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<p class="MsoNormal">James,<o:p></o:p></p>
<p class="MsoNormal"> I would highly recommend a dry bed scrubber for a number of reasons.<o:p></o:p></p>
<p class="MsoNormal">Electrical consumption will be seriously reduced since you are not keeping a large mass of “burn box” at elevated temperatures.<o:p></o:p></p>
<p class="MsoNormal">If your present unit is of the “burn/wash” type, city water consumption will be eliminated.<o:p></o:p></p>
<p class="MsoNormal">I have installed a dual Calisto system for our LPCVD systems and I am quite satisfied with it’s performance and features. One outstanding feature is the built in TGMS sensor that will alert you to when the dry bed has reached its lifespan.
Most other abatement systems simply monitor exhaust pressure as a trouble indicator. The dual Calisto will not only alert you of a dry bed (cannister) failure, it will automatically switch over to the second canister and you have the luxury of changing the
spent one when you have the time.<o:p></o:p></p>
<p class="MsoNormal"> Hope this helps,<o:p></o:p></p>
<p class="MsoNormal"> Equipment Dood.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="font-size:14.0pt">Steve Paolini<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">Principal Equipment Engineer<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">Harvard University Center for Nanoscale Systems<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">11 Oxford St.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">Cambridge, MA 02138<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">617- 496- 9816<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">spaolini@cns.fas.harvard.edu<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">www.cns.fas.harvard.edu</span><span style="font-size:14.0pt"><o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> <b>
On Behalf Of </b>James C. Sturm<br>
<b>Sent:</b> Friday, March 24, 2023 10:49 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Dry Bed Scrubber for silane, etc<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We have a Si/Ge UHV CVD system for which we want to purchase a dedicated dry bed scrubber.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Total N2 purges ~38 lpm (from several dry pumps, etc)<o:p></o:p></p>
<p class="MsoNormal">Total H2 100 sccm when purging, but normally < 20 sccm<o:p></o:p></p>
<p class="MsoNormal">Silane ~2 sccm, Germane < 0.05 sccm, Diborane and phosphine < 0.01 sccm.<o:p></o:p></p>
<p class="MsoNormal">Running < 10 hours a week on average.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We are looking into a Callisto dry bed scrubber (by Jupiter). We have no experience with such systems, having used a hot “combustion chamber” with air pumped in for 20+ years.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Comments/suggestions/other manufacturers/”been there done that” are welcome.<o:p></o:p></p>
<p class="MsoNormal">Thanks, <o:p></o:p></p>
<p class="MsoNormal">Jim Sturm and Zoe Cyue, Princeton University<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif">********************************************</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif">Prof. James C. Sturm</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif"> Chair, Department of Electrical and Computer Engineering<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif"> Stephen R. Forrest Professor in Electrical Engineering</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif"> Princeton University</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif"> B210 E-Quad, Olden St.</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif"> Princeton, NJ 08540</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif"> 609-258-5610, fax: 609-258-1177</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif">
<a href="mailto:sturm@princeton.edu" title="mailto:sturm@princeton.edu"><span style="color:blue">sturm@princeton.edu</span></a></span><o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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