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<p class="MsoNormal">Hello everyone. We will soon be posting two MRL Cyclone LPCVD systems for sale on govdeals.com. I have a ton of pics, so reach out to me if you have an inquiry. The system is not functional and is in pieces.<o:p></o:p></p>
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<p class="MsoNormal">System 1<o:p></o:p></p>
<p class="MsoNormal" style="margin-left:.5in"><span style="color:#212121">MRL Industries Cyclone 430 Tube Furnace System<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-left:.5in"><span style="color:#212121">Vintage: 1999<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-left:.5in"><span style="color:#212121">Wafer Size: 150 mm<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-left:.5in"><span style="color:#212121">Tube 1 (top): Boron Diffusion<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-left:.5in"><span style="color:#212121">Tube 2: Dry/Wet Oxidation<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-left:.5in"><span style="color:#212121">Tube 3: POCL3<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-left:.5in"><span style="color:#212121">Tube 4: Annealing<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-left:.5in"><span style="color:#212121">Condition: Used, Not functional, in pieces<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-left:.5in"><span style="color:#212121">Cyclone Furnace System, Part #6500817330 R00, Serial #: 065008010000911<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-left:.5in"><span style="color:#212121">Load Station, Model #481, Part #: 6540943162 Serial #: 065408012000911<o:p></o:p></span></p>
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<p class="MsoNormal">System 2:<o:p></o:p></p>
<p class="MsoNormal" style="margin-left:.5in"><span style="color:#212121">MRL Industries Cyclone LH Tube Furnace System<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-left:.5in"><span style="color:#212121">Vintage: 1995 (refurbished in 2002)<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-left:.5in"><span style="color:#212121">Wafer Size: 100 - 150 mm<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-left:.5in"><span style="color:#212121">Tube 1 (top): Wet Oxidation<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-left:.5in"><span style="color:#212121">Tube 2: Nitride<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-left:.5in"><span style="color:#212121">Tube 3: Polysilicon<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-left:.5in"><span style="color:#212121">Tube 4: Low Temp Oxide<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-left:.5in"><span style="color:#212121">Condition: Used, Not functional, in pieces<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-left:.5in"><span style="color:#212121">Cyclone Furnace System, Part #650-814214, Serial #: 065000112970903<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-left:.5in"><span style="color:#212121">Load Station, Model #HLFS 48-1, Part #:654-939836, Serial #:71524
<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black;mso-ligatures:none">Cheers!<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black;mso-ligatures:none"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:black;mso-ligatures:none">Julia Aebersold, Ph.D.</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif;color:black;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black;mso-ligatures:none">Manager, Micro/Nano Technology Center</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif;color:black;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black;mso-ligatures:none">University of Louisville</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif;color:black;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black;mso-ligatures:none">Shumaker Research Building, Room 233</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif;color:black;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black;mso-ligatures:none">2210 South Brook Street</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif;color:black;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black;mso-ligatures:none">Louisville, KY 40292</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif;color:black;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black;mso-ligatures:none">(502) 852-1572</span><span style="font-size:12.0pt;font-family:"Times New Roman",serif;color:black;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black;mso-ligatures:none"> </span><span style="font-size:12.0pt;font-family:"Times New Roman",serif;color:black;mso-ligatures:none"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black;mso-ligatures:none"><a href="http://louisville.edu/micronano/"><span style="color:black">http://louisville.edu/micronano/</span></a></span><span style="color:black;mso-ligatures:none"><o:p></o:p></span></p>
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