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<p class="MsoNormal">Contact Critical Systems Inc. or BAZM. They both have these systems. CS Clean Solutions also offers dry bed systems.
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<p class="MsoNormal"><b><span style="color:#002060;text-transform:uppercase">Deon D. Collins<o:p></o:p></span></b></p>
<p class="MsoNormal"><span style="color:#002060"><br>
<i>FACILITY MANAGER</i><br>
</span><span style="color:#002060">Holonyak Lab</span><span style="color:#002060"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#002060">University of Illinois at Urbana-Champaign</span><span style="color:#1F497D"><br>
</span><span style="color:#13294B">208 N Wright St Rm. 248 | 2250</span><span style="color:#1F497D"><br>
</span><span style="color:#13294B">Urbana, IL 61801</span><span style="color:#1F497D"><br>
</span><span style="color:#13294B">217-300-7531 | </span><span style="color:#1F497D"><a href="mailto:deonc69@illinois.edu">deonc69@illinois.edu</a><br>
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</span><a href="http://illinois.edu/"><span style="color:#1F497D;text-decoration:none"><img border="0" width="119" height="21" style="width:1.2395in;height:.2187in" id="Picture_x0020_1" src="cid:image001.png@01D95E55.3BC66870"></span></a><span style="color:#1F497D"><br>
<br>
</span><i><span style="color:#666666">Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject to public disclosure.
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<p class="MsoNormal"><b><span style="font-size:10.0pt;color:#A3238B">Life is not about watching other people live it. It’s about you living your own!</span></b><o:p></o:p></p>
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<p class="MsoNormal"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> <b>
On Behalf Of </b>James C. Sturm<br>
<b>Sent:</b> Friday, March 24, 2023 9:49 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Dry Bed Scrubber for silane, etc<o:p></o:p></p>
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<p class="MsoNormal">We have a Si/Ge UHV CVD system for which we want to purchase a dedicated dry bed scrubber.<o:p></o:p></p>
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<p class="MsoNormal">Total N2 purges ~38 lpm (from several dry pumps, etc)<o:p></o:p></p>
<p class="MsoNormal">Total H2 100 sccm when purging, but normally < 20 sccm<o:p></o:p></p>
<p class="MsoNormal">Silane ~2 sccm, Germane < 0.05 sccm, Diborane and phosphine < 0.01 sccm.<o:p></o:p></p>
<p class="MsoNormal">Running < 10 hours a week on average.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We are looking into a Callisto dry bed scrubber (by Jupiter). We have no experience with such systems, having used a hot “combustion chamber” with air pumped in for 20+ years.<o:p></o:p></p>
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<p class="MsoNormal">Comments/suggestions/other manufacturers/”been there done that” are welcome.<o:p></o:p></p>
<p class="MsoNormal">Thanks, <o:p></o:p></p>
<p class="MsoNormal">Jim Sturm and Zoe Cyue, Princeton University<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif">********************************************</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif">Prof. James C. Sturm</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif"> Chair, Department of Electrical and Computer Engineering<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif"> Stephen R. Forrest Professor in Electrical Engineering</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif"> Princeton University</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif"> B210 E-Quad, Olden St.</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif"> Princeton, NJ 08540</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif"> 609-258-5610, fax: 609-258-1177</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif">
<a href="mailto:sturm@princeton.edu" title="mailto:sturm@princeton.edu"><span style="color:blue">sturm@princeton.edu</span></a></span><o:p></o:p></p>
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