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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">At Rochester Institute of Technology we have designated HF baths of various water to HF ratios (50:1, 10:1 etc.) that are on certain dedicated benches.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">The baths are only changed on the normal schedule or when the etch rate monitors indicate a change, or there is some contamination suspected.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">No students (or faculty) can access the 49% HF used to change the baths, it is only done by staff.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Rob Pearson,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">RIT Microelectronic Engineering.
<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Michael Yakimov<br>
<b>Sent:</b> Thursday, February 23, 2023 9:08 AM<br>
<b>To:</b> Savitha P <savithap@iisc.ac.in>; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] HF storage<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal" style="background:white"><span style="font-family:"Calibri",sans-serif;color:black">One issue with "automatic removal of access":
<o:p></o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-family:"Calibri",sans-serif;color:black">punitive measures are not the best if safety is involved. Especially for minor things, where user may have a small event that didn't lead to serious consequences
- but the user may share the problem, get some advice, and some things may improve after all. If user is discouraged from that by automatic punishment, then things work worse overall.<o:p></o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-family:"Calibri",sans-serif;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-family:"Calibri",sans-serif;color:black">It's a big philosophic question in general but looks like safety actually benefits from a less punishing approach. Of course, such dilemmas go well beyond
cleanroom or chemical safety and experience comes from many industries. I heard a lot of such discussions in aviation safety - and I would call that even more safety-critical business than what we're doing...<o:p></o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-family:"Calibri",sans-serif;color:black">Thanks<o:p></o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-family:"Calibri",sans-serif;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-family:"Calibri",sans-serif;color:black">Mike<o:p></o:p></span></p>
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<p><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">_______________________________________________<o:p></o:p></span></p>
<p><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">Michael Yakimov<o:p></o:p></span></p>
<p><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">Research scientist<o:p></o:p></span></p>
<p><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">College of Nanoscale Science and Engineering<o:p></o:p></span></p>
<p><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">SUNY Polytechnic Institute<o:p></o:p></span></p>
<p><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black"> <o:p></o:p></span></p>
<p><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">253 Fuller rd.
<o:p></o:p></span></p>
<p><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">Albany NY 12203<o:p></o:p></span></p>
<p><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black"> <o:p></o:p></span></p>
<p><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">Phone: 518-437-8609 lab<o:p></o:p></span></p>
<p><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">e-mail:
</span><a href="mailto:yakimom@sunypoly.edu"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">yakimom@sunypoly.edu</span></a><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black"><o:p></o:p></span></p>
<p><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black"> labnetwork <</span><a href="mailto:labnetwork-bounces@mtl.mit.edu"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">labnetwork-bounces@mtl.mit.edu</span></a><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">>
on behalf of Savitha P <</span><a href="mailto:savithap@iisc.ac.in"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">savithap@iisc.ac.in</span></a><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">><br>
<b>Sent:</b> Thursday, February 23, 2023 3:32 AM<br>
<b>To:</b> </span><a href="mailto:labnetwork@mtl.mit.edu"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">labnetwork@mtl.mit.edu</span></a><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black"> <</span><a href="mailto:labnetwork@mtl.mit.edu"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">labnetwork@mtl.mit.edu</span></a><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">><br>
<b>Subject:</b> Re: [labnetwork] HF storage</span> <o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal" style="background:white"><span style="font-family:"Calibri",sans-serif;color:black">Dear All:<o:p></o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-family:"Calibri",sans-serif;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-family:"Calibri",sans-serif;color:black">Thank you very much for all the suggestions. We have currently incorporated the following as per our space availability. HF has been segregated and kept
in a secondary container so that users will not mistake the same with HCl. Size of Labels on the bottles have been increased for HF only, so that users have another mark for identification. As per our protocol, all safety incidents at wet etch leads to an
automatic removal of access to the cleanroom. The user will be allowed only after a retraining and retest and will be provided access only after a satisfactory drive in.<o:p></o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-family:"Calibri",sans-serif;color:black">Regards,<o:p></o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-family:"Calibri",sans-serif;color:black">Savitha<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black"> Jing Guo <</span><a href="mailto:jeanne.guo@rice.edu"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">jeanne.guo@rice.edu</span></a><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">><br>
<b>Sent:</b> 16 February 2023 21:41<br>
<b>To:</b> Savitha P <</span><a href="mailto:savithap@iisc.ac.in"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">savithap@iisc.ac.in</span></a><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">><br>
<b>Cc:</b> </span><a href="mailto:labnetwork@mtl.mit.edu"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">labnetwork@mtl.mit.edu</span></a><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black"> <</span><a href="mailto:labnetwork@mtl.mit.edu"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">labnetwork@mtl.mit.edu</span></a><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:black">><br>
<b>Subject:</b> Re: [labnetwork] HF storage</span> <o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#FF5733">External Email<o:p></o:p></span></b></p>
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<p class="MsoNormal">Hi Savitha, <o:p></o:p></p>
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<p class="MsoNormal">This is Jing from Rice U Nanofab. Fortunately we have enough space to store HF or BOE in a separate cabinet. HCl is stored with the other acids in the ‘General Acids’ cabinet. Also all HF related processes will be performed in the separate
HF wet bench which is a independent bench from other benches. For all of our chemicals, we are using the ’Two-letter’ labelling system which I learned from Utah NanoFab a long time ago. All chemical bottles, storage cabinets and wet benches have a ’two letter’
sticker on. All HF bottles have the ‘HF’ stickers. HCl or other Acids have the ‘GA’ stickers (general acid). The stickers have to match to the cabinets and benches when you need to store or use them. <o:p></o:p></p>
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<p class="MsoNormal">For very limited lab or storage space, the simple solution I can think about will be separate secondary containers with different colors, and put different color stickers on the bottle caps. Also put a big color chart beside the storage
cabinets and benches to clarify which is which.<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">I totally agree with Tony, no matter how great foolproof your system is, there will still be someone making mistakes. Wish our system can provide some idea to help. <o:p></o:p></p>
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<p class="MsoNormal">Best,<o:p></o:p></p>
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<p class="MsoNormal">Jing <o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black">---------------------------------------<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black">Jing Guo Ph.D.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black">Research Scientist<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black">SEA Cleanroom (SST 017)<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black">Rice University<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black">Houston, TX <o:p></o:p></span></p>
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<p class="MsoNormal"><a href="mailto:jeanne.guo@rice.edu"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">jeanne.guo@rice.edu</span></a><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif;color:black">713-348-8227<o:p></o:p></span></p>
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<p class="MsoNormal">On Feb 15, 2023, at 6:19 AM, Savitha P <<a href="mailto:savithap@iisc.ac.in">savithap@iisc.ac.in</a>> wrote:<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal" style="background:white"><span style="font-family:"Calibri",sans-serif">Hi!<o:p></o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-family:"Calibri",sans-serif">We recently had a couple of occasions where users had mistakenly used Hydrofluoric acid in place of Hydrochloric acid during RCA cleaning. To avoid this, one of the
suggestions we have received from our OLSEH is to store HF in a different coloured bottle (currently all acids are stored in white translucent polypropylene bottles which are properly labelled). Accordingly, we had considered storing HF in opaque, brown colour
HDPE bottles. However, that was not deemed acceptable by a section of users saying bottles should be translucent so that acid level inside can be judged.<o:p></o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-family:"Calibri",sans-serif">Could you please let me know how small quantities of HF are stored in your respective fabs. Is there any regulation governing storage of HF, so that we could implement
the same.<o:p></o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-family:"Calibri",sans-serif">Thanks and regards,<o:p></o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-family:"Calibri",sans-serif">Savitha<o:p></o:p></span></p>
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<p class="MsoNormal" style="background:white"><span style="font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif">Dr. Savitha P<br>
Chief Operating Officer<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif">National Nanofabrication Centre<br>
Centre for Nanoscience and Engineering<br>
Indian Institute of Science<br>
Bangalore - 560012<br>
India.<br>
Ph. +91 80 2293 3319<br>
</span><a href="https://urldefense.com/v3/__http:/www.cense.iisc.ac.in__;!!BuQPrrmRaQ!jwbzV_ZvSyB1Q5acEoqn2bdk1V1F959zmmHlnmL0yfvnJJ7KjK-9pQMpfGdp8hSSHKhA-Mmu9UAZSVxRNrPjWiAe3he9vQ$"><span style="font-family:"Calibri",sans-serif">www.cense.iisc.ac.in</span></a><span style="font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
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</span><a href="https://urldefense.com/v3/__https:/mtl.mit.edu/mailman/listinfo.cgi/labnetwork__;!!BuQPrrmRaQ!jwbzV_ZvSyB1Q5acEoqn2bdk1V1F959zmmHlnmL0yfvnJJ7KjK-9pQMpfGdp8hSSHKhA-Mmu9UAZSVxRNrPjWiD0FvT2dA$"><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif">https://urldefense.com/v3/__https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork__;!!BuQPrrmRaQ!jwbzV_ZvSyB1Q5acEoqn2bdk1V1F959zmmHlnmL0yfvnJJ7KjK-9pQMpfGdp8hSSHKhA-Mmu9UAZSVxRNrPjWiD0FvT2dA$</span></a><o:p></o:p></p>
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