<div dir="ltr"><div class="gmail_default" style="font-size:small"><p class="gmail-MsoPlainText" style="margin:0in;font-size:11pt;font-family:Calibri,sans-serif">Dear all,</p><p class="gmail-MsoPlainText" style="margin:0in;font-size:11pt;font-family:Calibri,sans-serif"><br></p><p class="gmail-MsoPlainText" style="margin:0in;font-size:11pt;font-family:Calibri,sans-serif">We are having trouble getting PlasmaTherm to respond to our questions and service quote. Wanted to ask if you know of any third party companies that work on
PlasmaTherm systems, specifically their DRIE tool?</p><p class="gmail-MsoPlainText" style="margin:0in;font-size:11pt;font-family:Calibri,sans-serif"><br></p><p class="gmail-MsoPlainText" style="margin:0in;font-size:11pt;font-family:Calibri,sans-serif">Thanks for any suggestions!</p><p class="gmail-MsoPlainText" style="margin:0in;font-size:11pt;font-family:Calibri,sans-serif"><br></p><p class="MsoNormal" style="background-image:initial;background-position:initial;background-size:initial;background-repeat:initial;background-origin:initial;background-clip:initial;margin:0in;font-size:11pt;font-family:Calibri,sans-serif"><i><span style="color:black">Fubo Rao, Ph.D.,</span></i><span style="color:black"></span></p><p class="MsoNormal" style="background-image:initial;background-position:initial;background-size:initial;background-repeat:initial;background-origin:initial;background-clip:initial;margin:0in;font-size:11pt;font-family:Calibri,sans-serif"><i><span style="color:rgb(68,114,196)">Nanofabrication Cleanroom Manager,</span></i><span style="color:black"></span></p><p class="MsoNormal" style="background-image:initial;background-position:initial;background-size:initial;background-repeat:initial;background-origin:initial;background-clip:initial;margin:0in;font-size:11pt;font-family:Calibri,sans-serif"><i><span style="color:rgb(68,114,196)">Center for Nanoscale Materials,</span></i><span style="color:black"></span></p><p class="MsoNormal" style="background-image:initial;background-position:initial;background-size:initial;background-repeat:initial;background-origin:initial;background-clip:initial;margin:0in;font-size:11pt;font-family:Calibri,sans-serif"><i><span style="color:rgb(68,114,196)">Argonne National Laboratory</span></i><span style="color:black"></span></p><p class="MsoNormal" style="background-image:initial;background-position:initial;background-size:initial;background-repeat:initial;background-origin:initial;background-clip:initial;margin:0in;font-size:11pt;font-family:Calibri,sans-serif"><i><span style="color:rgb(68,114,196)">9700 S. Cass Ave, Lemont, IL 60439</span></i><span style="color:black"></span></p><p class="gmail-MsoPlainText" style="margin:0in;font-size:11pt;font-family:Calibri,sans-serif">









</p><p class="MsoNormal" style="background-image:initial;background-position:initial;background-size:initial;background-repeat:initial;background-origin:initial;background-clip:initial;margin:0in;font-size:11pt;font-family:Calibri,sans-serif"><i><span style="color:rgb(68,114,196)">Phone: 630-252-5708</span></i><span style="color:black"></span></p></div></div>