<html>
<head>
<meta http-equiv="Content-Type" content="text/html; charset=us-ascii">
<style type="text/css" style="display:none;"> P {margin-top:0;margin-bottom:0;} </style>
</head>
<body dir="ltr">
<div style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
I use for i-line with SPR955 i-line optimized photoresist (pretty much only). I use i-line band pass filter plates during exposure. Shorter wavelength better for smaller dimensions.</div>
<div style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
<br>
</div>
<div style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
Howard</div>
<div style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
<br>
</div>
<div style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
<br>
</div>
<div style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt; color: rgb(0, 0, 0);" class="elementToProof">
</div>
<div id="appendonsend"></div>
<hr style="display:inline-block;width:98%" tabindex="-1">
<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> Bikash Dev Choudhury <d.c.bikash@iitb.ac.in><br>
<b>Sent:</b> Saturday, June 24, 2023 2:19 AM<br>
<b>To:</b> Howard Northfield <Howard.Northfield@uottawa.ca><br>
<b>Cc:</b> labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> Re: [labnetwork] Antireflective coating for Litho process</font>
<div> </div>
</div>
<div style="font-size:10pt; font-family:Verdana,Geneva,sans-serif">
<div style="font-size:9pt; font-family:'calibri'; color:#FF4233"><b>Attention : courriel externe | external email</b></div>
<div>
<p>Thanks Howard!</p>
<p>Will check it. </p>
<p>Does it work only for i- line or for h- line as well?</p>
<p><br>
</p>
<p><br>
</p>
<p id="x_reply-intro">On 2023-06-23 19:58, Howard Northfield wrote:</p>
<blockquote type="cite" style="padding:0 0.4em; border-left:#1010ff 2px solid; margin:0">
<div id="x_replybody1"><style type="text/css">
<!--
#x_replybody1 p
{margin-top:0;
margin-bottom:0}
-->
</style>
<div dir="ltr">
<div class="x_v1elementToProof" style="font-family:Calibri,Arial,Helvetica,sans-serif; font-size:12pt; color:#000000">
</div>
<div class="x_v1elementToProof" style="font-family:Calibri,Arial,Helvetica,sans-serif; font-size:12pt; color:#000000">
I use <span style="font-family:Calibri,Arial,Helvetica,sans-serif; font-size:12pt; color:#000000">Brewer Science, XHRiC I-line Anti Reflective Coating.</span></div>
<div class="x_v1elementToProof x_v1ContentPasted0" style="font-family:Calibri,Arial,Helvetica,sans-serif; font-size:12pt; color:#000000">
</div>
<div class="x_v1elementToProof x_v1ContentPasted0" style="font-family:Calibri,Arial,Helvetica,sans-serif; font-size:12pt; color:#000000">
See:</div>
<div class="x_v1elementToProof x_v1ContentPasted0 x_v1ContentPasted1" style="font-family:Calibri,Arial,Helvetica,sans-serif; font-size:12pt; color:#000000">
<a id="x_v1LPlnk828063" href="https://wiki.nanotech.ucsb.edu/wiki/images/3/33/XHRiC-Anti-Reflective-Coating.pdf" originalsrc="https://wiki.nanotech.ucsb.edu/wiki/images/3/33/XHRiC-Anti-Reflective-Coating.pdf" shash="Q9F3wVy1H6JMFPtC+Q/bq2HZwm8NBF+7mluVGcOgFtQBmoRFpFTxYh5FBT2J/00E98J/9DIo0ROGLIdI9HeB5IJcM7iUXYE5i1mpM3vxok4TfRsC/xWF/X9J/qmAKfqCFiyR45dFU8AqNgrOa+iDao1YzJKayWCmJe9jBGMws1U=" target="_blank" rel="noopener noreferrer">https://wiki.nanotech.ucsb.edu/wiki/images/3/33/XHRiC-Anti-Reflective-Coating.pdf</a></div>
<div class="x_v1elementToProof x_v1ContentPasted0 x_v1ContentPasted1" style="font-family:Calibri,Arial,Helvetica,sans-serif; font-size:12pt; color:#000000">
</div>
<div class="x_v1elementToProof x_v1ContentPasted0 x_v1ContentPasted1" style="font-family:Calibri,Arial,Helvetica,sans-serif; font-size:12pt; color:#000000">
See also:</div>
<div class="x_v1elementToProof x_v1ContentPasted0 x_v1ContentPasted1 x_v1ContentPasted2" style="font-family:Calibri,Arial,Helvetica,sans-serif; font-size:12pt; color:#000000">
H. Northfield, O. Krupin, R. N. Tait, and P. Berini, "Tri-layer contact photolithography process for high-resolution lift-off," Microelectron. Eng. 241 (2021).</div>
<div class="x_v1elementToProof x_v1ContentPasted0 x_v1ContentPasted1 x_v1ContentPasted2" style="font-family:Calibri,Arial,Helvetica,sans-serif; font-size:12pt; color:#000000">
</div>
<div class="x_v1elementToProof x_v1ContentPasted0 x_v1ContentPasted1 x_v1ContentPasted2" style="font-family:Calibri,Arial,Helvetica,sans-serif; font-size:12pt; color:#000000">
</div>
<div class="x_v1elementToProof x_v1ContentPasted0 x_v1ContentPasted1 x_v1ContentPasted2 x_v1ContentPasted3" style="font-family:Calibri,Arial,Helvetica,sans-serif; font-size:12pt; color:#000000">
Howard Northfield
<div class="x_v1ContentPasted3">Research Associate</div>
<div class="x_v1ContentPasted3">Advanced Research Complex (ARC)</div>
University of Ottawa</div>
<div class="x_v1elementToProof x_v1ContentPasted0 x_v1ContentPasted1" style="font-family:Calibri,Arial,Helvetica,sans-serif; font-size:12pt; color:#000000">
</div>
<div class="x_v1elementToProof x_v1ContentPasted0" style="font-family:Calibri,Arial,Helvetica,sans-serif; font-size:12pt; color:#000000">
</div>
<div id="x_v1appendonsend"></div>
<hr style="display:inline-block; width:98%">
<div id="x_v1divRplyFwdMsg" dir="ltr"><span style="font-size:11pt; color:#000000; font-family:Calibri,sans-serif"><strong>From:</strong> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Bikash Dev Choudhury <d.c.bikash@iitb.ac.in><br>
<strong>Sent:</strong> Friday, June 23, 2023 5:26 AM<br>
<strong>To:</strong> labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<strong>Subject:</strong> [labnetwork] Antireflective coating for Litho process</span>
<div> </div>
</div>
<div style="font-size:10pt; font-family:Verdana,Geneva,sans-serif">
<div style="font-size:9pt; font-family:'calibri'; color:#ff4233"><strong>Attention : courriel externe | external email</strong></div>
<div>
<p>Dear Labnetwork,</p>
<p>I am looking for antireflective coating for both top and bottom layer in photolitho process. </p>
<p>Looking forward for any lead/info.</p>
<p>Thanks in advance!</p>
<div id="x_v1x_signature">
<div class="x_v1x_pre" style="margin:0; padding:0; font-family:monospace">--<br>
Best Regards<br>
Dr. Bikash Dev Choudhury<br>
Sr. Process Technologist<br>
CEN, IITBNF<br>
Electrical Engineering Department<br>
IIT Bombay, Mumbai-400076<br>
Mobile No. 7400319871</div>
</div>
</div>
</div>
</div>
</div>
</blockquote>
<div id="x_signature">--</div>
</div>
</div>
</body>
</html>