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Hi All,
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<div class="">Does anyone have a list of banned materials for sputtering they can share? I made a list over the years through discussions on labnetwork whenever a new material gets requested, see attached photo. It’ll be nice to have a publicly searchable database,
similar to this google sheet (<a href="https://docs.google.com/spreadsheets/d/1z0iyCsDUTpi6nkhtIxSp_rSMKGF4jeiqGbVRfnF5CRk" class="">https://docs.google.com/spreadsheets/d/1z0iyCsDUTpi6nkhtIxSp_rSMKGF4jeiqGbVRfnF5CRk</a>).</div>
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<div class="">Thanks,</div>
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<div class="">On Feb 1, 2023, at 9:20 AM, Michael Yakimov <<a href="mailto:yakimom@sunypoly.edu" class="">yakimom@sunypoly.edu</a>> wrote:</div>
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I would also ask if process goal can be achieved with zinc compound, like ZnO.<span class="Apple-converted-space"> </span><br class="">
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Thanks</div>
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Mike</div>
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<font face="Calibri, sans-serif" style="font-size: 11pt;" class=""><b class="">From:</b><span class="Apple-converted-space"> </span>labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu" class="">labnetwork-bounces@mtl.mit.edu</a>> on behalf of Shawn Wagoner
<<a href="mailto:swagone@gmu.edu" class="">swagone@gmu.edu</a>><br class="">
<b class="">Sent:</b><span class="Apple-converted-space"> </span>Wednesday, February 1, 2023 7:22 AM<br class="">
<b class="">To:</b><span class="Apple-converted-space"> </span>Malhotra, Sandra Guy <<a href="mailto:sandra.malhotra@tamu.edu" class="">sandra.malhotra@tamu.edu</a>>; Fab Network <<a href="mailto:labnetwork@mtl.mit.edu" class="">labnetwork@mtl.mit.edu</a>><br class="">
<b class="">Subject:</b><span class="Apple-converted-space"> </span>Re: [labnetwork] Question about DC sputtering of zinc</font>
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I would not allow Zinc in any system I ran at Binghamton University. I would not even allow it in the cleanroom. It represents a significant contamination risk for shared use facilities. If I were fortunate enough to have two systems, one clean and one “dirty”,
I might consider it in the dirty system. Its vapor pressure is so high I am not sure there is much you can do to cover it up with Ti. </div>
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Shawn</div>
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<b class="">From:</b><span class="Apple-converted-space"> </span>labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu" class="">labnetwork-bounces@mtl.mit.edu</a>><span class="Apple-converted-space"> </span><b class="">On Behalf Of<span class="Apple-converted-space"> </span></b>Malhotra,
Sandra Guy<br class="">
<b class="">Sent:</b><span class="Apple-converted-space"> </span>Monday, January 30, 2023 4:40 PM<br class="">
<b class="">To:</b><span class="Apple-converted-space"> </span>Fab Network <<a href="mailto:labnetwork@mtl.mit.edu" class="">labnetwork@mtl.mit.edu</a>><br class="">
<b class="">Subject:</b><span class="Apple-converted-space"> </span>[labnetwork] Question about DC sputtering of zinc</div>
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<span style="font-size: 12pt;" class="">Howdy All from AggieFab,</span></div>
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<span style="font-size: 12pt;" class="">We have a user who requested permission to sputter zinc in our shared Lesker PVD75 DC sputtering tool. On the Lesker website, there is the following note:</span></div>
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<span class="x_contentpasted0"><span style="font-size: 12pt; font-family: Arial, sans-serif; color: rgb(33, 37, 41); background-color: white;" class="">"This material has a relatively </span></span><strong class=""><span style="font-size: 12pt; font-family: Arial, sans-serif; color: rgb(33, 37, 41); background-color: white;" class="">high
vapor pressure at low temperatures</span></strong><span class="x_contentpasted0"><span style="font-size: 12pt; font-family: Arial, sans-serif; color: rgb(33, 37, 41); background-color: white;" class=""> which can cause ppm level contamination in the chamber
and subsequent films. Careful consideration should be taken before this material is used in any deposition system. For this reason, some users prefer to use only dedicated vacuum chambers for deposition."</span></span><span style="font-size: 12pt;" class=""></span></div>
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<span class="x_contentpasted0"><span style="font-size: 12pt; font-family: Arial, sans-serif; color: rgb(33, 37, 41); background-color: white;" class="">I'd like to ask the group if they allow zinc depositions in their shared tools if they follow it by a thorough
paste with another material, like Ti? Or if this material is prohibited because it is problematic. </span></span><span style="font-size: 12pt;" class=""></span></div>
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<span class="x_contentpasted0"><span style="font-size: 12pt; font-family: Arial, sans-serif; color: rgb(33, 37, 41); background-color: white;" class="">Thanks in advance for any inputs you may have.</span></span><span style="font-size: 12pt;" class=""></span></div>
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<span class="x_contentpasted0"><span style="font-size: 12pt; font-family: Arial, sans-serif; color: rgb(33, 37, 41); background-color: white;" class="">Best,</span></span><span style="font-size: 12pt;" class=""></span></div>
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<b class="">Sandra G. Malhotra, Ph.D. </b>| Technical Lab Manager<span class="Apple-converted-space"> </span></div>
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- - - - - - - - - - - - - - - - - - - - - - - -<span class="Apple-converted-space"> </span></div>
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<span style="color: rgb(134, 17, 6);" class="">TEXAS A&M UNIVERSITY | FEARLESS on Every Front</span></div>
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