F497D">Assaf Hazzan
<o:p></o:p></span></b></p>
<p class="MsoNormal"><span style="color:#1F497D">Nanofabrication Center Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Department of Chemical Research Support<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Weizmann Institute of Science.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Email: <a href="mailto:assaf.hazzan@weizmann.ac.il">
<span style="color:blue">assaf.hazzan@weizmann.ac.il</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Site: <a href="http://www.weizmann.ac.il/ChemicalResearchSupport/nanofabrication/about-the-service">
<span style="color:blue">Weizmann Nano Fabrication</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Phone: +972-8-9345175 Cell: +972-52-8679129 Fax: +972-8-9346069<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Office: Perlman Chemical Sciences Building, Room 20 (-1 floor)
<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> <b>
On Behalf Of </b>Aju Jugessur<br>
<b>Sent:</b> Friday, January 13, 2023 7:48 PM<br>
<b>To:</b> Fab Network <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] Cl2, BCl3 and Silane sensors for toxic gas monitoring<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Hi all,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We have ICP etcher and PECVD that use toxic gases such as Cl2, BCl3 and Silane. The exhausts from the pumps are connected to a scrubber and ph neutralization/acid waste system.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I am reaching out to get some advice on the specific locations of the Honeywell Midas sensors that we use, to detect any gas leak at the etchers and toxic gas monitoring system. We have sensors at the gas cabinets and ambient sensors at
the tools.<o:p></o:p></p>
<p class="MsoNormal">However, there seems to be a disagreement between our design team and our EHS unit. The design team recommends having the sensors in the gas pods, where the leaks are most likely to occur. EHS would like to have the ambient sensors at the
tools, in the breathing zone areas. As per local code requirements, sensors in the gas pods satisfies the safety requirements.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I would like to know what your set-up of the sensor locations for similar instruments is that you may have in your facility.<o:p></o:p></p>
<p class="MsoNormal">Any insights based on experience will be super helpful.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks so much,<o:p></o:p></p>
<p class="MsoNormal">Aju<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">Aju Jugessur Ph.D. IEEE Sr. Member<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">Director, Colorado Shared<b>
</b>Instrumentation <o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">in Nanofabrication and Characterization (COSINC) Facility<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">Member of Inclusive Culture Council (ICC)<o:p></o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:#1F497D">University of Colorado Boulder | </span></b><b><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:#B39C11">College of Engineering & Applied Science</span></b><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">4001 Discovery Drive, N360G SEEC <b>|</b> Boulder, CO 80303<b>|</b> <b>P:</b> 303.735.5019<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:#1F497D">E-mail: <a href="mailto:aju.jugessur@colorado.edu"><span style="color:#954F72">aju.jugessur@colorado.edu</span></a></span><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:#232333;background:white">Personal Zoom link: <a href="https://cuboulder.zoom.us/my/ajugessur" title="https://cuboulder.zoom.us/my/ajugessur">https://cuboulder.zoom.us/my/<b>ajugessur</b></a></span><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black"><a href="http://www.colorado.edu/facility/cosinc">www.colorado.edu/facility/cosinc</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">(MBA candidate, CU, Class of 2023)<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:12.0pt"><span style="font-size:12.0pt;color:black"> <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black"><img border="0" width="150" height="56" style="width:1.5625in;height:.5833in" id="Picture_x0020_1" src="cid:image001.png@01D92B32.8935E4B0" alt="signature_804197951"></span><span style="font-size:12.0pt;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"> </span><span style="font-size:12.0pt;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:8.5pt;font-family:-webkit-standard;color:black">Signature-Strengths: Focus, Activator, Futuristic, Strategic, Achiever<br>
(CliftonStrengths)</span></b><span style="font-size:12.0pt;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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