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<p class="MsoNormal">Fubo et al,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We have also recently been having some issues with responsiveness and communication from PlasmaTherm. In this case we are dealing with tool upgrades/installation so we don’t necessarily have the option of going to a third party, but wanted
to share our difficulties. I would also be interested in hearing if others have been having similar experiences or have any suggestions.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks,<o:p></o:p></p>
<p class="MsoNormal">-Dave<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;line-height:11.25pt;background:white">
<b><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#BA0C2F;background:white">Dave Hollingshead</span></b><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#3F4443"><br>
Manager, Research Operations<br>
<br>
</span><b><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#BA0C2F">The Ohio State University</span></b><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#3F4443"><br>
Nanotech West Labs<br>
Suite 100, 1381 Kinnear Rd, Columbus, OH 43212<br>
614.292.1355 Office<br>
<span style="background:white"><a href="mailto:hollingshead.19@osu.edu"><span style="color:#0563C1">hollingshead.19@osu.edu</span></a></span> /
<a href="http://nanotech.osu.edu"><span style="color:#BA0C2F;background:white">nanotech.osu.edu</span></a><br>
<br>
Pronouns: he/him/his<o:p></o:p></span></p>
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<p class="MsoNormal"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> <b>
On Behalf Of </b>Football<br>
<b>Sent:</b> Thursday, January 26, 2023 16:45<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] third party companies for servicing PlasmaTherm DRIE systems<o:p></o:p></p>
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<p class="MsoNormal" style="mso-line-height-alt:.75pt"><span style="font-size:1.0pt;color:white">Dear all, We are having trouble getting PlasmaTherm to respond to our questions and service quote. Wanted to ask if you know of any third party companies that work
on PlasmaTherm systems, specifically their DRIE tool? Thanks for any suggestions!Fubo
<o:p></o:p></span></p>
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<p class="gmail-msoplaintext" style="margin:0in">Dear all,<o:p></o:p></p>
<p class="gmail-msoplaintext" style="margin:0in"><o:p> </o:p></p>
<p class="gmail-msoplaintext" style="margin:0in">We are having trouble getting PlasmaTherm to respond to our questions and service quote. Wanted to ask if you know of any third party companies that work on PlasmaTherm systems, specifically their DRIE tool?<o:p></o:p></p>
<p class="gmail-msoplaintext" style="margin:0in"><o:p> </o:p></p>
<p class="gmail-msoplaintext" style="margin:0in">Thanks for any suggestions!<o:p></o:p></p>
<p class="gmail-msoplaintext" style="margin:0in"><o:p> </o:p></p>
<p class="MsoNormal" style="background-image:initial;background-position:initial;background-size:initial;background-repeat:initial;background-origin:initial;background-clip:initial">
<i><span style="color:black">Fubo Rao, Ph.D.,</span></i><o:p></o:p></p>
<p class="MsoNormal" style="background-image:initial;background-position:initial;background-size:initial;background-repeat:initial;background-origin:initial;background-clip:initial">
<i><span style="color:#4472C4">Nanofabrication Cleanroom Manager,</span></i><o:p></o:p></p>
<p class="MsoNormal" style="background-image:initial;background-position:initial;background-size:initial;background-repeat:initial;background-origin:initial;background-clip:initial">
<i><span style="color:#4472C4">Center for Nanoscale Materials,</span></i><o:p></o:p></p>
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<i><span style="color:#4472C4">Argonne National Laboratory</span></i><o:p></o:p></p>
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<i><span style="color:#4472C4">9700 S. Cass Ave, Lemont, IL 60439</span></i><o:p></o:p></p>
<p class="MsoNormal" style="background-image:initial;background-position:initial;background-size:initial;background-repeat:initial;background-origin:initial;background-clip:initial">
<i><span style="color:#4472C4">Phone: 630-252-5708</span></i><o:p></o:p></p>
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