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<p class="MsoNormal"><span lang="EN-US">Hi all,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">We have a Tystar furnace dedicated to thermal oxidation. We do not have a chlorine source for tube cleaning. So far, only bare prime Si wafers cleaned in RCA solutions have been loaded in the furnace. MOS capacitors with
20 nm thermal oxide were fabricated and C-V measurements did not show hysteresis due to mobile ions and I-V measurements showed nice Fowler-Nordheim curves up to 20 V with no breakdown . Quasi-static CV curves showed low density of interface traps. We tried
the Zerbst method to determine the minority carrier lifetime generation but somehow it did not work.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">For those of you who care about metal contamination in quartz furnaces, I am curious to know how you evaluate it. I learned about surface charge analyzing that can work on bare and dielectric coated wafers and measure
the minority carrier lifetime. I have contacted Berkeley and Georgia Tech for a characterization service. I am also considering TXRF (Total X-ray Fluorescence) but the cost to analyze few wafers with a specialized analytical company is quite high.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">Any suggestion is welcome.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">Best,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><b><span lang="EN-CA" style="font-family:"Lucida Calligraphy";mso-ligatures:none;mso-fareast-language:FR-CA">Lino Eugene, P.Eng., Ph.D.,</span></b><span lang="EN-CA" style="mso-ligatures:none;mso-fareast-language:FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="mso-ligatures:none;mso-fareast-language:FR-CA">Micro/nanofabrication process engineer</span><span lang="EN-CA" style="mso-ligatures:none;mso-fareast-language:FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="mso-ligatures:none;mso-fareast-language:FR-CA">Quantum-Nano Fabrication and Characterization Facility</span><span lang="EN-CA" style="mso-ligatures:none;mso-fareast-language:FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="mso-ligatures:none;mso-fareast-language:FR-CA">Office of Research</span><span lang="EN-CA" style="mso-ligatures:none;mso-fareast-language:FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="mso-ligatures:none;mso-fareast-language:FR-CA">QNC 1611</span><span lang="EN-CA" style="mso-ligatures:none;mso-fareast-language:FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;mso-ligatures:none;mso-fareast-language:FR-CA">University of Waterloo</span><span lang="EN-CA" style="mso-ligatures:none;mso-fareast-language:FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;mso-ligatures:none;mso-fareast-language:FR-CA">200 University Avenue West</span><span lang="EN-CA" style="mso-ligatures:none;mso-fareast-language:FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;mso-ligatures:none;mso-fareast-language:FR-CA">Waterloo, ON, Canada </span><span lang="EN-CA" style="mso-ligatures:none;mso-fareast-language:FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;mso-ligatures:none;mso-fareast-language:FR-CA">N2L 3G1</span><span lang="EN-CA" style="mso-ligatures:none;mso-fareast-language:FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;mso-ligatures:none;mso-fareast-language:FR-CA"> </span><span lang="EN-CA" style="mso-ligatures:none;mso-fareast-language:FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;mso-ligatures:none;mso-fareast-language:FR-CA">Ph: +1 519-888-4567 #37788</span><span lang="EN-CA" style="mso-ligatures:none;mso-fareast-language:FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="mso-ligatures:none;mso-fareast-language:FR-CA">Cell: +1 226-929-1685</span><span lang="EN-CA" style="mso-ligatures:none;mso-fareast-language:FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;mso-ligatures:none;mso-fareast-language:FR-CA">Websites:</span><span lang="EN-CA" style="mso-ligatures:none;mso-fareast-language:FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;color:black;mso-ligatures:none;mso-fareast-language:FR-CA"><a href="https://uwaterloo.ca/quantum-nano-fabrication-and-characterization-facility/"><span style="color:#0563C1">https://uwaterloo.ca/quantum-nano-fabrication-and-characterization-facility/</span></a></span><span lang="EN-CA" style="mso-ligatures:none;mso-fareast-language:FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;color:black;mso-ligatures:none;mso-fareast-language:FR-CA"><a href="https://fab.qnc.uwaterloo.ca/"><span style="color:#0563C1">https://fab.qnc.uwaterloo.ca/</span></a></span><span lang="EN-CA" style="mso-ligatures:none;mso-fareast-language:FR-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA"><o:p> </o:p></span></p>
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