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<p>Kevin,</p>
<p>We did a 1500 sq ft cleanroom:</p>
<ul>
<li>Yellow room, class 100, 350 sq ft</li>
<li>Yellow room, class 1000, 350 sq ft</li>
<li>white room, class 1000, 900 sq ft</li>
<li>9ft high inside clearance<br>
</li>
</ul>
<p>The cost to purchase the cleanroom and have it installed in an
old building where all the services are in a mezzanine above the
room cost us 5M$ CAD (roughly 4M$ USD). Hope this helps.</p>
<p>Mario<br>
</p>
<div class="moz-cite-prefix">On 2023-02-07 3:01 p.m., Kevin M McPeak
wrote:<br>
</div>
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cite="mid:BL3P221MB04043F3C01FB6E6E6949AC41B0DB9@BL3P221MB0404.NAMP221.PROD.OUTLOOK.COM">
<pre class="moz-quote-pre" wrap="">[CAUTION: Non-UBC Email]
Dear Colleagues,
At LSU, we are putting together a proposal to build a cleanroom on campus (our current one is 15 min away). Our VP of research has asked me to determine a rough budget for constructing a microelectronics cleanroom. Below are the itemized details:
- Size: 2000 sqft of class 100 space and 2000 sqft of grey room space. Our current off-campus cleanroom is 2000 sqft.
- Location: 5th floor (top floor) of chemistry building (total space of 5th floor is 12,000 sqft)
- Current condition of space: 5th floor is unfinished, i.e., concrete floors with pipes coming from the ground and 10ft ceilings.
I want to factor in the following costs: air handlers, toxic gas handling for PECVD, LPCVD, and ICP-RIE machines, and getting utilities to each tool, i.e., power, water, and N2.
$8 million is the current number that people are tossing around. I would greatly appreciate the feedback on that value. I certainly don't want to underfund the project. Thanks!
Regards,
Kevin
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