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Howdy All from AggieFab,</div>
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We have a user who requested permission to sputter zinc in our shared Lesker PVD75 DC sputtering tool. On the Lesker website, there is the following note:</div>
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<span style="color:rgb(33, 37, 41);font-family:Arial, Helvetica, sans-serif;text-align:left;background-color:rgb(255, 255, 255);display:inline !important" class="ContentPasted0">"This material has a relatively<span class="ContentPasted0"> </span></span><strong style="box-sizing:border-box;font-weight:bold;color:rgb(33, 37, 41);font-family:Arial, Helvetica, sans-serif;text-align:left;background-color:rgb(255, 255, 255)" class="ContentPasted0">high
vapor pressure at low temperatures</strong><span style="color:rgb(33, 37, 41);font-family:Arial, Helvetica, sans-serif;text-align:left;background-color:rgb(255, 255, 255);display:inline !important" class="ContentPasted0"><span class="ContentPasted0"> </span>which
can cause ppm level contamination in the chamber and subsequent films. Careful consideration should be taken before this material is used in any deposition system. For this reason, some users prefer to use only dedicated vacuum chambers for deposition."</span><br>
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<span style="color:rgb(33, 37, 41);font-family:Arial, Helvetica, sans-serif;text-align:left;background-color:rgb(255, 255, 255);display:inline !important" class="ContentPasted0">I'd like to ask the group if they allow zinc depositions in their shared tools
if they follow it by a thorough paste with another material, like Ti? Or if this material is prohibited because it is problematic. </span></div>
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<span style="color:rgb(33, 37, 41);font-family:Arial, Helvetica, sans-serif;text-align:left;background-color:rgb(255, 255, 255);display:inline !important" class="ContentPasted0">Thanks in advance for any inputs you may have.</span></div>
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<span style="color:rgb(33, 37, 41);font-family:Arial, Helvetica, sans-serif;text-align:left;background-color:rgb(255, 255, 255);display:inline !important" class="ContentPasted0">Best,</span></div>
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<div><b>Sandra G. Malhotra, Ph.D. </b>| Technical Lab Manager
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<div>AggieFab Nanofabrication Facility</div>
<div><a href="https://aggiefab.tamu.edu/" title="https://aggiefab.tamu.edu/">https://aggiefab.tamu.edu/</a></div>
<div>Department of Electrical & Computer Engineering, College of Engineering | Texas A&M University</div>
<div>3253 TAMU | College Station, TX 77843</div>
<div>ph: 979.845.3199 | sandra.malhotra@tamu.edu</div>
<div>- - - - - - - - - - - - - - - - - - - - - - - - </div>
<span style="color: rgb(134, 17, 6);">TEXAS A&M UNIVERSITY | FEARLESS on Every Front</span><br>
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