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<p>Thanks Howard!</p>

<p>Will check it. </p>

<p>Does it work only for i- line or for h- line as well?</p>

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<p id="reply-intro">On 2023-06-23 19:58, Howard Northfield wrote:</p>

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<div class="v1elementToProof" style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: #000000;">I use <span style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: #000000;">Brewer Science, XHRiC I-line Anti Reflective Coating.</span></div>

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<div class="v1elementToProof v1ContentPasted0" style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: #000000;">See:</div>

<div class="v1elementToProof v1ContentPasted0 v1ContentPasted1" style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: #000000;"><a id="v1LPlnk828063" href="https://wiki.nanotech.ucsb.edu/wiki/images/3/33/XHRiC-Anti-Reflective-Coating.pdf" target="_blank" rel="noopener noreferrer">https://wiki.nanotech.ucsb.edu/wiki/images/3/33/XHRiC-Anti-Reflective-Coating.pdf</a></div>

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<div class="v1elementToProof v1ContentPasted0 v1ContentPasted1 v1ContentPasted2" style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: #000000;">H. Northfield, O. Krupin, R. N. Tait, and P. Berini, "Tri-layer contact photolithography process for high-resolution lift-off," Microelectron. Eng. 241 (2021).</div>

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<div class="v1elementToProof v1ContentPasted0 v1ContentPasted1 v1ContentPasted2 v1ContentPasted3" style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: #000000;">Howard Northfield

<div class="v1ContentPasted3">Research Associate</div>

<div class="v1ContentPasted3">Advanced Research Complex (ARC)</div>

University of Ottawa</div>

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<div id="v1divRplyFwdMsg" dir="ltr"><span style="font-size: 11pt; color: #000000; font-family: Calibri, sans-serif;"><strong>From:</strong> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Bikash Dev Choudhury <d.c.bikash@iitb.ac.in><br /><strong>Sent:</strong> Friday, June 23, 2023 5:26 AM<br /><strong>To:</strong> labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br /><strong>Subject:</strong> [labnetwork] Antireflective coating for Litho process</span>

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<div style="font-size: 9pt; font-family: 'calibri'; color: #ff4233;"><strong>Attention : courriel externe | external email</strong></div>

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<p>Dear Labnetwork,</p>

<p>I am looking for antireflective coating for both top and bottom layer in photolitho process. </p>

<p>Looking forward for any lead/info.</p>

<p>Thanks in advance!</p>

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<div class="v1x_pre" style="margin: 0; padding: 0; font-family: monospace;">--<br />Best Regards<br />Dr. Bikash Dev Choudhury<br />Sr. Process Technologist<br />CEN, IITBNF<br />Electrical Engineering Department<br />IIT Bombay, Mumbai-400076<br />Mobile No. 7400319871</div>

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