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<p class="MsoNormal"><span style="font-size:11.0pt">HI,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Here at Draper we shut off the N2 when not in use and we have every user run the SRD before they use it to ensure that there is not extra particles generated. If you do not run it for a cycle the SRD tend
to deposit a lot of particles on your wafer.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Rick<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:none">Richard Morrison<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:none">DMTS<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:none">Draper Laboratory<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:none">555 Technology Square<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:none">Cambridge Ma 02139<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:none">Office: 617-258-3420<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:none">Cell: 508-930-3461<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;mso-ligatures:none">From:</span></b><span style="font-size:11.0pt;mso-ligatures:none"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Nathan Nelson - Fitzpatrick<br>
<b>Sent:</b> Wednesday, April 5, 2023 2:47 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [EXTERNAL] [labnetwork] N2 consumption by SRDs<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<b><span style="font-size:11.0pt;color:#222222;mso-ligatures:none">CAUTION:</span></b><span style="font-size:11.0pt;color:#222222;mso-ligatures:none"> This email originated from outside of the organization. Do not click links or open attachments unless you
recognize the sender and know the content is safe. <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;mso-ligatures:none"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt">Hi labnetwork,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">My lab is going through a process of auditing our Nitrogen use, and an early target for saving on N<sub>2</sub> are our spin rinse dryers.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">We have four Sitek SRDs which are configured to continuously purge with N<sub>2</sub> and to run occasionally (on a timer) to exercise the SRDs and run some DI water through them. The constant N2 purge obviously
consumes a ton of N<sub>2</sub>.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">We’re considering either:<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<ul style="margin-top:0in" type="disc">
<li class="MsoListParagraph" style="margin-left:0in;mso-list:l0 level1 lfo3"><span style="font-size:11.0pt">Purchasing an (expensive) valve from Sitek that would cut off N<sub>2</sub> flow when the SRD controllers are off. We would then leave the SRD controllers
off when they are not enabled by our lab users.<o:p></o:p></span></li><li class="MsoListParagraph" style="margin-left:0in;mso-list:l0 level1 lfo3"><span style="font-size:11.0pt">Or we might consider setting up an interlock to drive a solenoid valve that would cut off N<sub>2</sub> flow to the SRDs when they are not enabled in
our lab management software.<o:p></o:p></span></li></ul>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">I’m wondering what other interesting solutions people have fashioned to reduce N<sub>2</sub> consumption by SRDs?<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">I’m also curious if there are any pitfalls we should look out for when pursuing something like this?<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Many thanks in advance,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"> -Nathan<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif;mso-ligatures:none">-- <o:p></o:p></span></p>
<div>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Verdana",sans-serif;color:black;mso-ligatures:none">Nathan Nelson-Fitzpatrick PhD, PEng (He/Him)</span><span style="font-size:10.0pt;font-family:"Times New Roman",serif;color:black;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Verdana",sans-serif;color:black;mso-ligatures:none">Director, Quantum-Nano Fabrication and Characterization Facility (QNFCF)</span><span style="font-size:10.0pt;font-family:"Times New Roman",serif;color:black;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Verdana",sans-serif;color:black;mso-ligatures:none">Office of Research</span><span style="font-size:10.0pt;font-family:"Times New Roman",serif;color:black;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Verdana",sans-serif;color:black;mso-ligatures:none">University of Waterloo</span><span style="font-size:10.0pt;font-family:"Times New Roman",serif;color:black;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Verdana",sans-serif;color:black;mso-ligatures:none">200 University Avenue West, Waterloo, ON N2L 3G1</span><span style="font-size:10.0pt;font-family:"Times New Roman",serif;color:black;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Verdana",sans-serif;color:black;mso-ligatures:none">P: 519-888-4567 ext. 31796</span><span style="font-size:10.0pt;font-family:"Times New Roman",serif;color:black;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Verdana",sans-serif;color:black;mso-ligatures:none">C: 226-218-3206</span><span style="font-size:10.0pt;font-family:"Times New Roman",serif;color:black;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><a href="https://urldefense.com/v2/url?u=https-3A__uwaterloo.ca_quantum-2Dnano-2Dfabrication-2Dand-2Dcharacterization-2Dfacility_&d=DwMF-g&c=m5mye7XjY-PNBUdjUS9G7n0DDGwujM2TWPAftzw2VTE&r=2-QuDy5hiP3fahwOU6_94U59sZ8WR0Hpk4KUuW7EuGA&m=N5vyfaZn_YYs7EuXOEeBFvt2fMOw6n91JrLBDuFRj8A&s=VnNUui05s3ETv7MUlps56QilbO8BPnVgxKmLzmzFXaE&e="><span style="font-size:10.0pt;font-family:"Verdana",sans-serif;mso-ligatures:none">https://uwaterloo.ca/quantum-nano-fabrication-and-characterization-facility/</span></a><span style="font-size:10.0pt;font-family:"Verdana",sans-serif;color:black;mso-ligatures:none"><o:p></o:p></span></p>
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