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<p class="MsoNormal">Hello,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Hoping the community can feedback on their experiences.<br>
<br>
In 2019 we purchased an SPTS Rapier DSiE tool. As well as doing Bosch processing we also require the tool to do mixed process etching. Quite a few of our users, on our other Si etch tools (OIPT Estrelas and STS Multiplex), use mixed process to etch SOI materials
or a-Si on fused silica substrates. These systems have Intellemetrics LEP 410/500 red laser interferometer units for the purpose of end-point detection.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">When we purchased the Rapier, SPTS did tell us that a laser end-point system could not be used. They encouraged us instead to use the Claritas OES system on the tool, however when we pointed out our typical use scenario (small substrate
size, low % open area) they admitted that the Claritas would struggle to differentiate when to end-point. Our preferred laser interferometer vendor, Intellemetrics, say they have sold LEP 500 red laser interferometer units to SPTS but cannot say on what systems
they have been used. <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We have found that <a href="https://www.epfl.ch/research/facilities/cmi/equipment/etching/spts-rapier/">
EPFL use white light interferometry</a> end-point detection on their Rapier module – have contacted Phillipe Fluckiger separately.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">My question to the community is has anyone used a laser interferometry system on an SPTS Rapier? If so, could they feedback with their experiences. Apologies I’m asking such an open question!<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-GB">Cheers,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-GB"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-GB">James<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Helvetica",sans-serif;color:#1E2142;mso-fareast-language:EN-GB"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Helvetica",sans-serif;color:#1E2142;mso-fareast-language:EN-GB">Dr. James Paul Grant<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Helvetica",sans-serif;color:#1E2142;mso-fareast-language:EN-GB">Research Engineer in Plasma Processing</span><span style="mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal"><i><span style="font-size:10.0pt;font-family:"Helvetica",sans-serif;color:#1E2142;mso-fareast-language:EN-GB"><o:p> </o:p></span></i></p>
<p class="MsoNormal"><b><i><span style="font-family:"Helvetica",sans-serif;color:#005C8A;mso-fareast-language:EN-GB">Plasma Processing Group</span></i></b><b><span style="color:#005C8A;mso-fareast-language:EN-GB"><o:p></o:p></span></b></p>
<p class="MsoNormal"><span style="font-family:"Helvetica",sans-serif;color:#003865;mso-fareast-language:EN-GB"><a href="mailto:james.grant@glasgow.ac.uk"><span style="color:#0563C1">james.grant@glasgow.ac.uk</span></a></span><span style="color:#003865;mso-fareast-language:EN-GB">
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#003865;mso-fareast-language:EN-GB"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-GB"> <img border="0" width="362" height="51" style="width:3.775in;height:.5333in" id="Picture_x0020_1" src="cid:image001.png@01D93A36.DE509BD0"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:ArialMT;color:red;mso-fareast-language:EN-GB">
</span><span style="font-size:8.0pt;font-family:ArialMT;color:#005C8A;mso-fareast-language:EN-GB"><a href="http://www.jwnc.gla.ac.uk/"><span style="color:#005C8A;text-decoration:none">www.JWNC.gla.ac.uk</span></a></span><span style="font-size:8.0pt;font-family:ArialMT;color:#EC2129;mso-fareast-language:EN-GB"><br>
<img border="0" width="10" height="10" style="width:.1083in;height:.1083in" id="Picture_x0020_2" src="cid:image002.png@01D93A36.DE509BD0">
</span><span style="font-size:8.0pt;font-family:ArialMT;color:#005C8A;mso-fareast-language:EN-GB"><a href="LinkedIn.com/company/JWNC"><span style="color:#005C8A;text-decoration:none">LinkedIn.com/company/JWNC</span></a></span><span style="font-size:8.0pt;font-family:ArialMT;color:#EC2129;mso-fareast-language:EN-GB"><br>
<img border="0" width="10" height="10" style="width:.1083in;height:.1083in" id="Picture_x0020_3" src="cid:image003.png@01D93A36.DE509BD0">
</span><span style="font-size:8.0pt;font-family:ArialMT;color:#005C8A;mso-fareast-language:EN-GB"><a href="https://twitter.com/uofg_jwnc"><span style="color:#005C8A;text-decoration:none">@UofG_JWNC</span></a></span><span style="font-size:8.0pt;mso-fareast-language:EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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