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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Hi Ningzhi,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Few years ago, I saw a presentation about laser induced deep etching (LIDE). You might want to have a look at this.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><a href="https://www.youtube.com/watch?v=wJUU82osyDU">https://www.youtube.com/watch?v=wJUU82osyDU</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Best,<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Lucida Calligraphy";color:#1F497D"><o:p> </o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Lucida Calligraphy";color:#1F497D">Lino Eugene, P.Eng., Ph.D.,<o:p></o:p></span></b></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Micro/nanofabrication process engineer<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Quantum-Nano Fabrication and Characterization Facility<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Office of Research<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">QNC 1611<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:#1F497D">University of Waterloo<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:#1F497D">200 University Avenue West<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:#1F497D">Waterloo, ON, Canada <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:#1F497D">N2L 3G1</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:#1F497D">Ph: +1 519-888-4567 #37788<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Cell: +1 226-929-1685</span><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:#1F497D">Websites:<o:p></o:p></span></p>
<p class="MsoNormal"><a href="https://uwaterloo.ca/quantum-nano-fabrication-and-characterization-facility/"><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:#0563C1">https://uwaterloo.ca/quantum-nano-fabrication-and-characterization-facility/</span></a><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><a href="https://fab.qnc.uwaterloo.ca/"><span lang="EN-US" style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:#0563C1">https://fab.qnc.uwaterloo.ca/</span></a><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Beall, James A. (Fed)<br>
<b>Sent:</b> January 18, 2023 8:27 PM<br>
<b>To:</b> Ningzhi Xie <nzxie@uw.edu>; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Deep anisotropic etching of SiO2<o:p></o:p></span></p>
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<p class="MsoNormal">Very deep indeed. <o:p></o:p></p>
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<p class="MsoNormal">You would need a thick metal mask (Al or Ni) to do that (my experience with a PlasmaTherm ICP etch tool).<o:p></o:p></p>
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<p class="MsoNormal">Perhaps laser cutting or ultrasonic? Or just a dicing saw.<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Jim Beall<o:p></o:p></p>
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<p class="MsoNormal">NIST Boulder Microfab<o:p></o:p></p>
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<o:p></o:p></p>
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<p class="MsoNormal">On Jan 18, 2023, at 5:05 PM, Howard Northfield <<a href="mailto:Howard.Northfield@uottawa.ca">Howard.Northfield@uottawa.ca</a>> wrote:<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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That's a very deep etch.</span><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span class="contentpasted1"><span style="font-family:"Calibri",sans-serif;background:white">Regarding dry etching:</span></span><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;background:white">I have recently done etch tests on PEVCD SiO2 with a SAMCO 10NR RIE:</span><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span class="contentpasted0"><span style="font-family:"Calibri",sans-serif;background:white">- 50W, 80sccm CF4, 16sccm O2, 3.0Pa: ~21nm/min
</span></span><span class="contentpasted0"><span style="font-family:"Calibri",sans-serif;background:white"><o:p></o:p></span></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;background:white">- 25W, 25sccm SF6, 10sccm O2, 3.0Pa: ~7nm/min<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;background:white">- 50W, 25sccm SF6, 10sccm O2, 3.0Pa: ~19nm/min<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;background:white"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span class="contentpasted0"><span style="font-family:"Calibri",sans-serif;background:white">... yes for 500um that would be around a 417 hour etch .... not feasible/realistic.</span></span><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span class="contentpasted0"><span style="font-family:"Calibri",sans-serif;background:white">So you can probably rule out these etch recipes.</span></span><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span class="contentpasted0"><span style="font-family:"Calibri",sans-serif;background:white">Regarding wet etching, generally I find it very hard to control and mask under-cut is significant.</span></span><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span class="contentpasted0"><span style="font-family:"Calibri",sans-serif;background:white">Howard Northfield
</span></span><span class="contentpasted0"><span style="font-family:"Calibri",sans-serif;background:white"><o:p></o:p></span></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;background:white">Research Associate</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif;background:white">Advanced Research Complex (ARC)<o:p></o:p></span></p>
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<p class="MsoNormal"><span class="contentpasted0"><span style="font-family:"Calibri",sans-serif;background:white">University of Ottawa</span></span><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span class="apple-converted-space"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> </span></span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">labnetwork
<</span><a href="mailto:labnetwork-bounces@mtl.mit.edu"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">labnetwork-bounces@mtl.mit.edu</span></a><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">> on behalf of Ningzhi Xie <</span><a href="mailto:nzxie@uw.edu"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">nzxie@uw.edu</span></a><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">><br>
<b>Sent:</b><span class="apple-converted-space"> </span>Wednesday, January 18, 2023 4:23 PM<br>
<b>To:</b><span class="apple-converted-space"> </span></span><a href="mailto:labnetwork@mtl.mit.edu"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">labnetwork@mtl.mit.edu</span></a><span class="apple-converted-space"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> </span></span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><</span><a href="mailto:labnetwork@mtl.mit.edu"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">labnetwork@mtl.mit.edu</span></a><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">><br>
<b>Subject:</b><span class="apple-converted-space"> </span>[labnetwork] Deep anisotropic etching of SiO2</span><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif">
<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif"> <o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:9.0pt;font-family:"Calibri",sans-serif;color:#FF4233">Attention : courriel externe | external email</span></b><span style="font-size:9.0pt;font-family:"Calibri",sans-serif;color:#FF4233"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif"> Dear college,
<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif">We want to perform a highly anisotropic, very deep (~500um) etching of SiO2 with a vertical side wall. On top of the SiO2 is nanostructures protected by photoresist. The
etch depth needs to be controlled with a precision of 20% (we are thinking of using another material as the substrate underneath the SiO2 layer, which acts as an etch-stopper). The structure and dimensions are shown in the attached image. It would be very
helpful if anyone has any idea of this kind of etching (either dry and wet chemical etch is fine).<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif">Thank you very much.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif">Best regards,
<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif">Ningzhi Xie<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif">Department of Electrical and Computer Engineering<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif">University of Washington<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif">_______________________________________________<br>
labnetwork mailing list<br>
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</span><a href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork"><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</span></a><o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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