<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40">
<head>
<meta http-equiv="Content-Type" content="text/html; charset=us-ascii">
<meta name="Generator" content="Microsoft Word 15 (filtered medium)">
<!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:-webkit-standard;
panose-1:2 11 6 4 2 2 2 2 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
font-size:10.0pt;
font-family:"Calibri",sans-serif;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:#0563C1;
text-decoration:underline;}
span.EmailStyle19
{mso-style-type:personal-reply;
font-family:"Calibri",sans-serif;
color:windowtext;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
<body lang="EN-US" link="#0563C1" vlink="#954F72" style="word-wrap:break-word">
<div class="WordSection1">
<p class="MsoNormal"><span style="font-size:11.0pt">Hi all,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Thank you all for your responses on this matter.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">I have taken notes of your suggestions and will follow up with individuals.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Thanks so much,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Aju<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<div>
<div>
<div>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">Aju Jugessur Ph.D. IEEE Sr. Member<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">Director, Colorado Shared<b>
</b>Instrumentation <o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">in Nanofabrication and Characterization (COSINC) Facility<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">Member of Inclusive Culture Council (ICC)<o:p></o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:#1F497D">University of Colorado Boulder | </span></b><b><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:#B39C11">College of Engineering & Applied Science</span></b><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">4001 Discovery Drive, N360G SEEC <b>|</b> Boulder, CO 80303<b>|</b> <b>P:</b> 303.735.5019<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:#1F497D">E-mail: <a href="mailto:aju.jugessur@colorado.edu"><span style="color:#954F72">aju.jugessur@colorado.edu</span></a></span><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:#232333;background:white">Personal Zoom link: <a href="https://cuboulder.zoom.us/my/ajugessur" title="https://cuboulder.zoom.us/my/ajugessur">https://cuboulder.zoom.us/my/<b>ajugessur</b></a></span><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black"><a href="http://www.colorado.edu/facility/cosinc">www.colorado.edu/facility/cosinc</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">(MBA candidate, CU, Class of 2023)<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:12.0pt"><span style="font-size:12.0pt;color:black"> <o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:black"><img border="0" width="150" height="56" style="width:1.5625in;height:.5833in" id="_x0000_i1026" src="cid:image002.png@01D92B3A.C942DC40" alt="signature_804197951"></span><span style="font-size:12.0pt;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#1F497D"> </span><span style="font-size:12.0pt;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:8.5pt;font-family:-webkit-standard;color:black">Signature-Strengths: Focus, Activator, Futuristic, Strategic, Achiever<br>
(CliftonStrengths)</span></b><span style="font-size:12.0pt;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
</div>
</div>
</div>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<div style="border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal" style="margin-bottom:12.0pt"><b><span style="font-size:12.0pt;color:black">From:
</span></b><span style="font-size:12.0pt;color:black">Aju Jugessur <Aju.Jugessur@Colorado.EDU><br>
<b>Date: </b>Friday, January 13, 2023 at 10:48 AM<br>
<b>To: </b>Fab Network <labnetwork@mtl.mit.edu><br>
<b>Subject: </b>Cl2, BCl3 and Silane sensors for toxic gas monitoring<o:p></o:p></span></p>
</div>
<p class="MsoNormal"><span style="font-size:11.0pt">Hi all,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"> <o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">We have ICP etcher and PECVD that use toxic gases such as Cl2, BCl3 and Silane. The exhausts from the pumps are connected to a scrubber and ph neutralization/acid waste system.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"> <o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">I am reaching out to get some advice on the specific locations of the Honeywell Midas sensors that we use, to detect any gas leak at the etchers and toxic gas monitoring system. We have sensors at the gas
cabinets and ambient sensors at the tools.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">However, there seems to be a disagreement between our design team and our EHS unit. The design team recommends having the sensors in the gas pods, where the leaks are most likely to occur. EHS would like to
have the ambient sensors at the tools, in the breathing zone areas. As per local code requirements, sensors in the gas pods satisfies the safety requirements.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"> <o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">I would like to know what your set-up of the sensor locations for similar instruments is that you may have in your facility.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Any insights based on experience will be super helpful.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"> <o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Thanks so much,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Aju<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"> <o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"> <o:p></o:p></span></p>
<div>
<div>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">Aju Jugessur Ph.D. IEEE Sr. Member</span><span style="font-size:11.0pt"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">Director, Colorado Shared<b>
</b>Instrumentation </span><span style="font-size:11.0pt"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">in Nanofabrication and Characterization (COSINC) Facility</span><span style="font-size:11.0pt"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">Member of Inclusive Culture Council (ICC)</span><span style="font-size:11.0pt"><o:p></o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:#1F497D">University of Colorado Boulder | </span></b><b><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:#B39C11">College of Engineering & Applied Science</span></b><span style="font-size:11.0pt"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">4001 Discovery Drive, N360G SEEC <b>|</b> Boulder, CO 80303<b>|</b> <b>P:</b> 303.735.5019</span><span style="font-size:11.0pt"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:#1F497D">E-mail: <a href="mailto:aju.jugessur@colorado.edu"><span style="color:#954F72">aju.jugessur@colorado.edu</span></a></span><span style="font-size:11.0pt"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:#232333;background:white">Personal Zoom link: <a href="https://cuboulder.zoom.us/my/ajugessur" title="https://cuboulder.zoom.us/my/ajugessur">https://cuboulder.zoom.us/my/<b>ajugessur</b></a></span><span style="font-size:11.0pt"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black"><a href="http://www.colorado.edu/facility/cosinc">www.colorado.edu/facility/cosinc</a></span><span style="font-size:11.0pt"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Arial",sans-serif;color:black">(MBA candidate, CU, Class of 2023)</span><span style="font-size:11.0pt"><o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:12.0pt"><span style="font-size:12.0pt;color:black"> </span><span style="font-size:11.0pt"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:black"><img border="0" width="150" height="56" style="width:1.5625in;height:.5833in" id="Picture_x0020_1" src="cid:image001.png@01D9273A.C168AF30" alt="signature_804197951"></span><span style="font-size:11.0pt"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#1F497D"> </span><span style="font-size:11.0pt"><o:p></o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:8.5pt;font-family:-webkit-standard;color:black">Signature-Strengths: Focus, Activator, Futuristic, Strategic, Achiever<br>
(CliftonStrengths)</span></b><span style="font-size:11.0pt"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"> <o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><span style="font-size:11.0pt"> <o:p></o:p></span></p>
</div>
</body>
</html>