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I would also ask if process goal can be achieved with zinc compound, like ZnO. <br>
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Thanks</div>
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Mike</div>
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<div id="divRplyFwdMsg" dir="ltr"><font style="font-size:11pt" face="Calibri, sans-serif" color="#000000"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Shawn Wagoner <swagone@gmu.edu><br>
<b>Sent:</b> Wednesday, February 1, 2023 7:22 AM<br>
<b>To:</b> Malhotra, Sandra Guy <sandra.malhotra@tamu.edu>; Fab Network <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> Re: [labnetwork] Question about DC sputtering of zinc</font>
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I would not allow Zinc in any system I ran at Binghamton University. I would not even allow it in the cleanroom. It represents a significant contamination risk for shared use facilities. If I were fortunate enough to have two systems, one clean and one “dirty”,
I might consider it in the dirty system. Its vapor pressure is so high I am not sure there is much you can do to cover it up with Ti.
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Shawn</p>
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<b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> <b>On Behalf Of </b>Malhotra, Sandra Guy<br>
<b>Sent:</b> Monday, January 30, 2023 4:40 PM<br>
<b>To:</b> Fab Network <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] Question about DC sputtering of zinc</p>
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<span style="font-size:12.0pt; color:black">Howdy All from AggieFab,</span></p>
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<span style="font-size:12.0pt; color:black">We have a user who requested permission to sputter zinc in our shared Lesker PVD75 DC sputtering tool. On the Lesker website, there is the following note:</span></p>
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<span class="x_contentpasted0"><span style="font-size:12.0pt; font-family:"Arial",sans-serif; color:#212529; background:white">"This material has a relatively </span></span><strong><span style="font-size:12.0pt; font-family:"Arial",sans-serif; color:#212529; background:white">high
vapor pressure at low temperatures</span></strong><span class="x_contentpasted0"><span style="font-size:12.0pt; font-family:"Arial",sans-serif; color:#212529; background:white"> which can cause ppm level contamination in the chamber and subsequent films. Careful
consideration should be taken before this material is used in any deposition system. For this reason, some users prefer to use only dedicated vacuum chambers for deposition."</span></span><span style="font-size:12.0pt; color:black"></span></p>
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<span class="x_contentpasted0"><span style="font-size:12.0pt; font-family:"Arial",sans-serif; color:#212529; background:white">I'd like to ask the group if they allow zinc depositions in their shared tools if they follow it by a thorough paste with another
material, like Ti? Or if this material is prohibited because it is problematic. </span></span><span style="font-size:12.0pt; color:black"></span></p>
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<span class="x_contentpasted0"><span style="font-size:12.0pt; font-family:"Arial",sans-serif; color:#212529; background:white">Thanks in advance for any inputs you may have.</span></span><span style="font-size:12.0pt; color:black"></span></p>
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<span class="x_contentpasted0"><span style="font-size:12.0pt; font-family:"Arial",sans-serif; color:#212529; background:white">Best,</span></span><span style="font-size:12.0pt; color:black"></span></p>
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<b>Sandra G. Malhotra, Ph.D. </b>| Technical Lab Manager </p>
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