<div dir="ltr">
<div>Mario Beaudoin,</div><div>I'm surprised there is even a monitoring requirement for diethylsilane (DES) and wonder how it is being defined. <br></div><div>MSD sheets don't list a LFL and most don't even have vapor pressure data. Gelest at least has BP<br></div><div>I understand DES is flammable but I think few of us are monitoring all our flammable gases.</div><div>I know I'm not monitoring my methane at home - but I recognize that's why we add mercaptan.</div><div>All that aside, monitoring is good - so back to your sensor<br></div><div><br></div><div>I expect the company is just offering you a general hydride sensor.</div><div>I would ask them to confirm that they even have it calibrated to DES - and how they do it.<br></div><div>Then you can ask them for the cross reactivity to silane - <br></div><div>and just use anyone else's reasonably priced silane sensor.</div><div>For a flammable gas, I would not consider carefully calibrated detection to ppm necessary.</div><div>I think you and your authority having jurisdiction (AHJ) just want to know if you have a leak or not.</div><div><br></div><div>Bill Flounders</div><div>UC Berkeley</div>
</div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Fri, Jan 20, 2023 at 4:45 PM Beaudoin, Mario <<a href="mailto:beaudoin@physics.ubc.ca">beaudoin@physics.ubc.ca</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex">
<div>
<p>Hello All,</p>
<p>We use DES (diethylsilane) as our silicon precursor in our Trion
PECVD system. The company we deal with for sensors is asking
10K$ for a sensor that will need to recalibrated yearly and
replaced after 2 years. Quite steep in our opinion. As our DES
cylinder spends roughly 95% of the time closed, I'd like to find a
less expensive option. For example, even a handheld unit that I
would only use when DES is in use. <br>
</p>
<p>Thanks all,</p>
<p>Mario<br>
</p>
<div>-- <br>
<img src="cid:185d21be478e549de571" border="0"></div>
</div>
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